JPS59110773A - 硼素構造材の製造方法 - Google Patents

硼素構造材の製造方法

Info

Publication number
JPS59110773A
JPS59110773A JP57219809A JP21980982A JPS59110773A JP S59110773 A JPS59110773 A JP S59110773A JP 57219809 A JP57219809 A JP 57219809A JP 21980982 A JP21980982 A JP 21980982A JP S59110773 A JPS59110773 A JP S59110773A
Authority
JP
Japan
Prior art keywords
boron
argon
structural material
manufacturing
vapor deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57219809A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6148580B2 (enExample
Inventor
Shigeru Yoshida
茂 吉田
Masaki Aoki
正樹 青木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP57219809A priority Critical patent/JPS59110773A/ja
Publication of JPS59110773A publication Critical patent/JPS59110773A/ja
Publication of JPS6148580B2 publication Critical patent/JPS6148580B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/28—Deposition of only one other non-metal element
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/01—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes on temporary substrates, e.g. substrates subsequently removed by etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
JP57219809A 1982-12-14 1982-12-14 硼素構造材の製造方法 Granted JPS59110773A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57219809A JPS59110773A (ja) 1982-12-14 1982-12-14 硼素構造材の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57219809A JPS59110773A (ja) 1982-12-14 1982-12-14 硼素構造材の製造方法

Publications (2)

Publication Number Publication Date
JPS59110773A true JPS59110773A (ja) 1984-06-26
JPS6148580B2 JPS6148580B2 (enExample) 1986-10-24

Family

ID=16741369

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57219809A Granted JPS59110773A (ja) 1982-12-14 1982-12-14 硼素構造材の製造方法

Country Status (1)

Country Link
JP (1) JPS59110773A (enExample)

Also Published As

Publication number Publication date
JPS6148580B2 (enExample) 1986-10-24

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