JPS63101702A - Optical length measuring gauge - Google Patents

Optical length measuring gauge

Info

Publication number
JPS63101702A
JPS63101702A JP24757386A JP24757386A JPS63101702A JP S63101702 A JPS63101702 A JP S63101702A JP 24757386 A JP24757386 A JP 24757386A JP 24757386 A JP24757386 A JP 24757386A JP S63101702 A JPS63101702 A JP S63101702A
Authority
JP
Japan
Prior art keywords
light
measured
reflected
length measuring
heterodyne
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24757386A
Other languages
Japanese (ja)
Inventor
Shinichi Wakana
Yasuo Furukawa
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP24757386A priority Critical patent/JPS63101702A/en
Publication of JPS63101702A publication Critical patent/JPS63101702A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To achieve a larger measuring range and a higher measuring accuracy, by using a frequency modulation type light heterodyne length measuring gauge with the addition of a length measuring means employing trigonometrical survey.
CONSTITUTION: Laser light l1 emitted from a semiconductor laser 1 is converted to a parallel light with a lens 2. The parallel light is divided with a beam splitter 3 in the direction perpendicular to each other and one part l2 of the light is used for heterodyne length measurement while the other part l3 thereof is done for trigonometrical survey. The light l2 is divided with a beam splitter 4 into lights l4 and l5 again and the light l4 for measurement is made to irradiate an object M to be measured through a lens system 5. The reflected light l6 of the light is made incident into a photo detector 6 to perform a heterodyne detection. The light l3 is reflected with a mirror 7 while the reflected light l9 is made to irradiate on the object M being measured through a convergent lens 8. The reflected light l10 is detected with a position sensor 10 and an absolute distance to the object M being measured is determined by an arithmetic means.
COPYRIGHT: (C)1988,JPO&Japio
JP24757386A 1986-10-20 1986-10-20 Optical length measuring gauge Pending JPS63101702A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24757386A JPS63101702A (en) 1986-10-20 1986-10-20 Optical length measuring gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24757386A JPS63101702A (en) 1986-10-20 1986-10-20 Optical length measuring gauge

Publications (1)

Publication Number Publication Date
JPS63101702A true JPS63101702A (en) 1988-05-06

Family

ID=17165508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24757386A Pending JPS63101702A (en) 1986-10-20 1986-10-20 Optical length measuring gauge

Country Status (1)

Country Link
JP (1) JPS63101702A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5402230A (en) * 1991-12-16 1995-03-28 Tsinghua University Heterodyne interferometric optical fiber displacement sensor for measuring displacement of an object
JP2008076336A (en) * 2006-09-25 2008-04-03 Institute Of National Colleges Of Technology Japan Interference/triangulation same-optical-axis combination distance measuring instrument

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5402230A (en) * 1991-12-16 1995-03-28 Tsinghua University Heterodyne interferometric optical fiber displacement sensor for measuring displacement of an object
JP2008076336A (en) * 2006-09-25 2008-04-03 Institute Of National Colleges Of Technology Japan Interference/triangulation same-optical-axis combination distance measuring instrument

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