JPH0417105A - Perpendicular thin film magnetic head - Google Patents
Perpendicular thin film magnetic headInfo
- Publication number
- JPH0417105A JPH0417105A JP12236990A JP12236990A JPH0417105A JP H0417105 A JPH0417105 A JP H0417105A JP 12236990 A JP12236990 A JP 12236990A JP 12236990 A JP12236990 A JP 12236990A JP H0417105 A JPH0417105 A JP H0417105A
- Authority
- JP
- Japan
- Prior art keywords
- magnetic pole
- tip
- magnetic
- recording medium
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 38
- 239000000758 substrate Substances 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 239000010408 film Substances 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 54
- 229910003271 Ni-Fe Inorganic materials 0.000 description 5
- 239000011241 protective layer Substances 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 4
- 230000000740 bleeding effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 229920001187 thermosetting polymer Polymers 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0026—Pulse recording
- G11B2005/0029—Pulse recording using magnetisation components of the recording layer disposed mainly perpendicularly to the record carrier surface
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
Description
【発明の詳細な説明】
〔概 要〕
記録媒体に対して垂直方向に磁化して記録及び再生を行
う方式の磁気ディスク装置、或いは磁気テープ装置等に
用いられる垂直薄膜磁気ヘッドに関し、
主磁極の一部を構成する磁極盛り上げ層の先端から漏洩
する磁界を主磁極先端部へ誘導する磁極形状とすること
によって、記録媒体に対する書き滲みの発生を解消する
ことを目的とし、補助磁極を構成する磁性基板上に薄膜
コイルを介して先端部が薄い主磁極を配置した垂直磁気
ヘッドにおいて、前記補助磁極となる磁性基板の主磁極
形成面を記録媒体に対し傾斜奎せ、かつ主磁極の薄い先
端部を記録媒体に対し垂直にし、厚い磁極部分を前記磁
性基板の主磁極形成面と平行するように傾斜させた構成
とする。[Detailed Description of the Invention] [Summary] This invention relates to a perpendicular thin film magnetic head used in a magnetic disk device or a magnetic tape device that performs recording and reproduction by magnetizing perpendicularly to a recording medium. The purpose of this is to eliminate the occurrence of writing blur on the recording medium by creating a magnetic pole shape that guides the magnetic field leaking from the tip of the magnetic pole raised layer, which is a part of the magnetic pole, to the tip of the main pole. In a perpendicular magnetic head in which a main pole with a thin tip is disposed on a substrate via a thin film coil, the main pole forming surface of the magnetic substrate serving as the auxiliary magnetic pole is inclined with respect to the recording medium, and the thin tip of the main pole is perpendicular to the recording medium, and the thick magnetic pole portion is inclined so as to be parallel to the main pole forming surface of the magnetic substrate.
本発明は記録媒体に対して垂直方向に磁化して記録及び
再生を行う方式の磁気ディスク装置、或いは磁気テープ
装置等に用いられる垂直薄膜磁気ヘッドに関するもので
ある。The present invention relates to a perpendicular thin-film magnetic head used in a magnetic disk device or a magnetic tape device that performs recording and reproduction by magnetizing in a direction perpendicular to a recording medium.
近年、コンピュータシステムの外部記憶装置として用い
られている磁気ディスク装置等においては、大容量化、
高密度記録化に伴い、高性能な薄膜磁気ヘッドが要求さ
れ、高密度記録が得られる主磁極励磁型の垂直薄膜磁気
ヘッドが注目されている。In recent years, the capacity of magnetic disk devices used as external storage devices for computer systems has increased,
BACKGROUND ART With the trend toward higher density recording, high-performance thin film magnetic heads are required, and main pole excitation type perpendicular thin film magnetic heads that can achieve high density recording are attracting attention.
このような垂直薄膜磁気ヘッドでは、主磁極の構成によ
り記録媒体への書き滲みが生じ、再生時の孤立再生波形
に歪みが発生する傾向にある。このため、そのような記
録媒体への書き滲みの生じない構成の主磁極を備えた垂
直薄膜磁気ヘッドが必要とされている。In such a vertical thin-film magnetic head, writing on the recording medium tends to bleed due to the configuration of the main pole, and distortion tends to occur in the isolated reproduced waveform during reproduction. Therefore, there is a need for a perpendicular thin film magnetic head having a main pole that does not cause such write bleeding on a recording medium.
従来の垂直薄膜磁気ヘッドは、第５図の斜視図及び第６
図の要部断面図で示すように、補助磁極を兼ねるＮｉ−
Ｚｎフェライトなどからなる磁性基板１１上に、熱硬化
性絶縁樹脂等からなる層間絶縁層１２により挟まれた渦
巻状の薄膜コイル１３が配設され、その薄膜コイル１３
上を含む前記磁性基板１１上にＡ ｆｆｉ ２０３、或
いはＳｉＯ□などからなる厚い無機絶縁層１４を介して
、Ｎｉ−Ｆｅからなる薄い膜厚の磁極層１７が配設され
ている。その薄い膜厚の磁極層１７の先端部１７ａは媒
体対向面２０に露出するように延在され、後端部１７ｂ
は前記薄膜コイル１３の中心部に設けた旧−Ｆｅからな
る磁極接続層１５により前記磁性基板１１と接続されて
いる。The conventional vertical thin film magnetic head is shown in the perspective view of FIG. 5 and in the perspective view of FIG.
As shown in the cross-sectional view of the main part in the figure, the Ni-
A spiral thin film coil 13 sandwiched between interlayer insulating layers 12 made of thermosetting insulating resin or the like is disposed on a magnetic substrate 11 made of Zn ferrite or the like.
A thin magnetic pole layer 17 made of Ni--Fe is disposed on the magnetic substrate 11 including the upper part with a thick inorganic insulating layer 14 made of Affi 203 or SiO□ interposed therebetween. The tip portion 17a of the thin magnetic pole layer 17 extends so as to be exposed to the medium facing surface 20, and the rear end portion 17b
is connected to the magnetic substrate 11 by a magnetic pole connection layer 15 made of old -Fe provided at the center of the thin film coil 13.
またその薄い膜厚の磁極層１７上の先端部１７ａを除く
所定領域には、Ｎｉ−Ｆｅからなる厚い膜厚の磁極盛り
上げ層１８が積層されて磁気抵抗を低減した主磁極１６
が構成されている。そしてかかる主磁極１６を含む無機
絶縁層１４上には八ρ２０３からなる保護層１９が被覆
されている。In addition, a thick magnetic pole raised layer 18 made of Ni-Fe is laminated on a predetermined region of the thin magnetic pole layer 17 except for the tip 17a, thereby reducing the magnetic resistance of the main magnetic pole 16.
is configured. The inorganic insulating layer 14 including the main pole 16 is coated with a protective layer 19 made of 8ρ203.
このような構成の磁気ヘッドは、一般にインダクティプ
ヘッドと呼ばれ、電磁誘導の原理を利用して一般に高透
磁率な軟磁性層を裏打ちした二層膜構造の記録媒体２１
と組み合わせて用いられ、該媒体２１の軟磁性層を記録
・再生時の磁束の磁路として記録層に対して磁化情報を
記録・再生するもので、記録に際しては、前記薄膜コイ
ル１３に信号電流を流して主磁極１６を励磁し、その先
端部１６ａ（１７ａ）に発生するシャープで強い記録磁
界により対向する記録媒体２１を垂直に磁化して所望の
情報を記録する、また一方、再生に際しては、記録媒体
２１からの情報磁界による主磁極１６の磁化の変化によ
り前記薄膜コイル１３に誘導される電圧の変化を再生信
号として検出することによって情報を再生している。A magnetic head with such a configuration is generally called an inductive head, and utilizes the principle of electromagnetic induction to create a recording medium 21 with a two-layer film structure backed by a soft magnetic layer with high magnetic permeability.
The soft magnetic layer of the medium 21 serves as a magnetic path for the magnetic flux during recording and reproduction to record and reproduce magnetization information on the recording layer. During recording, a signal current is applied to the thin film coil 13. is applied to excite the main magnetic pole 16, and a sharp and strong recording magnetic field generated at its tip 16a (17a) vertically magnetizes the opposing recording medium 21 to record desired information. Information is reproduced by detecting, as a reproduction signal, a change in the voltage induced in the thin film coil 13 due to a change in the magnetization of the main pole 16 due to an information magnetic field from the recording medium 21.
ところで上記した従来の垂直薄膜磁気ヘッドでは、Ｎｉ
−Ｆｅからなる薄い膜厚の磁極層１７上の先端部１７ａ
を除く領域に、同じ＜ Ｎｉ−Ｆｅからなる厚い膜厚の
磁極盛り上げ層１８を積層した主磁極１６の構成により
、咳主磁極１６の磁気抵抗を低減して記録再生効率を高
めているが、第７図に示すように主磁極先端部１６ａ（
１７ａ）の近傍の磁極盛り上げ層１８の先端１８ａが記
録媒体２１と平行に対向する構成からなっているため、
記録媒体２１に対する情報記録に際して磁極盛り上げ層
１８の先端１８ａからも不要な磁界が漏出し、これに起
因して記録媒体２１への書き滲みが発生して擬似情報が
記録される。By the way, in the conventional vertical thin film magnetic head mentioned above, Ni
- Tip portion 17a on thin magnetic pole layer 17 made of Fe
The main magnetic pole 16 has a structure in which a thick magnetic pole raised layer 18 made of the same Ni-Fe is laminated in the area except for the magnetic pole 16, thereby reducing the magnetic resistance of the main magnetic pole 16 and increasing the recording and reproducing efficiency. As shown in FIG. 7, the main pole tip 16a (
Since the tip 18a of the magnetic pole raised layer 18 near 17a) is configured to face the recording medium 21 in parallel,
When information is recorded on the recording medium 21, an unnecessary magnetic field also leaks from the tip 18a of the magnetic pole raised layer 18, and this causes writing blur on the recording medium 21 and pseudo information is recorded.
またこの擬似情報が再生に際して第８図に示すように孤
立再生波形に歪みを生じさせる原因となる等、高密度記
録を達成する上で大きな障害となるといった欠点があっ
た。Furthermore, this pseudo information causes distortion in the isolated reproduced waveform during reproduction as shown in FIG. 8, and has the disadvantage that it becomes a major hindrance to achieving high density recording.
本発明は上記した従来の欠点に鑑み、主磁極の一部を構
成するｍｓ盛り上げ層の先端から漏洩する磁界を主磁極
先端部へ誘導する磁極形状とすることによって、記録媒
体に対する書き滲みの発生を解消した新規な垂直薄膜磁
気ヘッドを提供することを目的とするものである。In view of the above-mentioned conventional drawbacks, the present invention provides a magnetic pole shape that guides the magnetic field leaking from the tip of the ms raised layer constituting a part of the main pole to the tip of the main pole, thereby preventing writing bleeding on the recording medium. The object of the present invention is to provide a novel vertical thin film magnetic head that eliminates the above problems.
本発明は上記した目的を達成するため、補助磁極を構成
する磁性基板上に薄膜コイルを介して先端部が薄い主磁
極を配置した垂直磁気ヘッドにおいて、前記補助磁極と
なる磁性基板の主磁極形成面を記録媒体に対し傾斜させ
、かつ主磁極の薄い先端部を記録媒体に対し垂直にし、
厚い磁極部分を前記磁性基板の主磁極形成面と平行する
ように傾斜させた構成とする。In order to achieve the above object, the present invention provides a perpendicular magnetic head in which a main magnetic pole with a thin tip is arranged on a magnetic substrate constituting an auxiliary magnetic pole via a thin film coil, in which a main magnetic pole is formed on a magnetic substrate that becomes the auxiliary magnetic pole. The surface is inclined to the recording medium, and the thin tip of the main pole is perpendicular to the recording medium.
The thick magnetic pole portion is inclined so as to be parallel to the main magnetic pole forming surface of the magnetic substrate.
〔作 用］
本発明の磁気ヘッドでは、補助磁極となる磁性基板の主
磁極形成面を記録媒体対向面に対して傾斜させ、かつ主
磁極の薄い先端部を媒体対向面に対して垂直に露出させ
ると共に、該主磁極の厚い磁極部分を、前記磁性基板の
主磁極形成面へ設けて傾斜させた形状とすることにより
、前記主磁極の厚い磁極先端部分が媒体に対して傾斜し
た状態に対向し、その厚い磁極先端部分から漏洩せんと
する磁界は必然的に薄い主磁極先端部へ誘導される構造
となるため、記録時において記録媒体に対する書き滲み
の発生を容易に防止することが可能となる。[Function] In the magnetic head of the present invention, the main pole forming surface of the magnetic substrate serving as the auxiliary magnetic pole is inclined with respect to the recording medium facing surface, and the thin tip of the main pole is exposed perpendicularly to the medium facing surface. At the same time, the thick magnetic pole portion of the main magnetic pole is provided on the main magnetic pole formation surface of the magnetic substrate and has an inclined shape, so that the thick magnetic pole tip portion of the main magnetic pole faces the medium in an inclined state. However, since the magnetic field that attempts to leak from the thick tip of the magnetic pole is inevitably guided to the thin tip of the main pole, it is possible to easily prevent writing from occurring on the recording medium during recording. Become.
従って、再生時の孤立再生波形を歪ませることも解消さ
れ、高密度記録を達成することができる。Therefore, distortion of the isolated reproduced waveform during reproduction is also eliminated, and high-density recording can be achieved.
以下図面を用いて本発明の実施例について詳細に説明す
る。Embodiments of the present invention will be described in detail below with reference to the drawings.
第１図は本発明に係る垂直薄膜磁気ヘッドの一実施例を
示す要部断面図である。FIG. 1 is a sectional view of essential parts of an embodiment of a vertical thin film magnetic head according to the present invention.
図において、３１はＮｉ−Ｚｎ＋ Ｍｎ−Ｚｎなどのフ
ェライトからなる補助磁極を兼ねる磁性基板であり、該
基板３１の主磁極形成面を記録媒体対向面４０に対して
、例えば４５〜６０度の角度で傾斜させ、その表面上に
熱硬化性絶縁樹脂等からなる層間絶縁層３２により挟ま
れたＣｕ等からなる渦巻状の薄膜コイル３３が配設され
、その薄膜コイル３３上を含む前記磁性基板３１上にＩ
’／！ｚ０３、或いはＳｉＯ□などからなる厚い無機絶
縁層３４を介して、Ｎｉ−Ｆｅからなる薄い膜厚の磁極
層３７が配設されている。In the figure, 31 is a magnetic substrate made of ferrite such as Ni-Zn+Mn-Zn, which also serves as an auxiliary magnetic pole. A spiral thin film coil 33 made of Cu or the like is disposed on the surface of the magnetic substrate 31, which is sandwiched between interlayer insulating layers 32 made of thermosetting insulating resin or the like. I on top
'／! A thin magnetic pole layer 37 made of Ni--Fe is provided through a thick inorganic insulating layer 34 made of z03, SiO□, or the like.
この薄い膜厚の磁極層３７の先端部３７ａは前記無機絶
縁層３４の傾斜面より該無機絶縁層３４側へ折り曲げら
れて媒体対向面４０に対して垂直に露出するように延在
され、後端部３７ｂは前記薄膜コイル３３の中心部に設
けたＮｉ−Ｆｅからなる磁極接続層３５により前記磁性
基板３１と接続されている。The tip portion 37a of the thin magnetic pole layer 37 is bent toward the inorganic insulating layer 34 from the inclined surface of the inorganic insulating layer 34, and extends so as to be exposed perpendicularly to the medium facing surface 40. The end portion 37b is connected to the magnetic substrate 31 by a magnetic pole connecting layer 35 made of Ni--Fe provided at the center of the thin film coil 33.
そしてその薄い膜厚の磁極層３７上の先端部３７ａを除
く領域にＮｉ−Ｆｅからなる厚い膜厚の磁極盛り上げ層
３８が積層されて磁気抵抗を低減した主磁極３６を構成
すると共に、その主磁極３６上を含む無機絶縁層３４上
にはＡＩ！、２０３からなる保護層３９が被覆された構
成からなっている。A thick magnetic pole raised layer 38 made of Ni-Fe is laminated on the thin magnetic pole layer 37 except for the tip 37a, thereby forming the main magnetic pole 36 with reduced magnetic resistance. AI! is formed on the inorganic insulating layer 34 including the magnetic pole 36. , 203 is coated with a protective layer 39.
このような構成の磁気ヘッドにおいては、第２図に示す
ように主磁極３６を構成する薄い膜厚の磁極層先端部３
１ａ、即ち主磁極先端部３６ａは記録媒体４１面に対し
て垂直に対向し、その他の厚い膜厚の磁極盛り上げ層３
８の先端３８ａは該記録媒体４１に対して傾斜した状態
をなし、該磁極盛りセげ層３８の先端３８ａと磁極層先
端部３７ａとの形状及び記録媒体４１に対する向き等の
関係により該磁極盛り上げ層３８の先端３８ａからの漏
洩磁界は必然的に薄い膜厚の磁極層先端部３７ａ、即ち
主磁極先端部３６ａへ誘導されるようになる。In a magnetic head having such a configuration, as shown in FIG.
1a, that is, the main pole tip 36a faces perpendicularly to the surface of the recording medium 41, and the other thick magnetic pole raised layer 3
The tip 38a of the magnetic pole 8 is inclined with respect to the recording medium 41, and the tip 38a of the magnetic pole bulge is tilted with respect to the recording medium 41. The leakage magnetic field from the tip 38a of the layer 38 is inevitably guided to the thin magnetic pole layer tip 37a, that is, the main pole tip 36a.
従って、記録時において記録媒体４１に対する書き滲み
の発生を防止することが可能となると共に、第３図に示
すように再生時における孤立再生波形に歪みが生ずる問
題も解消することができる。Therefore, it is possible to prevent writing from occurring on the recording medium 41 during recording, and it is also possible to eliminate the problem of distortion in the isolated reproduced waveform during reproduction, as shown in FIG.
更に、上記した実施例構造の垂直薄膜磁気ヘッドを製造
する方法としては、第４図に示すように例えば補助磁極
を構成するＮｉ−Ｚｎ、 Ｍｎ−Ｚｎなどのフェライト
からなる磁性基板３１上に、熱硬化性絶縁樹脂等からな
る層間絶縁層３２により挟まれたＣｕ等からなる渦巻状
の薄膜コイル３３を形成し、この薄膜コイル３３の中心
部にＮｉ−Ｆｅからなる磁極接続層３５をマスクめっき
法により形成した後、更に該薄膜コイル３３及び磁極接
続層３５を含む前記磁性基板３１上に１２０３、或いは
ＳｉＯ□などからなる厚い無機絶縁層３４をスパッタリ
ング法等により被着する。Furthermore, as a method for manufacturing the vertical thin film magnetic head having the structure of the above-described embodiment, as shown in FIG. A spiral thin film coil 33 made of Cu or the like is sandwiched between interlayer insulating layers 32 made of thermosetting insulating resin or the like, and a magnetic pole connecting layer 35 made of Ni-Fe is mask-plated in the center of this thin film coil 33. After forming the thin film coil 33 and the magnetic pole connection layer 35 by a sputtering method, a thick inorganic insulating layer 34 made of 1203, SiO□, or the like is further deposited on the magnetic substrate 31 including the thin film coil 33 and the magnetic pole connection layer 35.
次に該無機絶縁層３４の表面を平面研磨工程により前記
磁極接続層３５が露出するように平坦化した後、その平
坦面上の主磁極先端部形成予定領域に、９０〜１２０度
程度の角度の■溝４２をエツチング工程等により形成し
、該Ｖ溝４２を含む前記無機絶縁層３４及び露出する磁
極接続層３５上の所定領域にＮｉ−Ｆｅからなる薄い膜
厚の磁極層３７と、その磁極層３７上の前記■溝４２対
応面を除く所定領域にＮｉ−Ｆｅからなる厚い膜厚の磁
極盛り上げ層３８をマスクメツキ法等により積層形成し
て主磁極３６を設ける。Next, the surface of the inorganic insulating layer 34 is flattened by a plane polishing process so that the magnetic pole connecting layer 35 is exposed, and then an angle of about 90 to 120 degrees is applied to the area where the main pole tip is to be formed on the flat surface. A groove 42 is formed by an etching process or the like, and a thin magnetic pole layer 37 made of Ni-Fe is formed in a predetermined region on the inorganic insulating layer 34 including the V groove 42 and the exposed magnetic pole connecting layer 35. The main magnetic pole 36 is provided by laminating a thick magnetic pole raised layer 38 made of Ni--Fe using a mask plating method in a predetermined region of the magnetic pole layer 37 except for the surface corresponding to the groove 42.
その後、該主磁極３６及び無機絶縁層３４上の全面にＡ
１２０３からなる保護層３９をスパッタリング法等に
より被着し、更に前記薄い膜厚の磁極層先端部３７ａ、
即ち主磁極先端部３６ａの不要部分を図中のＡＡ゛−点
鎖線で示す位置で保護層３９、無機絶縁層３４及びその
直下の磁性基板３１と共に切除し、その切除面を研磨仕
上げして前記主磁極先端部３６ａが垂直に露出する平坦
な媒体対向面４０を形成して前記第１図に示すように完
成させることによって容易に得ることができる。Thereafter, the entire surface of the main pole 36 and the inorganic insulating layer 34 is
A protective layer 39 made of 1203 is deposited by sputtering or the like, and the thin magnetic pole layer tip 37a,
That is, the unnecessary portion of the main pole tip 36a is cut off along with the protective layer 39, the inorganic insulating layer 34, and the magnetic substrate 31 immediately below it at the position indicated by the dashed line AA' in the figure, and the cut surface is polished and finished. This can be easily obtained by forming a flat medium facing surface 40 in which the main pole tip 36a is vertically exposed and completing it as shown in FIG.
以上の説明から明らかなように、本発明に係る垂直薄膜
磁気ヘッドによれば、主磁極を構成する磁極盛り上げ層
の先端形状及びその向き等に起因する記録時における記
録媒体への書き滲みの発生を防止することが可能となり
、記録・再生特性が向上すると共に、高密度記録の達成
が容易となる等、実用上優れた効果を奏する。As is clear from the above description, according to the perpendicular thin film magnetic head according to the present invention, writing bleeding occurs on the recording medium during recording due to the tip shape and orientation of the magnetic pole raised layer constituting the main pole. This makes it possible to prevent this, improve recording/reproducing characteristics, and facilitate the achievement of high-density recording, resulting in excellent practical effects.
第１図は本発明に係る垂直薄膜磁気ヘッドの一実施例を
示す要部断面図、
第２図は本発明に係る垂直薄膜磁気ヘッドの効果を説明
するための部分拡大図、
第３図は本発明に係る垂直薄膜磁気ヘッドによる孤立再
生波形を示す図、
第４図は本発明に係る垂直薄膜磁気ヘッドの製造方法を
説明だめの要部断面図、
第５図は従来の垂直薄膜磁気ヘッドを説明するための部
分断面斜視図、
第６図は従来の垂直薄膜磁気ヘッドを説明するための要
部断面図、
第７図は従来の垂直薄膜磁気ヘッドの問題点を説明する
ための部分拡大図、
第８図は従来の垂直薄膜磁気ヘッドによる孤立再生波形
を示す図である。
第１図〜第４図において、
３１は磁性基板、３２は層間絶縁層、３３は薄膜コイル
、３４は無機絶縁層、３５は磁極層続層、３６は主磁極
、３６ａは主磁極先端部、３７は薄い膜厚の磁極層、３
７ａは磁極層先端部、３８は磁極盛り上げ層、３８ａは
磁極盛り上げ層先端、３９は保護層、４０は媒体対向面
、４１は記録媒体、４２はＶ溝をそれぞれ示す。FIG. 1 is a sectional view of a main part showing an embodiment of the vertical thin-film magnetic head according to the present invention, FIG. 2 is a partially enlarged view for explaining the effects of the vertical thin-film magnetic head according to the present invention, and FIG. A diagram showing isolated reproduction waveforms by the vertical thin-film magnetic head according to the present invention, FIG. 4 is a cross-sectional view of a main part for explaining the manufacturing method of the vertical thin-film magnetic head according to the present invention, and FIG. 5 is a conventional vertical thin-film magnetic head. FIG. 6 is a cross-sectional view of a main part to explain a conventional vertical thin-film magnetic head. FIG. 7 is an enlarged partial view to explain the problems of a conventional vertical thin-film magnetic head. FIG. 8 is a diagram showing an isolated reproduction waveform by a conventional vertical thin film magnetic head. 1 to 4, 31 is a magnetic substrate, 32 is an interlayer insulating layer, 33 is a thin film coil, 34 is an inorganic insulating layer, 35 is a magnetic pole layered layer, 36 is a main magnetic pole, 36a is a main magnetic pole tip, 37 is a thin magnetic pole layer, 3
Reference numeral 7a indicates the tip of the magnetic pole layer, 38 indicates the magnetic pole raised layer, 38a indicates the tip of the magnetic pole raised layer, 39 indicates the protective layer, 40 indicates the medium facing surface, 41 indicates the recording medium, and 42 indicates the V-groove.
Claims (1)
３３）を介して先端部（３６ａ）が薄い主磁極（３６）
を配置した垂直磁気ヘッドにおいて、 前記補助磁極となる磁性基板（３１）の主磁極（３６）
形成面を記録媒体（４１）に対し傾斜させ、かつ主磁極
（３６）の薄い先端部（３６ａ）を記録媒体に対し垂直
にし、厚い磁極部分を前記磁性基板（３１）の主磁極（
３６）形成面と平行するように傾斜させたことを特徴と
する垂直薄膜磁気ヘッド。[Claims] A thin film coil (
The main magnetic pole (36) with a thin tip (36a) through the main magnetic pole (33)
In the perpendicular magnetic head, the main magnetic pole (36) of the magnetic substrate (31) serves as the auxiliary magnetic pole.
The forming surface is inclined with respect to the recording medium (41), the thin tip (36a) of the main magnetic pole (36) is perpendicular to the recording medium, and the thick magnetic pole part is aligned with the main magnetic pole (36a) of the magnetic substrate (31).
36) A vertical thin film magnetic head characterized by being inclined parallel to the formation surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12236990A JPH0417105A (en) | 1990-05-10 | 1990-05-10 | Perpendicular thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12236990A JPH0417105A (en) | 1990-05-10 | 1990-05-10 | Perpendicular thin film magnetic head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0417105A true JPH0417105A (en) | 1992-01-21 |
Family
ID=14834157
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12236990A Pending JPH0417105A (en) | 1990-05-10 | 1990-05-10 | Perpendicular thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0417105A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6771464B2 (en) * | 2001-10-19 | 2004-08-03 | Seagate Technology Llc | Perpendicular magnetic recording head with a laminated main write pole |
| US6775099B2 (en) * | 2001-07-24 | 2004-08-10 | Hitachi, Ltd. | High gradient-field recording head for perpendicular magnetic recording |
| US6958886B2 (en) * | 2000-12-26 | 2005-10-25 | Alps Electric Co., Ltd. | Perpendicular magnetic recording head having main magnetic pole layer formed on high-flatness surface, and method of manufacturing the head |
| EP1148473A3 (en) * | 2000-04-10 | 2006-10-18 | Samsung Electronics Co., Ltd. | Method and apparatus for perpendicular magnetic recording |
-
1990
- 1990-05-10 JP JP12236990A patent/JPH0417105A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1148473A3 (en) * | 2000-04-10 | 2006-10-18 | Samsung Electronics Co., Ltd. | Method and apparatus for perpendicular magnetic recording |
| US6958886B2 (en) * | 2000-12-26 | 2005-10-25 | Alps Electric Co., Ltd. | Perpendicular magnetic recording head having main magnetic pole layer formed on high-flatness surface, and method of manufacturing the head |
| US7181829B2 (en) | 2000-12-26 | 2007-02-27 | Alps Electric Co., Ltd. | Method of manufacturing a perpendicular magnetic recording head |
| US7472470B2 (en) | 2000-12-26 | 2009-01-06 | Tdk Corporation | Method of manufacturing a perpendicular magnetic recording head |
| US6775099B2 (en) * | 2001-07-24 | 2004-08-10 | Hitachi, Ltd. | High gradient-field recording head for perpendicular magnetic recording |
| US7370405B2 (en) | 2001-07-24 | 2008-05-13 | Hitachi Global Storage Technologies Japan, Ltd. | Fabrication method of a high gradient-field recording head for perpendicular magnetic recording |
| US6771464B2 (en) * | 2001-10-19 | 2004-08-03 | Seagate Technology Llc | Perpendicular magnetic recording head with a laminated main write pole |
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