JPS5888816A - 薄膜磁気ヘツド及びその製造方法 - Google Patents
薄膜磁気ヘツド及びその製造方法Info
- Publication number
- JPS5888816A JPS5888816A JP18739881A JP18739881A JPS5888816A JP S5888816 A JPS5888816 A JP S5888816A JP 18739881 A JP18739881 A JP 18739881A JP 18739881 A JP18739881 A JP 18739881A JP S5888816 A JPS5888816 A JP S5888816A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- thin film
- magnetic
- magnetic head
- sic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 60
- 239000010409 thin film Substances 0.000 title claims abstract description 35
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 238000004544 sputter deposition Methods 0.000 claims abstract description 31
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000000034 method Methods 0.000 claims abstract description 10
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims description 46
- 229910010271 silicon carbide Inorganic materials 0.000 claims description 43
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 14
- 239000012298 atmosphere Substances 0.000 claims description 12
- 229910052786 argon Inorganic materials 0.000 claims description 7
- 238000010030 laminating Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 abstract description 61
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 39
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 19
- 239000000377 silicon dioxide Substances 0.000 abstract description 19
- 239000004020 conductor Substances 0.000 abstract description 8
- 239000012790 adhesive layer Substances 0.000 abstract description 3
- 229910052681 coesite Inorganic materials 0.000 abstract description 2
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 2
- 229910052682 stishovite Inorganic materials 0.000 abstract description 2
- 229910052905 tridymite Inorganic materials 0.000 abstract description 2
- 230000008642 heat stress Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 22
- 239000012212 insulator Substances 0.000 description 13
- 230000008646 thermal stress Effects 0.000 description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 230000001681 protective effect Effects 0.000 description 5
- 238000005299 abrasion Methods 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 238000009413 insulation Methods 0.000 description 3
- 239000000696 magnetic material Substances 0.000 description 3
- 229910000889 permalloy Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000005674 electromagnetic induction Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000035882 stress Effects 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000859 α-Fe Inorganic materials 0.000 description 2
- 229910018605 Ni—Zn Inorganic materials 0.000 description 1
- 241000269821 Scombridae Species 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 230000005294 ferromagnetic effect Effects 0.000 description 1
- 235000020640 mackerel Nutrition 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
- G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18739881A JPS5888816A (ja) | 1981-11-21 | 1981-11-21 | 薄膜磁気ヘツド及びその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18739881A JPS5888816A (ja) | 1981-11-21 | 1981-11-21 | 薄膜磁気ヘツド及びその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5888816A true JPS5888816A (ja) | 1983-05-27 |
| JPS6330686B2 JPS6330686B2 (enrdf_load_stackoverflow) | 1988-06-20 |
Family
ID=16205321
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18739881A Granted JPS5888816A (ja) | 1981-11-21 | 1981-11-21 | 薄膜磁気ヘツド及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5888816A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5042833A (enrdf_load_stackoverflow) * | 1973-08-20 | 1975-04-18 | ||
| JPS52139410A (en) * | 1976-05-17 | 1977-11-21 | Matsushita Electric Ind Co Ltd | Thin film magnetic head and preparation thereof |
-
1981
- 1981-11-21 JP JP18739881A patent/JPS5888816A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5042833A (enrdf_load_stackoverflow) * | 1973-08-20 | 1975-04-18 | ||
| JPS52139410A (en) * | 1976-05-17 | 1977-11-21 | Matsushita Electric Ind Co Ltd | Thin film magnetic head and preparation thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330686B2 (enrdf_load_stackoverflow) | 1988-06-20 |
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