JPS59112663A - 受光装置 - Google Patents

受光装置

Info

Publication number
JPS59112663A
JPS59112663A JP58216186A JP21618683A JPS59112663A JP S59112663 A JPS59112663 A JP S59112663A JP 58216186 A JP58216186 A JP 58216186A JP 21618683 A JP21618683 A JP 21618683A JP S59112663 A JPS59112663 A JP S59112663A
Authority
JP
Japan
Prior art keywords
film
layer
light
photoconductor
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP58216186A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0469436B2 (enrdf_load_stackoverflow
Inventor
Eiichi Maruyama
瑛一 丸山
Yoshinori Imamura
今村　慶憲
Saburo Adaka
阿高　三郎
Kiyohisa Inao
稲尾　清久
Yukio Takasaki
高崎　幸男
Toshihisa Tsukada
俊久 塚田
Tadaaki Hirai
忠明 平井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP58216186A priority Critical patent/JPS59112663A/ja
Publication of JPS59112663A publication Critical patent/JPS59112663A/ja
Publication of JPH0469436B2 publication Critical patent/JPH0469436B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/10—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors
    • H10F30/15—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices being sensitive to infrared radiation, visible or ultraviolet radiation, and having no potential barriers, e.g. photoresistors comprising amorphous semiconductors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F71/00—Manufacture or treatment of devices covered by this subclass
    • H10F71/10—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material
    • H10F71/103—Manufacture or treatment of devices covered by this subclass the devices comprising amorphous semiconductor material including only Group IV materials
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Transforming Light Signals Into Electric Signals (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
  • Light Receiving Elements (AREA)
  • Solid State Image Pick-Up Elements (AREA)
JP58216186A 1983-11-18 1983-11-18 受光装置 Granted JPS59112663A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58216186A JPS59112663A (ja) 1983-11-18 1983-11-18 受光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58216186A JPS59112663A (ja) 1983-11-18 1983-11-18 受光装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP5893478A Division JPS54150995A (en) 1978-05-19 1978-05-19 Photo detector

Publications (2)

Publication Number Publication Date
JPS59112663A true JPS59112663A (ja) 1984-06-29
JPH0469436B2 JPH0469436B2 (enrdf_load_stackoverflow) 1992-11-06

Family

ID=16684633

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58216186A Granted JPS59112663A (ja) 1983-11-18 1983-11-18 受光装置

Country Status (1)

Country Link
JP (1) JPS59112663A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218757A (ja) * 1985-07-17 1987-01-27 Olympus Optical Co Ltd 積層型固体撮像装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010083A (enrdf_load_stackoverflow) * 1973-05-23 1975-02-01
JPS5027326A (enrdf_load_stackoverflow) * 1973-07-16 1975-03-20
JPS52144992A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Light receiving element
JPS535523A (en) * 1976-07-05 1978-01-19 Hitachi Ltd Pickup tube target

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5010083A (enrdf_load_stackoverflow) * 1973-05-23 1975-02-01
JPS5027326A (enrdf_load_stackoverflow) * 1973-07-16 1975-03-20
JPS52144992A (en) * 1976-05-28 1977-12-02 Hitachi Ltd Light receiving element
JPS535523A (en) * 1976-07-05 1978-01-19 Hitachi Ltd Pickup tube target

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6218757A (ja) * 1985-07-17 1987-01-27 Olympus Optical Co Ltd 積層型固体撮像装置

Also Published As

Publication number Publication date
JPH0469436B2 (enrdf_load_stackoverflow) 1992-11-06

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