JPS59103434U - 液相エピタキシヤル成長装置 - Google Patents

液相エピタキシヤル成長装置

Info

Publication number
JPS59103434U
JPS59103434U JP19620682U JP19620682U JPS59103434U JP S59103434 U JPS59103434 U JP S59103434U JP 19620682 U JP19620682 U JP 19620682U JP 19620682 U JP19620682 U JP 19620682U JP S59103434 U JPS59103434 U JP S59103434U
Authority
JP
Japan
Prior art keywords
substrate
solution
block
holding
liquid phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19620682U
Other languages
English (en)
Japanese (ja)
Other versions
JPH027464Y2 (cs
Inventor
浩之 加納
雅文 橋本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toyota Central R&D Labs Inc
Original Assignee
Toyota Central R&D Labs Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toyota Central R&D Labs Inc filed Critical Toyota Central R&D Labs Inc
Priority to JP19620682U priority Critical patent/JPS59103434U/ja
Publication of JPS59103434U publication Critical patent/JPS59103434U/ja
Application granted granted Critical
Publication of JPH027464Y2 publication Critical patent/JPH027464Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP19620682U 1982-12-28 1982-12-28 液相エピタキシヤル成長装置 Granted JPS59103434U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19620682U JPS59103434U (ja) 1982-12-28 1982-12-28 液相エピタキシヤル成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19620682U JPS59103434U (ja) 1982-12-28 1982-12-28 液相エピタキシヤル成長装置

Publications (2)

Publication Number Publication Date
JPS59103434U true JPS59103434U (ja) 1984-07-12
JPH027464Y2 JPH027464Y2 (cs) 1990-02-22

Family

ID=30421080

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19620682U Granted JPS59103434U (ja) 1982-12-28 1982-12-28 液相エピタキシヤル成長装置

Country Status (1)

Country Link
JP (1) JPS59103434U (cs)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5271369U (cs) * 1976-11-17 1977-05-27
US4026240A (en) * 1975-11-17 1977-05-31 Hewlett-Packard Company Liquid phase epitaxial reactor apparatus
JPS5337186A (en) * 1976-09-17 1978-04-06 Hitachi Ltd Chemical gas phase accumulating method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4026240A (en) * 1975-11-17 1977-05-31 Hewlett-Packard Company Liquid phase epitaxial reactor apparatus
JPS5337186A (en) * 1976-09-17 1978-04-06 Hitachi Ltd Chemical gas phase accumulating method
JPS5271369U (cs) * 1976-11-17 1977-05-27

Also Published As

Publication number Publication date
JPH027464Y2 (cs) 1990-02-22

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