JPS5875016A - Contactless measuring method - Google Patents

Abstract

PURPOSE:To measure the length to an object to be measured with less measurement error without using an object lens and without contacting, by irradiating a point to be measured on the surface of the object with a convergent light and irradiating the same point with a convergent light in another direction and detecting the variance of temperature at the irradiated point to be measured at the moment when these lights cross. CONSTITUTION:A laser light is radiated from a temperature measurer 5, and the surface temperature of an irradiated point 6'' is always measured. A round mirror 4 is moved vertically to adjust the direction of the reflected light from the surface so that the irradiated point 6'' coincides with a point 6' irradiated with the transmitted light. At the moment when said two irradiated points 6' and 6'' coincide with each other, the measured value of the temperature measurer 5 which measures the surface temperature is changed. This moment is detected to stop the movement of the round mirror 4, and an extent (m) of movement of the round mirror 4 in the vertical direction for irradiation beams of light from a half mirror 3 is measured, and a length (l) from a material 6 to be measured to the half mirror 3 is measured.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for measuring the distance to an object to be measured, and particularly to a method for measuring the distance to an object without contact.

In the conventional method of measuring the distance to the object to be measured without contact, the laser beam is focused on the m1illJ constant object & surface through an objective lens. Since the objective lens must be focused each time, there is a limit to how much the measurement speed can be increased. In addition, if an objective lens with a long focal length is used, since the movement of the objective lens is reduced when focusing, focusing becomes difficult, and there is a risk that a total of 1III errors will occur. Furthermore, if the normal direction of the optical axis and the object to be measured is 55 degrees or more, measurement is impossible.

The present wA was invented to solve the problems of the conventionally known measurement methods described above, and it increases the measurement speed without using an objective lens and eliminates the distance to the object to be measured with less measurement error. The purpose is to provide a method for measuring by contact.

According to the present invention, when a convergent light is applied to a point to be measured on the surface of the object to be measured, and further convergent light is applied to the same point to be measured from another direction,
It is based on the technical concept of measuring the distance to the point to be measured by sensing the change in temperature of the illuminated foot point at the moment these lights intersect. The device was constructed so that the light from the light source was divided into two by a semi-transparent mirror, one of which was irradiated directly onto the object to be measured, and the light was reflected from the other surface and transmitted from the back surface. It is reflected from the surface of the 8th mirror and irradiated onto the object III, and the laser light from the 9th temperature creator disposed within the circular mirror is transmitted through the circle @I, and its direction is reflected from the 8th mirror. While irradiating the object to be measured so as to match the light, the 8 mirrors are moved up and down in the vertical direction, and the irradiation point of the divided light on the object on the damaged building is irradiated with the 8 mirrors. A non-contact method characterized in that the vertical path wIt in the transparent lens barrel is determined by the equation of: Horizontal distance from the center of the semi-transparent mirror to the center of the circle r: 8 Radius of the mirror m: 8 The vertical movement distance of the mirror This method consists of measuring the distance to the object to be measured.

Embodiments of the present invention will be described below with reference to the drawings.

Figure 1 and! FIG. 2 shows an apparatus used in the measuring method of the present invention. In the figure, 1 is a light source, 2 is a slit, and 3 is a semi-transparent mirror.The light emitted from the light source 1 becomes convergent light at the slit 2, and is split into two by the semi-transparent mirror 3 into transmitted light and reflected light. 4
reflects light from its surface and 1! There are 8 mirrors called phosphorus 2-, which are configured to transmit light from kFf1. 5 is a temperature measuring device disposed inside the mirror 4, which is designed to track the reflected light from the surface of the circle i14. 60 The trap is designed to constantly measure the surface temperature.

The above-mentioned slots and gates 2 converge and lighten the light from the light source 1 to a value of 0.1 or less.

The semi-transparent mirror 3 divides the convergent light from the slit 2 into two, and depending on the shape of the object 6, can rotate 360 degrees with respect to the optical axis from the light source in conjunction with the temperature measuring devices 5 and 4. It has a structure.

Further, the eight mirrors 4 can be linked with the temperature measuring device 5 at the same time to change the horizontal distance from the semi-transparent mirror 3. In addition, the vertical distance between the optical IFII and the semi-transparent mirror 3 can be changed by 1 by linking the 8-mirror 4, the temperature measuring device 5, and the 3 semi-transparent mirrors at the same time. In order to track the reflected light and sound, it is necessary to ensure that the temperature measuring device 5 faces in the direction of the reflected light, and the direction of the temperature measuring device 5 is regulated as follows. In other words! As shown in Fig. 3, when considering an inscribed circle with the irradiation point In to 8 mirrors 4 and the 8 mirror radius rk diameter, the temperature measuring device 5 is located at a point BK on this inscribed circle and 8 The distance from the mirror center A is equal to the vertical movement amount m of circle I#4, and therefore the direction (straight line BD) of the laser beam irradiated from the temperature measuring device 5 is a circle *
4. The direction is adjusted so that the direction is perpendicular to the line @AB connecting the center A and the position B of the temperature measuring device 5.

Next, the measurement method according to the present invention will be explained.

The light emitted from the light source 1 becomes convergent light at the slit 2 9, semi-transparent 1
13, one of the transmitted light goes straight and directly irradiates the object to be measured 6 at the irradiation point 6', and the other reflected light is further reflected on the surface of the circle vja40 and irradiates the object to be measured 6 at the irradiation point 6'.
(FIG. 1) A laser beam is irradiated from the temperature measuring device 5, and the surface temperature of the irradiated point 6' is constantly measured.

Next, it is moved vertically in the direction perpendicular to the circle fa4 to adjust the direction of the reflected light from one surface thereof so that the irradiation point D coincides with the irradiation point CK of the transmitted light. At the moment when the two irradiation points C1C overlap, the surface temperature of 11111 and the temperature measuring device 5kg will be generated, so seize this moment and stop moving the tube of 8 mirror 4, and from the half-transparent mirror 3 at this moment. The amount of vertical movement m of the quadruple 4 with respect to the irradiation light beam is measured, and the height 1 from the object to be measured 6 to the semi-transparent mirror 3 is measured.

That is, in FIG. 4, assuming that the horizontal distance between the mf cow mirror 3 (irradiated light from the semi-transparent mirror) and the center of the 8-mirror 4, and the incident angle of the incident light as eta and the reflection angle as 1, then t-IP depth DE in the triangle DEF. ta 2 a ・・・・・・(
1) 4 9D I =1= I −rxe ”=
(2), so (1), (2)) Am(s-rcm#)・tm2@ −・−・(3)
In the triangle GD, sk #maro - (4) Also, since it is from the formula of trigonometric functions, substituting (4) to (6) 2 into equation (3), we get 9 , s, and r are constant, so 4 even 4 at the time of measurement
By measuring the amount of movement mk in the vertical (vertical) direction, the value of L, that is, the distance from the semi-transparent mirror 3 to the object to be measured 6 can be measured without contact.

In this way, each time a measurement is made, by moving the eight mirrors 4 vertically upward or downward so that each irradiation point of the transmitted light and reflected light from the light source intersect on the object to be measured,
8 mirror 4 semi-transparent at that time! ! By measuring the amount of movement in the vertical direction from 3, the distance from the object to be measured 60 to the semi-transparent mirror 3 can be reduced by 1.

Then, by selecting the amount and speed of movement of 8 mirrors 4,
The measurement speed can be selected arbitrarily.

Also, at the first measurement point, the circle fIAt is moved up and down, and at the next measurement point, the circle is repeated from the bottom to the top.
It is also possible to further increase the measurement speed.

Furthermore, although measurement accuracy depends on the linear convergent light obtained, it can be dramatically improved by using a Rade light source tube as the light source.

Furthermore, by bringing the distance between the semi-transparent mirrors 3 and 8 mirrors 4 closer by 1, it is possible to measure most of the objects to be measured, but for shadow areas where light cannot reach, it is possible to measure the objects as shown in the embodiment shown in FIG. 8 mirrors, two each 4. A and temperature measuring devices 5 and 5' are prepared, and each set of 8 mirrors and temperature measuring devices 4, 5 and A, 5' is prepared.
By arranging it on a plane perpendicular to each other, it is also possible to measure this part.

Since the present invention is as described above, it is possible to instantaneously capture the intersection of the two divided lights from the light source on the object to be measured, and the measurement speed can be greatly increased. Compared to conventional methods, this method does not use a lens, so it does not require troublesome operations such as focusing, which increases measurement accuracy, and it also makes it possible to measure objects in places where light cannot reach easily. It is extremely effective.

[Brief explanation of the drawing]

Figures 1 and 2 show the first embodiment of the present invention, and Figure 1 shows the normal state in which the two divided lights are irradiated onto the object to be measured, and Figure @2 shows the normal state. The third figure is a schematic diagram showing the positional relationship between the temperature measuring device and the fourth figure, showing the state at the time of measurement when the nine divided lights are irradiated on the same point on the object to be measured.
The causes are the vertical distance between the semi-transparent mirror and the irradiation intersection, the horizontal distance between the semi-transparent mirror and the 8-mirror, and the moving distance of the four-way tube, respectively. Fig. 5 is a perspective view showing another embodiment of the invention. . 1...Light source, 2...Slip, To, 3...Semi-transparent mirror, 4
．． 4'...8 mirror, 5,5'...temperature measuring device, 6...
・Object to be measured, 6'. V...Irradiation point. Figure 1 Figure 2 Figure 3 Figure 5

Claims (1)

[Claims] Light from a light source is divided into two by a semi-transparent mirror and one of the lights is directly irradiated onto the object to be measured, while the other light is reflected from the front surface and transmitted from the back surface. n− configured to
Radhe light tP3 is reflected from the surface of the mirror and irradiated onto the object to be measured, and is transmitted from the nine temperature sub-meters disposed within the circular mirror through the mirror so that its direction coincides with the light reflected from the circular mirror. While irradiating the object to be measured, the circular mirror is moved up and down in the direction perpendicular to Vti to detect nine coincident irradiation points of the divided light on the object to be measured, and detect the light emitted from the light source η. the ills of
Direct distance Lt from the irradiation point to the object to the semi-transparent light. However, the object to be measured is non-contact and is characterized in that it is multiplied by the equation of the horizontal distance r: n- from the center of the two-gyu jump to the center of the circular mirror, and the vertical movement distance of radius m: n-. How to measure the distance to.