JPS59119834A - 電子ビ−ム露光方法 - Google Patents

電子ビ−ム露光方法

Info

Publication number
JPS59119834A
JPS59119834A JP57228361A JP22836182A JPS59119834A JP S59119834 A JPS59119834 A JP S59119834A JP 57228361 A JP57228361 A JP 57228361A JP 22836182 A JP22836182 A JP 22836182A JP S59119834 A JPS59119834 A JP S59119834A
Authority
JP
Japan
Prior art keywords
pattern
amount
correction
electron beam
exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57228361A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0336295B2 (enrdf_load_stackoverflow
Inventor
Yasuhide Machida
町田　泰秀
Shigeru Furuya
茂 古谷
Noriaki Nakayama
中山　範明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP57228361A priority Critical patent/JPS59119834A/ja
Publication of JPS59119834A publication Critical patent/JPS59119834A/ja
Publication of JPH0336295B2 publication Critical patent/JPH0336295B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y40/00—Manufacture or treatment of nanostructures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
    • H01J37/3174—Particle-beam lithography, e.g. electron beam lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Nanotechnology (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Analytical Chemistry (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Electron Beam Exposure (AREA)
JP57228361A 1982-12-27 1982-12-27 電子ビ−ム露光方法 Granted JPS59119834A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57228361A JPS59119834A (ja) 1982-12-27 1982-12-27 電子ビ−ム露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57228361A JPS59119834A (ja) 1982-12-27 1982-12-27 電子ビ−ム露光方法

Publications (2)

Publication Number Publication Date
JPS59119834A true JPS59119834A (ja) 1984-07-11
JPH0336295B2 JPH0336295B2 (enrdf_load_stackoverflow) 1991-05-31

Family

ID=16875248

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57228361A Granted JPS59119834A (ja) 1982-12-27 1982-12-27 電子ビ−ム露光方法

Country Status (1)

Country Link
JP (1) JPS59119834A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0336295B2 (enrdf_load_stackoverflow) 1991-05-31

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