JPS5896749A - 半導体基板の製造装置 - Google Patents

半導体基板の製造装置

Info

Publication number
JPS5896749A
JPS5896749A JP56195002A JP19500281A JPS5896749A JP S5896749 A JPS5896749 A JP S5896749A JP 56195002 A JP56195002 A JP 56195002A JP 19500281 A JP19500281 A JP 19500281A JP S5896749 A JPS5896749 A JP S5896749A
Authority
JP
Japan
Prior art keywords
carrier
arm
rotating shaft
substrates
semiconductor substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56195002A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6229334B2 (show.php
Inventor
Yukihisa Taguchi
田口　幸久
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Kyushu Ltd
Original Assignee
NEC Kyushu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Kyushu Ltd filed Critical NEC Kyushu Ltd
Priority to JP56195002A priority Critical patent/JPS5896749A/ja
Publication of JPS5896749A publication Critical patent/JPS5896749A/ja
Publication of JPS6229334B2 publication Critical patent/JPS6229334B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P72/3412—

Landscapes

  • De-Stacking Of Articles (AREA)
JP56195002A 1981-12-03 1981-12-03 半導体基板の製造装置 Granted JPS5896749A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56195002A JPS5896749A (ja) 1981-12-03 1981-12-03 半導体基板の製造装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56195002A JPS5896749A (ja) 1981-12-03 1981-12-03 半導体基板の製造装置

Publications (2)

Publication Number Publication Date
JPS5896749A true JPS5896749A (ja) 1983-06-08
JPS6229334B2 JPS6229334B2 (show.php) 1987-06-25

Family

ID=16333893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56195002A Granted JPS5896749A (ja) 1981-12-03 1981-12-03 半導体基板の製造装置

Country Status (1)

Country Link
JP (1) JPS5896749A (show.php)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5782361A (en) * 1995-06-26 1998-07-21 Kakizaki Manufacturing Co., Ltd. Thin-plate supporting container
CN102969262A (zh) * 2012-12-07 2013-03-13 上海集成电路研发中心有限公司 硅片倒片装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6453941A (en) * 1987-08-25 1989-03-01 Nec Corp Housing device for sheet

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5782361A (en) * 1995-06-26 1998-07-21 Kakizaki Manufacturing Co., Ltd. Thin-plate supporting container
CN102969262A (zh) * 2012-12-07 2013-03-13 上海集成电路研发中心有限公司 硅片倒片装置
CN102969262B (zh) * 2012-12-07 2017-03-01 上海集成电路研发中心有限公司 硅片倒片装置

Also Published As

Publication number Publication date
JPS6229334B2 (show.php) 1987-06-25

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