JPS5879734A - ウエ−ハ有無判定テ−ブル位置制御装置 - Google Patents

ウエ−ハ有無判定テ−ブル位置制御装置

Info

Publication number
JPS5879734A
JPS5879734A JP17718981A JP17718981A JPS5879734A JP S5879734 A JPS5879734 A JP S5879734A JP 17718981 A JP17718981 A JP 17718981A JP 17718981 A JP17718981 A JP 17718981A JP S5879734 A JPS5879734 A JP S5879734A
Authority
JP
Japan
Prior art keywords
laser beam
wafer
laser
beam passage
refracted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17718981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122464B2 (enrdf_load_stackoverflow
Inventor
Keiji Tada
多田　啓司
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17718981A priority Critical patent/JPS5879734A/ja
Publication of JPS5879734A publication Critical patent/JPS5879734A/ja
Publication of JPS6122464B2 publication Critical patent/JPS6122464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP17718981A 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置 Granted JPS5879734A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17718981A JPS5879734A (ja) 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17718981A JPS5879734A (ja) 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置

Publications (2)

Publication Number Publication Date
JPS5879734A true JPS5879734A (ja) 1983-05-13
JPS6122464B2 JPS6122464B2 (enrdf_load_stackoverflow) 1986-05-31

Family

ID=16026729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17718981A Granted JPS5879734A (ja) 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置

Country Status (1)

Country Link
JP (1) JPS5879734A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005114723A1 (en) * 2004-05-21 2005-12-01 Mattson Thermal Products Gmbh Determining the position of a semiconductor substrate on a rotation device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005114723A1 (en) * 2004-05-21 2005-12-01 Mattson Thermal Products Gmbh Determining the position of a semiconductor substrate on a rotation device
JP2007538391A (ja) * 2004-05-21 2007-12-27 マットソン　サーマル　プロダクツ　ゲゼルシャフト　ミット　ベシュレンクテル　ハフツング 回転デバイス上の半導体サブストレートの位置検出
KR101143383B1 (ko) 2004-05-21 2012-05-22 맷슨 써멀 프로덕츠 게엠베하 회전 장치상에서 반도체 웨이퍼의 위치를 결정하기 위한 방법 및 장치

Also Published As

Publication number Publication date
JPS6122464B2 (enrdf_load_stackoverflow) 1986-05-31

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