JPH0291807A - Composite thin-film magnetic head - Google Patents
Composite thin-film magnetic headInfo
- Publication number
- JPH0291807A JPH0291807A JP24328788A JP24328788A JPH0291807A JP H0291807 A JPH0291807 A JP H0291807A JP 24328788 A JP24328788 A JP 24328788A JP 24328788 A JP24328788 A JP 24328788A JP H0291807 A JPH0291807 A JP H0291807A
- Authority
- JP
- Japan
- Prior art keywords
- yoke
- gap
- recording
- magnetic head
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 23
- 239000002131 composite material Substances 0.000 title claims abstract description 17
- 239000000758 substrate Substances 0.000 claims description 7
- 239000000696 magnetic material Substances 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 3
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000004907 flux Effects 0.000 abstract description 6
- 239000010410 layer Substances 0.000 description 16
- 238000004544 sputter deposition Methods 0.000 description 7
- 229910000889 permalloy Inorganic materials 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000000206 photolithography Methods 0.000 description 3
- 229910000702 sendust Inorganic materials 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000011241 protective layer Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000006698 induction Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 229910001004 magnetic alloy Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/33—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
- G11B5/39—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
- G11B5/3903—Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures
- G11B5/3967—Composite structural arrangements of transducers, e.g. inductive write and magnetoresistive read
Abstract
Description
【発明の詳細な説明】
（イ）産業上の利用分野
本発明は薄膜誘導型へ・ラドと磁気抵抗効果型ヘッドと
の両方を備える複合型薄膜磁気ヘッドに関する。DETAILED DESCRIPTION OF THE INVENTION (a) Field of Industrial Application The present invention relates to a composite thin film magnetic head that includes both a thin film induction type magnetic head and a magnetoresistive head.
（ロ）従来の技術
近年、ＶＴＲ（ビデオテープレコーダ〉や磁気ファイル
装置の高密度化、小形化に対応するため磁気抵抗効果ヘ
ッド（以下ＭＲヘッドという）が注目されている。この
ＭＲヘッドは電流の方向と磁化のなす角度によって抵抗
値が変化する磁気抵抗効果素子（以下ＭＲ素子という）
を用い、信号磁界の変化を抵抗変化として検出するヘッ
ドであり、再生出力電圧が媒体−ヘッド間の相対速度に
依存しないという特徴を有する。そして１．このＭＲヘ
ッドは再生専用ヘッドであるため、記録用として誘導型
薄膜ヘッドを用いた記録再生一体型の複合型薄膜磁気ヘ
ッドが特開昭６２−２９１７１３号公報（Ｇ１１Ｂ５／
３９）等で提案されていスを簡略化１．、製造コストを
下げるなめに、記録・再生部で共通化できるものは極力
共通化することが望まし、い。しかし乍ら、上述の共通
化により、記録・再生機能が劣化するようでは、複合化
の意味がなくなってしまう９
第２図は従来の複合型薄膜磁気ヘッドの要部断面図であ
る。(b) Conventional technology In recent years, magnetoresistive heads (hereinafter referred to as MR heads) have attracted attention in order to cope with the increasing density and miniaturization of VTRs (video tape recorders) and magnetic file devices. A magnetoresistive element (hereinafter referred to as MR element) whose resistance value changes depending on the direction of and the angle formed by magnetization.
This is a head that detects changes in a signal magnetic field as changes in resistance, and has the characteristic that the reproduction output voltage does not depend on the relative speed between the medium and the head. And 1. Since this MR head is a read-only head, a composite thin-film magnetic head that uses an inductive thin-film head for recording and is integrated with recording and playback is disclosed in Japanese Patent Laid-Open No. 62-291713 (G11B5/
Simplify the process proposed in 39) etc. 1. In order to reduce manufacturing costs, it is desirable to standardize as much of the recording/playback section as possible. However, if the recording/reproducing function deteriorates due to the above-mentioned commonality, there will be no point in combining them.9 FIG. 2 is a cross-sectional view of the main part of a conventional composite type thin film magnetic head.
図中、（１）は基板、（２）は下部ヨーク、（３）は上
部ヨーク、（４）はコイル、（５）はＭＲ素子、（６）
はギャップである。この複合型磁気ヘッドでは、下部ヨ
ーク（２）を分断し、その間にＭＲ素子（５）を挿入す
ることにより、記録時にコイル（４）を流れる電流によ
って磁化され、ギャップ（６）で記録磁界を発生するヨ
ークと、再生時に媒体からの信号磁束をＭＲ素子（５）
に導くためのヨークとを共通化している。しかし乍ら、
この構造の複合型薄膜磁気ヘッドでは、下部ヨーク（２
）がＭＲ素子（５）を挟んで分かれているため、記録時
においては、この部分での磁化レベルが小さくなり、十
分な記録磁界を発生させることは出来ない。また、再生
時においては、ＭＲ素子（５）は下部ヨーク（２）を通
る磁束量そのものを検出するため再生感度が悪い。In the figure, (1) is the substrate, (2) is the lower yoke, (3) is the upper yoke, (4) is the coil, (5) is the MR element, (6)
is the gap. In this composite magnetic head, by dividing the lower yoke (2) and inserting the MR element (5) between them, it is magnetized by the current flowing through the coil (4) during recording, and the recording magnetic field is generated in the gap (6). The generated yoke and the signal magnetic flux from the medium during reproduction are transferred to the MR element (5).
It has a common yoke to lead to. However,
In the composite thin film magnetic head with this structure, the lower yoke (2
) are separated with the MR element (5) in between, so during recording, the magnetization level in this part becomes small, making it impossible to generate a sufficient recording magnetic field. Furthermore, during reproduction, the MR element (5) detects the amount of magnetic flux passing through the lower yoke (2) itself, and therefore has poor reproduction sensitivity.
上述の欠点を解消した複合型薄膜磁気ヘッドとしては、
第３図または第４図に示すようにギャップ（６）内にＭ
Ｒ素子（７）またはヨーク（８）を設けたものがある。As a composite thin-film magnetic head that eliminates the above-mentioned drawbacks,
M in the gap (6) as shown in Figure 3 or Figure 4.
Some are provided with an R element (7) or a yoke (8).
この複合型薄膜磁気ヘッドでは、再生時においてギャッ
プ（６）で媒体から導かれた磁束はＭＲ素子（７）また
は（８）を通過した後、下部ヨーク（２）または磁性基
板（１０）を通って媒体に戻るため再生感度が向上する
。しかし乍ら、この構造の複合型薄膜磁気ヘッドにおい
ても、ギャッ（６）内にＭＲ素子（７）やヨーク（８）
が形成されているので、狭ギャップ化が計れないという
欠点がある。In this composite thin-film magnetic head, during reproduction, the magnetic flux led from the medium in the gap (6) passes through the MR element (7) or (8), and then passes through the lower yoke (2) or the magnetic substrate (10). playback sensitivity is improved. However, even in a composite thin-film magnetic head with this structure, there is an MR element (7) and a yoke (8) within the gap (6).
is formed, so there is a drawback that narrowing the gap cannot be measured.
（ハ）発明が解決しようとする課題
本発明は上記従来例の欠点に鑑み為されたものであり、
十分な記録磁界を発生ずることが出来、且つ再生感度に
優れ、更に狭ギャップ化に適している複合型薄膜磁気ヘ
ッドを提供することを目的とするものである。(c) Problems to be Solved by the Invention The present invention has been made in view of the drawbacks of the above-mentioned conventional examples.
It is an object of the present invention to provide a composite thin film magnetic head that can generate a sufficient recording magnetic field, has excellent read sensitivity, and is suitable for narrowing the gap.
（ニ）課題を解決するための手段
本発明の複合型薄膜磁気ヘッドは、基板上に磁性材料よ
りなる下部ヨークを形成し、該下部ヨーク上に第１の絶
縁層により被覆された導体コイル層及び記録ギャップを
形成し、前記第１の絶縁層及び前記記録ギャップ上に磁
性材料よりなる上部ヨークを形成し、該上部ヨーク上に
第２の絶縁層により被覆されたＭＲ素子及び再生ギャッ
プを形成し、前記第２の絶縁層及び前記再生ギャップ上
に磁性材料よりなるＭＲ素子用ヨークを設けたことを特
徴とする。(d) Means for Solving the Problems The composite thin film magnetic head of the present invention includes a lower yoke made of a magnetic material formed on a substrate, and a conductor coil layer covered with a first insulating layer on the lower yoke. and a recording gap, forming an upper yoke made of a magnetic material on the first insulating layer and the recording gap, and forming an MR element covered with a second insulating layer and a read gap on the upper yoke. A yoke for an MR element made of a magnetic material is provided on the second insulating layer and the read gap.
（ホ）作 用
上記構成に依れば、記録時の磁路を形成する下部ヨーク
及び上部ヨークは共に分断されておらず、十分な記録磁
界を発生することが出来、且つ、再生ギャップより導か
れた磁束はＭＲ素子を通過した後、ＭＲ素子用ヨークま
たは上部ヨークを通って媒体に戻るため再生感度が向上
する。また、記録ギャップ内にはＭＲ素子やヨークが形
成されておらず狭ギャップ化に適している。(E) Effect According to the above configuration, the lower yoke and the upper yoke that form the magnetic path during recording are not separated, and a sufficient recording magnetic field can be generated, and the magnetic field is guided from the reproduction gap. After passing through the MR element, the emitted magnetic flux returns to the medium through the MR element yoke or the upper yoke, thereby improving reproduction sensitivity. Furthermore, no MR element or yoke is formed within the recording gap, making it suitable for narrowing the gap.
（へ）実施例
以下、図面を参照しつつ本発明の一実施例を詳細に説明
する。(F) Embodiment Hereinafter, an embodiment of the present invention will be described in detail with reference to the drawings.
第１図は本実施例の複合型薄膜磁気ヘッドの要部断面図
である。FIG. 1 is a sectional view of the main parts of the composite thin film magnetic head of this embodiment.
図中、（１１）は非磁性基板であり、該非磁性基板（１
１）上にはフォトリソグラフィー技術及びイオンエツチ
ング技術により講（１２）が形成されている。In the figure, (11) is a non-magnetic substrate;
1) A groove (12) is formed on the top by photolithography and ion etching.
前記非磁性基板（１１）上にはパーマロイ、センダスト
、Ｃｏ系アモルファス磁性合金等よりなる下部ヨーク（
１３）がスパッタリング、蒸着法等により形成されてお
り、該下部ヨーク（１３）の上面には前記溝（１２）に
より凹部（１４）が形成されている。前記溝（１２）内
には各層が絶縁層（１５）により覆われているコイル（
１６ａ） （１６ｂ）が形成されている。前記コイル（
１６ａ） （１６ｂｌは、先ず、前記下部ヨーク（１３
）上面にスパッタリングによりＳ ｉ０２ 、Ａ １□
０９等からなる絶縁薄膜を被着し平坦化処理を行った後
、前記凹部（１４）内にＣｕ、Ａ１等からなるコイル（
１６ａ）をパックギャップを囲むようにスパイラル状に
フォトリソグラフィ技術及びエツチング技術により形成
し、その後、もう−度量様にして絶縁薄膜、前記コイル
（１６ａ）に導通するコイル（＋６ｂ）及び絶縁薄膜を
被着することにより形成される。（１７）は前述のコイ
ル（１６ａ） （１６ｂ）及び第１の絶縁層（１５）形
成後、或いは第１の絶縁層（１５）形成時にスパッタリ
ング等により形成される５ｉＯｚ、Ａ１２０ｉ等のギャ
ップスペーサよりなる記録ギャップである。前記記録ギ
ャップ（１７）を形成するギャップスペーサ及び前記第
１の絶縁層（１５）上にはパーマロイ、センダスト、Ｃ
ｏ系アモルファス合金等よりなる上部ヨーク（１８）が
スパッタリング等により形成されている。前記上部ヨー
ク（１８）上にはＳｉＯ２、Ａｌ２Ｏ３等のギャップス
ペーサよりなる再生ギャップ（１９）及び第２の絶縁層
（２０）が形成されており、該絶縁層（２０）内の上方
にはＭＲ素子（２１）が形成されている。前記ＭＲ素子
（２１）はパーマロイの薄膜を真空蒸着法またはスパッ
タリングにより成膜した後、該パーマロイの薄膜をフォ
トリソグラフィー技術及びエツチング技術により所定形
状に加工することにより形成される。前記再生ギャップ
（１９）及び前記第２の絶縁層（２０）上にはパーマロ
イ、センダスト、Ｃｏ系アモルファス合金等よりなるＭ
Ｒ素子用ヨーク（２２）がスパッタリング等により形成
されている。前記ＭＲ素子用ヨーク（２２）は前記ＭＲ
素子（２１）との重なり部分が数μｍになるようにフォ
トリングラフイー技術とエツチング技術とによりフロン
ト部（２２ａ）とバック部（２２ｂ）とにより分断され
ている。前記ＭＲ素子用ヨーク（２２）上には５ｉ０２
等よりなる保護層（２３）がスパッタリング等により形
成されており、該保護層（２３）上にはＴｉ酸Ｂａ等よ
りなる保護板（２４）が樹脂接合されている。On the non-magnetic substrate (11) is a lower yoke (made of permalloy, sendust, Co-based amorphous magnetic alloy, etc.).
13) is formed by sputtering, vapor deposition, etc., and a recess (14) is formed by the groove (12) on the upper surface of the lower yoke (13). Inside the groove (12) is a coil (with each layer covered with an insulating layer (15)).
16a) (16b) are formed. Said coil (
16a) (16bl firstly connects the lower yoke (13
) S i02 , A 1□ by sputtering on the top surface
After depositing an insulating thin film made of 09 or the like and performing a planarization process, a coil (made of Cu, A1, etc.) is placed in the recess (14).
16a) is formed in a spiral shape by photolithography and etching techniques so as to surround the pack gap, and then an insulating thin film, a coil (+6b) electrically connected to the coil (16a), and an insulating thin film are coated in a similar manner. It is formed by wearing. (17) is a gap spacer such as 5iOz or A120i formed by sputtering or the like after or during the formation of the coils (16a) (16b) and the first insulating layer (15). This is a record gap. On the gap spacer forming the recording gap (17) and on the first insulating layer (15), permalloy, Sendust, C
An upper yoke (18) made of an o-based amorphous alloy or the like is formed by sputtering or the like. A reproducing gap (19) made of a gap spacer such as SiO2, Al2O3, etc. and a second insulating layer (20) are formed on the upper yoke (18), and an MR layer is formed above the insulating layer (20). An element (21) is formed. The MR element (21) is formed by forming a permalloy thin film by vacuum evaporation or sputtering, and then processing the permalloy thin film into a predetermined shape by photolithography and etching. M made of permalloy, sendust, Co-based amorphous alloy, etc. is formed on the reproducing gap (19) and the second insulating layer (20).
The R element yoke (22) is formed by sputtering or the like. The MR element yoke (22) is the MR element yoke (22).
It is divided into a front part (22a) and a back part (22b) by photophosphorography technology and etching technology so that the overlapping part with the element (21) is several μm. 5i02 on the MR element yoke (22)
A protective layer (23) made of a material such as the like is formed by sputtering or the like, and a protective plate (24) made of Ba Ti acid or the like is bonded with a resin on the protective layer (23).
上述のような複合型薄膜磁気ヘッドでは、記録時におけ
る磁気回路を構成する下部ヨーク（１３）及び上部ヨー
ク（１８）は共に分断されていないので、磁化レベルは
劣化せず、記録ギャップ（１７）からは十分な記録磁界
が発生する。また、再生時に再生ギャップ（１９）で媒
体から導かれた磁束はＭＲ素子用ヨーク（２２）のフロ
ント部（２２ａ）を通ってＭＲ素子（２１）に導かれた
後、前記ＭＲ素子用ヨーク（２２）のバック部（２２ｂ
）及び上部ヨーク（１８）を通って媒体に戻るループを
形成するため、再生感度が良好である。また、記録ギャ
ップ（１７）内には何も形成されておらず、狭ギャップ
化が可能である。In the composite thin-film magnetic head as described above, since the lower yoke (13) and the upper yoke (18) that constitute the magnetic circuit during recording are not separated, the magnetization level does not deteriorate and the recording gap (17) A sufficient recording magnetic field is generated. Further, during reproduction, the magnetic flux guided from the medium in the reproduction gap (19) passes through the front part (22a) of the MR element yoke (22) and is guided to the MR element (21). 22) back part (22b
) and the upper yoke (18) to form a loop that returns to the medium, resulting in good reproduction sensitivity. Furthermore, nothing is formed within the recording gap (17), allowing the gap to be narrowed.
（ト）発明の効果
本発明に依れば、良好な記録再生を行い、且つ侠ギャッ
プ化に適した磁気ヘッドを提供し得る。(g) Effects of the Invention According to the present invention, it is possible to provide a magnetic head that performs good recording and reproduction and is suitable for narrowing the gap.
第１図は本発明の複合型薄膜磁気ヘッドの要部断面図で
ある。第２図、第３図及び第４図は夫々従来の複合型薄
膜磁気ヘッドの要部断面図である。
（１１）・・・非磁性基板、（１３）・・・下部ヨーク
、（１５）・・・第１の絶縁層、（１６ａｌ （１６ｂ
）・・・コイル（導体コイル層） ＋ （１７）・・・
記録ギャップ、（１８）・・・上部ヨーク、（１９）・
・・再生ギャップ、（２０）・・・第２の絶縁層、（２
１）・・・ＭＲ素子、（２２）・・・ＭＲ素子用ヨーク
。
第１図
第２図FIG. 1 is a sectional view of a main part of a composite thin film magnetic head of the present invention. FIGS. 2, 3, and 4 are sectional views of essential parts of conventional composite thin film magnetic heads, respectively. (11)...Nonmagnetic substrate, (13)...Lower yoke, (15)...First insulating layer, (16al (16b)
)... Coil (conductor coil layer) + (17)...
Recording gap, (18)... Upper yoke, (19)...
...Reproduction gap, (20)...Second insulating layer, (2
1)...MR element, (22)...Yoke for MR element. Figure 1 Figure 2
Claims (1)
該下部ヨーク上に第１の絶縁層により被覆された導体コ
イル層及び記録ギャップを形成し、前記第１の絶縁層及
び前記記録ギャップ上に磁性材料よりなる上部ヨークを
形成し、該上部ヨーク上に第２の絶縁層により被覆され
た磁気抵抗効果素子及び再生ギャップを形成し、前記第
２の絶縁層及び前記再生ギャップ上に磁性材料よりなる
磁気抵抗効果素子用ヨークを設けたことを特徴とする複
合型薄膜磁気ヘッド。(1) Forming a lower yoke made of magnetic material on the substrate,
A conductor coil layer covered with a first insulating layer and a recording gap are formed on the lower yoke, an upper yoke made of a magnetic material is formed on the first insulating layer and the recording gap, and an upper yoke is formed on the upper yoke. A magnetoresistive element covered with a second insulating layer and a read gap are formed, and a yoke for the magnetoresistive element made of a magnetic material is provided on the second insulating layer and the read gap. Composite thin film magnetic head.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24328788A JPH0291807A (en) | 1988-09-28 | 1988-09-28 | Composite thin-film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24328788A JPH0291807A (en) | 1988-09-28 | 1988-09-28 | Composite thin-film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0291807A true JPH0291807A (en) | 1990-03-30 |
Family
ID=17101605
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24328788A Pending JPH0291807A (en) | 1988-09-28 | 1988-09-28 | Composite thin-film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0291807A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0538856A2 (en) * | 1991-10-23 | 1993-04-28 | Matsushita Electric Industrial Co., Ltd. | Composite thin film magnetic head |
| EP0670570A2 (en) * | 1994-03-03 | 1995-09-06 | Seagate Technology International | Magnetoresistive head and method of manufacture thereof |
| US5535079A (en) * | 1991-05-30 | 1996-07-09 | Fukazawa; Toshio | Integrated thin film magnetic head |
| EP0747887A2 (en) * | 1995-06-07 | 1996-12-11 | Seagate Technology, Inc. | Method of fabricating an inverted magnetoresistive head |
| EP0752700A2 (en) * | 1995-07-05 | 1997-01-08 | Sony Corporation | Complex type thin film magnetic head and production method thereof |
| US5668689A (en) * | 1994-03-03 | 1997-09-16 | Seagate Technology, Inc. | Inverted magnetoresistive head |
| EP0894319A1 (en) * | 1996-04-18 | 1999-02-03 | Storage Technology Corporation | Thin film tape head with reduced pole-tip recession |
| US6125019A (en) * | 1992-04-13 | 2000-09-26 | Hitachi, Ltd. | Magnetic head including magnetoresistive element |
| US6259585B1 (en) | 1997-01-25 | 2001-07-10 | Tdk Corporation | Inverted hybrid thin film magnetic head and method of manufacturing the same |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62145527A (en) * | 1985-12-18 | 1987-06-29 | Sharp Corp | Compound type thin film magnetic head |
-
1988
- 1988-09-28 JP JP24328788A patent/JPH0291807A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62145527A (en) * | 1985-12-18 | 1987-06-29 | Sharp Corp | Compound type thin film magnetic head |
Cited By (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5535079A (en) * | 1991-05-30 | 1996-07-09 | Fukazawa; Toshio | Integrated thin film magnetic head |
| EP0538856A2 (en) * | 1991-10-23 | 1993-04-28 | Matsushita Electric Industrial Co., Ltd. | Composite thin film magnetic head |
| US6633465B2 (en) | 1992-04-13 | 2003-10-14 | Hitachi, Ltd. | Magnetoresistive element |
| US6249405B1 (en) | 1992-04-13 | 2001-06-19 | Hitachi, Ltd. | Magnetic head including magnetoresistive element |
| US6125019A (en) * | 1992-04-13 | 2000-09-26 | Hitachi, Ltd. | Magnetic head including magnetoresistive element |
| US5668689A (en) * | 1994-03-03 | 1997-09-16 | Seagate Technology, Inc. | Inverted magnetoresistive head |
| US5640753A (en) * | 1994-03-03 | 1997-06-24 | Seagate Technology, Inc. | Method of fabricating an inverted magnetoresistive head |
| EP0670570A3 (en) * | 1994-03-03 | 1997-01-22 | Seagate Technology | Magnetoresistive head and method of manufacture thereof. |
| EP0670570A2 (en) * | 1994-03-03 | 1995-09-06 | Seagate Technology International | Magnetoresistive head and method of manufacture thereof |
| EP0747887A3 (en) * | 1995-06-07 | 1997-02-26 | Seagate Technology | Method of fabricating an inverted magnetoresistive head |
| EP0747887A2 (en) * | 1995-06-07 | 1996-12-11 | Seagate Technology, Inc. | Method of fabricating an inverted magnetoresistive head |
| EP0752700A3 (en) * | 1995-07-05 | 1998-01-14 | Sony Corporation | Complex type thin film magnetic head and production method thereof |
| EP0752700A2 (en) * | 1995-07-05 | 1997-01-08 | Sony Corporation | Complex type thin film magnetic head and production method thereof |
| EP0894319A1 (en) * | 1996-04-18 | 1999-02-03 | Storage Technology Corporation | Thin film tape head with reduced pole-tip recession |
| EP0894319A4 (en) * | 1996-04-18 | 1999-09-15 | Storage Technology Corp | Thin film tape head with reduced pole-tip recession |
| US6259585B1 (en) | 1997-01-25 | 2001-07-10 | Tdk Corporation | Inverted hybrid thin film magnetic head and method of manufacturing the same |
| US6542339B1 (en) | 1997-01-25 | 2003-04-01 | Tdk Corporation | Inverted hybrid thin film magnetic head and method of manufacturing the same |
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