JPS5881998A - 陽極反応処理装置 - Google Patents

陽極反応処理装置

Info

Publication number
JPS5881998A
JPS5881998A JP17971081A JP17971081A JPS5881998A JP S5881998 A JPS5881998 A JP S5881998A JP 17971081 A JP17971081 A JP 17971081A JP 17971081 A JP17971081 A JP 17971081A JP S5881998 A JPS5881998 A JP S5881998A
Authority
JP
Japan
Prior art keywords
electrolyte
substrate
reaction treatment
treatment apparatus
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17971081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6127475B2 (enExample
Inventor
Hideyuki Unno
秀之 海野
Kazuo Imai
和雄 今井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP17971081A priority Critical patent/JPS5881998A/ja
Publication of JPS5881998A publication Critical patent/JPS5881998A/ja
Publication of JPS6127475B2 publication Critical patent/JPS6127475B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrochemical Coating By Surface Reaction (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP17971081A 1981-11-11 1981-11-11 陽極反応処理装置 Granted JPS5881998A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17971081A JPS5881998A (ja) 1981-11-11 1981-11-11 陽極反応処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17971081A JPS5881998A (ja) 1981-11-11 1981-11-11 陽極反応処理装置

Publications (2)

Publication Number Publication Date
JPS5881998A true JPS5881998A (ja) 1983-05-17
JPS6127475B2 JPS6127475B2 (enExample) 1986-06-25

Family

ID=16070514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17971081A Granted JPS5881998A (ja) 1981-11-11 1981-11-11 陽極反応処理装置

Country Status (1)

Country Link
JP (1) JPS5881998A (enExample)

Also Published As

Publication number Publication date
JPS6127475B2 (enExample) 1986-06-25

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