JPS6122464B2 - - Google Patents

Info

Publication number
JPS6122464B2
JPS6122464B2 JP17718981A JP17718981A JPS6122464B2 JP S6122464 B2 JPS6122464 B2 JP S6122464B2 JP 17718981 A JP17718981 A JP 17718981A JP 17718981 A JP17718981 A JP 17718981A JP S6122464 B2 JPS6122464 B2 JP S6122464B2
Authority
JP
Japan
Prior art keywords
laser beam
wafer
refracted
reflected
receiver
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP17718981A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5879734A (ja
Inventor
Keiji Tada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP17718981A priority Critical patent/JPS5879734A/ja
Publication of JPS5879734A publication Critical patent/JPS5879734A/ja
Publication of JPS6122464B2 publication Critical patent/JPS6122464B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
JP17718981A 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置 Granted JPS5879734A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17718981A JPS5879734A (ja) 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17718981A JPS5879734A (ja) 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置

Publications (2)

Publication Number Publication Date
JPS5879734A JPS5879734A (ja) 1983-05-13
JPS6122464B2 true JPS6122464B2 (enrdf_load_stackoverflow) 1986-05-31

Family

ID=16026729

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17718981A Granted JPS5879734A (ja) 1981-11-06 1981-11-06 ウエ−ハ有無判定テ−ブル位置制御装置

Country Status (1)

Country Link
JP (1) JPS5879734A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004025150B4 (de) * 2004-05-21 2019-05-09 Mattson Technology, Inc. Lagebestimmung eines Halbleitersubstrats auf einer Rotationsvorrichtung

Also Published As

Publication number Publication date
JPS5879734A (ja) 1983-05-13

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