JPS59109839A - 走査形電子顕微鏡用生物試料前処理装置 - Google Patents

走査形電子顕微鏡用生物試料前処理装置

Info

Publication number
JPS59109839A
JPS59109839A JP57221270A JP22127082A JPS59109839A JP S59109839 A JPS59109839 A JP S59109839A JP 57221270 A JP57221270 A JP 57221270A JP 22127082 A JP22127082 A JP 22127082A JP S59109839 A JPS59109839 A JP S59109839A
Authority
JP
Japan
Prior art keywords
plasma
biological sample
chamber
inert gas
scanning electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57221270A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0259942B2 (en:Method
Inventor
Kintaro Mori
森　金太郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koki Holdings Co Ltd
Original Assignee
Hitachi Koki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Koki Co Ltd filed Critical Hitachi Koki Co Ltd
Priority to JP57221270A priority Critical patent/JPS59109839A/ja
Publication of JPS59109839A publication Critical patent/JPS59109839A/ja
Publication of JPH0259942B2 publication Critical patent/JPH0259942B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G01N1/44—Sample treatment involving radiation, e.g. heat

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Sampling And Sample Adjustment (AREA)
JP57221270A 1982-12-16 1982-12-16 走査形電子顕微鏡用生物試料前処理装置 Granted JPS59109839A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57221270A JPS59109839A (ja) 1982-12-16 1982-12-16 走査形電子顕微鏡用生物試料前処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57221270A JPS59109839A (ja) 1982-12-16 1982-12-16 走査形電子顕微鏡用生物試料前処理装置

Publications (2)

Publication Number Publication Date
JPS59109839A true JPS59109839A (ja) 1984-06-25
JPH0259942B2 JPH0259942B2 (en:Method) 1990-12-13

Family

ID=16764140

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57221270A Granted JPS59109839A (ja) 1982-12-16 1982-12-16 走査形電子顕微鏡用生物試料前処理装置

Country Status (1)

Country Link
JP (1) JPS59109839A (en:Method)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62116233A (ja) * 1985-11-15 1987-05-27 Hitachi Koki Co Ltd イオンビ−ム照射装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62116233A (ja) * 1985-11-15 1987-05-27 Hitachi Koki Co Ltd イオンビ−ム照射装置

Also Published As

Publication number Publication date
JPH0259942B2 (en:Method) 1990-12-13

Similar Documents

Publication Publication Date Title
Aebi et al. A glow discharge unit to render electron microscope grids and other surfaces hydrophilic
JP3860954B2 (ja) リアルタイムパーティクルフィルタを具備したプラズマ処理装置
KR0137323B1 (ko) 고주파 마그네트론 플라즈마 장치
US4727029A (en) Apparatus and method for the pretreatment of biological specimens for use in scanning electron microscopes
US4201921A (en) Electron beam-capillary plasma flash x-ray device
EP2457247A2 (en) Cleaning device for transmission electron microscopes
CA2112103A1 (en) Methods and Apparatus for Externally Treating a Container with Application of Internal Bias Gas
WO1988009564A1 (en) Secondary electron detector for use in a gaseous atmosphere
JPS59109839A (ja) 走査形電子顕微鏡用生物試料前処理装置
Kessler et al. The nuclear moments of technetium-99
JP2003242917A (ja) 電子銃および電子ビーム照射処理装置
Bayly et al. A Positive Ion Source
JPS6059643A (ja) 電子顕微鏡の試料室内壁の清浄方法および装置
JPS5916975A (ja) スパツタリング装置
SU566169A1 (ru) Способ препарировани углеродистых реплик дл электронномикроскопических исследований
Akahori et al. Osmium-metal coating device using hollowcathode plasma CVD method
JPS6120321A (ja) 電子ビ−ム露光方法
JP4104241B2 (ja) 電子素子
JP2004006109A (ja) イオンビーム処理装置
Ming et al. Some characteristics of a new planar glow-discharge source with and without magnetic field
DE2305359B2 (de) Vorrichtung zur reaktiven Aufdampfung dünner Schichten auf Unterlagen
JPH076609Y2 (ja) 集束イオンビーム加工装置
JPH05163566A (ja) 高周波イオンプレーティング装置
JP3409881B2 (ja) Ｒｆ放電型イオン源
JPS617556A (ja) 二次イオン質量分析計