JPS5912597Y2 - 電子分光装置 - Google Patents

電子分光装置

Info

Publication number
JPS5912597Y2
JPS5912597Y2 JP1975163683U JP16368375U JPS5912597Y2 JP S5912597 Y2 JPS5912597 Y2 JP S5912597Y2 JP 1975163683 U JP1975163683 U JP 1975163683U JP 16368375 U JP16368375 U JP 16368375U JP S5912597 Y2 JPS5912597 Y2 JP S5912597Y2
Authority
JP
Japan
Prior art keywords
thin film
excitation source
chamber
sample
source chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1975163683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5275483U (enExample
Inventor
英男 石坂
靖孝 馬場
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1975163683U priority Critical patent/JPS5912597Y2/ja
Publication of JPS5275483U publication Critical patent/JPS5275483U/ja
Application granted granted Critical
Publication of JPS5912597Y2 publication Critical patent/JPS5912597Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1975163683U 1975-12-04 1975-12-04 電子分光装置 Expired JPS5912597Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1975163683U JPS5912597Y2 (ja) 1975-12-04 1975-12-04 電子分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1975163683U JPS5912597Y2 (ja) 1975-12-04 1975-12-04 電子分光装置

Publications (2)

Publication Number Publication Date
JPS5275483U JPS5275483U (enExample) 1977-06-06
JPS5912597Y2 true JPS5912597Y2 (ja) 1984-04-16

Family

ID=28642486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1975163683U Expired JPS5912597Y2 (ja) 1975-12-04 1975-12-04 電子分光装置

Country Status (1)

Country Link
JP (1) JPS5912597Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4868165A (enExample) * 1971-12-18 1973-09-17

Also Published As

Publication number Publication date
JPS5275483U (enExample) 1977-06-06

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