JPS5886704A - 薄膜バリスタの製造方法 - Google Patents

薄膜バリスタの製造方法

Info

Publication number
JPS5886704A
JPS5886704A JP56186277A JP18627781A JPS5886704A JP S5886704 A JPS5886704 A JP S5886704A JP 56186277 A JP56186277 A JP 56186277A JP 18627781 A JP18627781 A JP 18627781A JP S5886704 A JPS5886704 A JP S5886704A
Authority
JP
Japan
Prior art keywords
varistor
thin film
film
zno
grain boundaries
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56186277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6253925B2 (enrdf_load_stackoverflow
Inventor
江田　和生
陽之 江口
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP56186277A priority Critical patent/JPS5886704A/ja
Publication of JPS5886704A publication Critical patent/JPS5886704A/ja
Publication of JPS6253925B2 publication Critical patent/JPS6253925B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Thermistors And Varistors (AREA)
JP56186277A 1981-11-19 1981-11-19 薄膜バリスタの製造方法 Granted JPS5886704A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56186277A JPS5886704A (ja) 1981-11-19 1981-11-19 薄膜バリスタの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56186277A JPS5886704A (ja) 1981-11-19 1981-11-19 薄膜バリスタの製造方法

Publications (2)

Publication Number Publication Date
JPS5886704A true JPS5886704A (ja) 1983-05-24
JPS6253925B2 JPS6253925B2 (enrdf_load_stackoverflow) 1987-11-12

Family

ID=16185474

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56186277A Granted JPS5886704A (ja) 1981-11-19 1981-11-19 薄膜バリスタの製造方法

Country Status (1)

Country Link
JP (1) JPS5886704A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6253925B2 (enrdf_load_stackoverflow) 1987-11-12

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