JPS5893352A - 集積回路装置 - Google Patents
集積回路装置Info
- Publication number
- JPS5893352A JPS5893352A JP19252181A JP19252181A JPS5893352A JP S5893352 A JPS5893352 A JP S5893352A JP 19252181 A JP19252181 A JP 19252181A JP 19252181 A JP19252181 A JP 19252181A JP S5893352 A JPS5893352 A JP S5893352A
- Authority
- JP
- Japan
- Prior art keywords
- wiring
- width
- aluminum
- conductive film
- integrated circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052782 aluminium Inorganic materials 0.000 abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 10
- 239000010408 film Substances 0.000 description 9
- 239000000463 material Substances 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 206010011224 Cough Diseases 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19252181A JPS5893352A (ja) | 1981-11-30 | 1981-11-30 | 集積回路装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19252181A JPS5893352A (ja) | 1981-11-30 | 1981-11-30 | 集積回路装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5893352A true JPS5893352A (ja) | 1983-06-03 |
| JPS6248378B2 JPS6248378B2 (enExample) | 1987-10-13 |
Family
ID=16292664
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19252181A Granted JPS5893352A (ja) | 1981-11-30 | 1981-11-30 | 集積回路装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5893352A (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115350A (ja) * | 1984-06-30 | 1986-01-23 | Nippon Gakki Seizo Kk | 半導体装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5667937A (en) * | 1979-11-07 | 1981-06-08 | Nec Corp | Semiconductor system |
-
1981
- 1981-11-30 JP JP19252181A patent/JPS5893352A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5667937A (en) * | 1979-11-07 | 1981-06-08 | Nec Corp | Semiconductor system |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6115350A (ja) * | 1984-06-30 | 1986-01-23 | Nippon Gakki Seizo Kk | 半導体装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6248378B2 (enExample) | 1987-10-13 |
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