JPS6127475B2 - - Google Patents

Info

Publication number
JPS6127475B2
JPS6127475B2 JP17971081A JP17971081A JPS6127475B2 JP S6127475 B2 JPS6127475 B2 JP S6127475B2 JP 17971081 A JP17971081 A JP 17971081A JP 17971081 A JP17971081 A JP 17971081A JP S6127475 B2 JPS6127475 B2 JP S6127475B2
Authority
JP
Japan
Prior art keywords
electrolyte
substrate
porous silicon
contact
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17971081A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5881998A (ja
Inventor
Hideyuki Unno
Kazuo Imai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP17971081A priority Critical patent/JPS5881998A/ja
Publication of JPS5881998A publication Critical patent/JPS5881998A/ja
Publication of JPS6127475B2 publication Critical patent/JPS6127475B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrochemical Coating By Surface Reaction (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP17971081A 1981-11-11 1981-11-11 陽極反応処理装置 Granted JPS5881998A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17971081A JPS5881998A (ja) 1981-11-11 1981-11-11 陽極反応処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17971081A JPS5881998A (ja) 1981-11-11 1981-11-11 陽極反応処理装置

Publications (2)

Publication Number Publication Date
JPS5881998A JPS5881998A (ja) 1983-05-17
JPS6127475B2 true JPS6127475B2 (enExample) 1986-06-25

Family

ID=16070514

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17971081A Granted JPS5881998A (ja) 1981-11-11 1981-11-11 陽極反応処理装置

Country Status (1)

Country Link
JP (1) JPS5881998A (enExample)

Also Published As

Publication number Publication date
JPS5881998A (ja) 1983-05-17

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