JPS5876804A - シリコン回折格子の作製法 - Google Patents

シリコン回折格子の作製法

Info

Publication number
JPS5876804A
JPS5876804A JP17441281A JP17441281A JPS5876804A JP S5876804 A JPS5876804 A JP S5876804A JP 17441281 A JP17441281 A JP 17441281A JP 17441281 A JP17441281 A JP 17441281A JP S5876804 A JPS5876804 A JP S5876804A
Authority
JP
Japan
Prior art keywords
diffraction grating
silicon
layer
silicon wafer
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17441281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314321B2 (enrdf_load_stackoverflow
Inventor
Keisuke Shinozaki
篠崎　啓助
Keisuke Watanabe
敬介 渡辺
Yoshio Kawai
義雄 川井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP17441281A priority Critical patent/JPS5876804A/ja
Publication of JPS5876804A publication Critical patent/JPS5876804A/ja
Publication of JPS6314321B2 publication Critical patent/JPS6314321B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1847—Manufacturing methods
    • G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
  • Weting (AREA)
JP17441281A 1981-11-02 1981-11-02 シリコン回折格子の作製法 Granted JPS5876804A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17441281A JPS5876804A (ja) 1981-11-02 1981-11-02 シリコン回折格子の作製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17441281A JPS5876804A (ja) 1981-11-02 1981-11-02 シリコン回折格子の作製法

Publications (2)

Publication Number Publication Date
JPS5876804A true JPS5876804A (ja) 1983-05-10
JPS6314321B2 JPS6314321B2 (enrdf_load_stackoverflow) 1988-03-30

Family

ID=15978097

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17441281A Granted JPS5876804A (ja) 1981-11-02 1981-11-02 シリコン回折格子の作製法

Country Status (1)

Country Link
JP (1) JPS5876804A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214628U (enrdf_load_stackoverflow) * 1988-07-07 1990-01-30
JPH02126314U (enrdf_load_stackoverflow) * 1989-03-28 1990-10-18

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6517734B1 (en) * 2000-07-13 2003-02-11 Network Photonics, Inc. Grating fabrication process using combined crystalline-dependent and crystalline-independent etching
JP2003075622A (ja) * 2001-09-05 2003-03-12 Toshiba Corp 回折格子、回折格子の加工方法及び光学要素

Also Published As

Publication number Publication date
JPS6314321B2 (enrdf_load_stackoverflow) 1988-03-30

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