JPS5893259A - 絶縁層の平坦化方法 - Google Patents

絶縁層の平坦化方法

Info

Publication number
JPS5893259A
JPS5893259A JP19216581A JP19216581A JPS5893259A JP S5893259 A JPS5893259 A JP S5893259A JP 19216581 A JP19216581 A JP 19216581A JP 19216581 A JP19216581 A JP 19216581A JP S5893259 A JPS5893259 A JP S5893259A
Authority
JP
Japan
Prior art keywords
film
insulating layer
reactive ion
etching
disconnection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19216581A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311543B2 (OSRAM
Inventor
Riyouichi Hazuki
巴月　良一
Takahiko Moriya
守屋　孝彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP19216581A priority Critical patent/JPS5893259A/ja
Publication of JPS5893259A publication Critical patent/JPS5893259A/ja
Publication of JPH0311543B2 publication Critical patent/JPH0311543B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP19216581A 1981-11-30 1981-11-30 絶縁層の平坦化方法 Granted JPS5893259A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19216581A JPS5893259A (ja) 1981-11-30 1981-11-30 絶縁層の平坦化方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19216581A JPS5893259A (ja) 1981-11-30 1981-11-30 絶縁層の平坦化方法

Publications (2)

Publication Number Publication Date
JPS5893259A true JPS5893259A (ja) 1983-06-02
JPH0311543B2 JPH0311543B2 (OSRAM) 1991-02-18

Family

ID=16286764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19216581A Granted JPS5893259A (ja) 1981-11-30 1981-11-30 絶縁層の平坦化方法

Country Status (1)

Country Link
JP (1) JPS5893259A (OSRAM)

Also Published As

Publication number Publication date
JPH0311543B2 (OSRAM) 1991-02-18

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