JPH0214790B2 - - Google Patents

Info

Publication number
JPH0214790B2
JPH0214790B2 JP56035313A JP3531381A JPH0214790B2 JP H0214790 B2 JPH0214790 B2 JP H0214790B2 JP 56035313 A JP56035313 A JP 56035313A JP 3531381 A JP3531381 A JP 3531381A JP H0214790 B2 JPH0214790 B2 JP H0214790B2
Authority
JP
Japan
Prior art keywords
light
film
sputtering
receiving element
transparent electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP56035313A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57152174A (en
Inventor
Yasuo Tanaka
Akira Sasano
Toshihisa Tsukada
Taiji Shimomoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP56035313A priority Critical patent/JPS57152174A/ja
Priority to US06/357,076 priority patent/US4412900A/en
Priority to DE8282301284T priority patent/DE3276889D1/de
Priority to EP82301284A priority patent/EP0060699B1/en
Priority to CA000398275A priority patent/CA1168739A/en
Priority to KR8201078A priority patent/KR860000160B1/ko
Publication of JPS57152174A publication Critical patent/JPS57152174A/ja
Publication of JPH0214790B2 publication Critical patent/JPH0214790B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Solid State Image Pick-Up Elements (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Photovoltaic Devices (AREA)
JP56035313A 1981-03-13 1981-03-13 Manufacture of light receiving device Granted JPS57152174A (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP56035313A JPS57152174A (en) 1981-03-13 1981-03-13 Manufacture of light receiving device
US06/357,076 US4412900A (en) 1981-03-13 1982-03-11 Method of manufacturing photosensors
DE8282301284T DE3276889D1 (en) 1981-03-13 1982-03-12 Method of manufacturing photosensors
EP82301284A EP0060699B1 (en) 1981-03-13 1982-03-12 Method of manufacturing photosensors
CA000398275A CA1168739A (en) 1981-03-13 1982-03-12 Method of manufacturing photosensors
KR8201078A KR860000160B1 (ko) 1981-03-13 1982-03-13 수광소자의 제조방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56035313A JPS57152174A (en) 1981-03-13 1981-03-13 Manufacture of light receiving device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3065969A Division JPH04211171A (ja) 1991-03-29 1991-03-29 受光素子

Publications (2)

Publication Number Publication Date
JPS57152174A JPS57152174A (en) 1982-09-20
JPH0214790B2 true JPH0214790B2 (enrdf_load_stackoverflow) 1990-04-10

Family

ID=12438308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56035313A Granted JPS57152174A (en) 1981-03-13 1981-03-13 Manufacture of light receiving device

Country Status (1)

Country Link
JP (1) JPS57152174A (enrdf_load_stackoverflow)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59110179A (ja) * 1982-12-16 1984-06-26 Hitachi Ltd 半導体装置およびその製造法
JPH0634407B2 (ja) * 1983-06-08 1994-05-02 富士ゼロックス株式会社 光電変換素子およびその製造方法
JPS60239069A (ja) * 1984-05-11 1985-11-27 Sanyo Electric Co Ltd 非晶質太陽電池
JPS61168272A (ja) * 1985-01-21 1986-07-29 Semiconductor Energy Lab Co Ltd 非単結剤珪素太陽電池作製方法
JPS61237423A (ja) * 1985-04-15 1986-10-22 Kanegafuchi Chem Ind Co Ltd 非晶質半導体上への電極形成法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4196438A (en) * 1976-09-29 1980-04-01 Rca Corporation Article and device having an amorphous silicon containing a halogen and method of fabrication
JPS5822899B2 (ja) * 1978-08-18 1983-05-12 株式会社日立製作所 固体撮像装置
JPS5623772A (en) * 1979-08-01 1981-03-06 Hitachi Ltd Photodetecting face plate and its manufacture

Also Published As

Publication number Publication date
JPS57152174A (en) 1982-09-20

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