JPS59121152U - 電子線露光装置等における試料保持装置 - Google Patents

電子線露光装置等における試料保持装置

Info

Publication number
JPS59121152U
JPS59121152U JP1514983U JP1514983U JPS59121152U JP S59121152 U JPS59121152 U JP S59121152U JP 1514983 U JP1514983 U JP 1514983U JP 1514983 U JP1514983 U JP 1514983U JP S59121152 U JPS59121152 U JP S59121152U
Authority
JP
Japan
Prior art keywords
electron beam
beam exposure
holding device
sample
sample holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1514983U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0124840Y2 (enExample
Inventor
藤谷　安秀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1514983U priority Critical patent/JPS59121152U/ja
Publication of JPS59121152U publication Critical patent/JPS59121152U/ja
Application granted granted Critical
Publication of JPH0124840Y2 publication Critical patent/JPH0124840Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP1514983U 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置 Granted JPS59121152U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1514983U JPS59121152U (ja) 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1514983U JPS59121152U (ja) 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置

Publications (2)

Publication Number Publication Date
JPS59121152U true JPS59121152U (ja) 1984-08-15
JPH0124840Y2 JPH0124840Y2 (enExample) 1989-07-26

Family

ID=30146486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1514983U Granted JPS59121152U (ja) 1983-02-04 1983-02-04 電子線露光装置等における試料保持装置

Country Status (1)

Country Link
JP (1) JPS59121152U (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5723426B2 (ja) * 2013-09-02 2015-05-27 株式会社カイジョー 駆動機構及び製造装置

Also Published As

Publication number Publication date
JPH0124840Y2 (enExample) 1989-07-26

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