JPS59103434U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS59103434U
JPS59103434U JP19620682U JP19620682U JPS59103434U JP S59103434 U JPS59103434 U JP S59103434U JP 19620682 U JP19620682 U JP 19620682U JP 19620682 U JP19620682 U JP 19620682U JP S59103434 U JPS59103434 U JP S59103434U
Authority
JP
Japan
Prior art keywords
substrate
solution
block
holding
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19620682U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027464Y2 (enrdf_load_stackoverflow
Inventor
浩之 加納
雅文 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP19620682U priority Critical patent/JPS59103434U/ja
Publication of JPS59103434U publication Critical patent/JPS59103434U/ja
Application granted granted Critical
Publication of JPH027464Y2 publication Critical patent/JPH027464Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP19620682U 1982-12-28 1982-12-28 液相エピタキシヤル成長装置 Granted JPS59103434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19620682U JPS59103434U (ja) 1982-12-28 1982-12-28 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19620682U JPS59103434U (ja) 1982-12-28 1982-12-28 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS59103434U true JPS59103434U (ja) 1984-07-12
JPH027464Y2 JPH027464Y2 (enrdf_load_stackoverflow) 1990-02-22

Family

ID=30421080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19620682U Granted JPS59103434U (ja) 1982-12-28 1982-12-28 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS59103434U (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271369U (enrdf_load_stackoverflow) * 1976-11-17 1977-05-27
US4026240A (en) * 1975-11-17 1977-05-31 Hewlett-Packard Company Liquid phase epitaxial reactor apparatus
JPS5337186A (en) * 1976-09-17 1978-04-06 Hitachi Ltd Chemical gas phase accumulating method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026240A (en) * 1975-11-17 1977-05-31 Hewlett-Packard Company Liquid phase epitaxial reactor apparatus
JPS5337186A (en) * 1976-09-17 1978-04-06 Hitachi Ltd Chemical gas phase accumulating method
JPS5271369U (enrdf_load_stackoverflow) * 1976-11-17 1977-05-27

Also Published As

Publication number Publication date
JPH027464Y2 (enrdf_load_stackoverflow) 1990-02-22

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