JPS59107515A - Ｘ線露光装置 - Google Patents

Ｘ線露光装置

Info

Publication number
JPS59107515A
JPS59107515A JP57216853A JP21685382A JPS59107515A JP S59107515 A JPS59107515 A JP S59107515A JP 57216853 A JP57216853 A JP 57216853A JP 21685382 A JP21685382 A JP 21685382A JP S59107515 A JPS59107515 A JP S59107515A
Authority
JP
Japan
Prior art keywords
mask
wafer
gap
exposure method
displacement meter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57216853A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0454963B2 (enrdf_load_stackoverflow
Inventor
Motoya Taniguchi
素也 谷口
Ryuichi Funatsu
隆一 船津
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP57216853A priority Critical patent/JPS59107515A/ja
Publication of JPS59107515A publication Critical patent/JPS59107515A/ja
Publication of JPH0454963B2 publication Critical patent/JPH0454963B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
    • G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
    • G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP57216853A 1982-12-13 1982-12-13 Ｘ線露光装置 Granted JPS59107515A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57216853A JPS59107515A (ja) 1982-12-13 1982-12-13 Ｘ線露光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57216853A JPS59107515A (ja) 1982-12-13 1982-12-13 Ｘ線露光装置

Publications (2)

Publication Number Publication Date
JPS59107515A true JPS59107515A (ja) 1984-06-21
JPH0454963B2 JPH0454963B2 (enrdf_load_stackoverflow) 1992-09-01

Family

ID=16694926

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57216853A Granted JPS59107515A (ja) 1982-12-13 1982-12-13 Ｘ線露光装置

Country Status (1)

Country Link
JP (1) JPS59107515A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155723A (ja) * 1986-12-19 1988-06-28 Canon Inc 露光装置
JP2009021393A (ja) * 2007-07-12 2009-01-29 Toyota Motor Corp ビーム照射方法とビーム照射装置
EP2053714A3 (de) * 2007-10-23 2010-07-14 Bagela Baumaschinen GmbH & Co. KG Verfahren und Vorrichtung zum Entfernen und Weiterbehandeln von biegsamen, strangförmigen Gegenständen aus ihren Nutzungs-Lagerorten

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243692A (en) * 1975-09-30 1977-04-05 Sumiyoshi Heavy Ind Apparatus for hauling with hauling roller having angle changeable fishing net linkkgethering member
JPS52108776A (en) * 1976-03-09 1977-09-12 Nippon Telegr & Teleph Corp <Ntt> Pattern sticking device
JPS5410827A (en) * 1977-06-23 1979-01-26 Bosch Gmbh Robert Controller of fuel feeder for external ignition internal combustion engine that compress mixture
JPS5516457A (en) * 1978-07-24 1980-02-05 Nippon Telegr & Teleph Corp <Ntt> Gap detecting method
JPS5698829A (en) * 1980-01-10 1981-08-08 Toshiba Corp Gap setting device
JPS577931A (en) * 1980-06-18 1982-01-16 Toshiba Corp Method for measuring gap
JPS5784306A (en) * 1980-11-14 1982-05-26 Toshiba Corp Method for providing gap

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5243692A (en) * 1975-09-30 1977-04-05 Sumiyoshi Heavy Ind Apparatus for hauling with hauling roller having angle changeable fishing net linkkgethering member
JPS52108776A (en) * 1976-03-09 1977-09-12 Nippon Telegr & Teleph Corp <Ntt> Pattern sticking device
JPS5410827A (en) * 1977-06-23 1979-01-26 Bosch Gmbh Robert Controller of fuel feeder for external ignition internal combustion engine that compress mixture
JPS5516457A (en) * 1978-07-24 1980-02-05 Nippon Telegr & Teleph Corp <Ntt> Gap detecting method
JPS5698829A (en) * 1980-01-10 1981-08-08 Toshiba Corp Gap setting device
JPS577931A (en) * 1980-06-18 1982-01-16 Toshiba Corp Method for measuring gap
JPS5784306A (en) * 1980-11-14 1982-05-26 Toshiba Corp Method for providing gap

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63155723A (ja) * 1986-12-19 1988-06-28 Canon Inc 露光装置
JP2009021393A (ja) * 2007-07-12 2009-01-29 Toyota Motor Corp ビーム照射方法とビーム照射装置
EP2053714A3 (de) * 2007-10-23 2010-07-14 Bagela Baumaschinen GmbH & Co. KG Verfahren und Vorrichtung zum Entfernen und Weiterbehandeln von biegsamen, strangförmigen Gegenständen aus ihren Nutzungs-Lagerorten

Also Published As

Publication number Publication date
JPH0454963B2 (enrdf_load_stackoverflow) 1992-09-01

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