JPS5873196A - Multilayer circuit board - Google Patents

Multilayer circuit board

Info

Publication number
JPS5873196A
JPS5873196A JP17178381A JP17178381A JPS5873196A JP S5873196 A JPS5873196 A JP S5873196A JP 17178381 A JP17178381 A JP 17178381A JP 17178381 A JP17178381 A JP 17178381A JP S5873196 A JPS5873196 A JP S5873196A
Authority
JP
Japan
Prior art keywords
conductor
layer
turn
turns
wiring board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17178381A
Other languages
Japanese (ja)
Other versions
JPH0221156B2 (en
Inventor
義孝 福岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP17178381A priority Critical patent/JPS5873196A/en
Publication of JPS5873196A publication Critical patent/JPS5873196A/en
Publication of JPH0221156B2 publication Critical patent/JPH0221156B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electric Connection Of Electric Components To Printed Circuits (AREA)
  • Non-Metallic Protective Coatings For Printed Circuits (AREA)
  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 (1)  発明の技術分野 本発明は導体ノヤターンノーと絶縁体層とを交互に槓ノ
ーすることによって電気的配線を行ない特定の回路憬能
を達成する多層配線基板に関する。
DETAILED DESCRIPTION OF THE INVENTION (1) Technical Field of the Invention The present invention relates to a multilayer wiring board in which electrical wiring is achieved by alternately forming conductor layers and insulating layers to achieve specific circuit performance.

(2)従来技術 近年、各種電子機器の小型・軽量化、高速化、尚信頼性
化の要求が著しく高まって来ている。
(2) Prior art In recent years, there has been a marked increase in demand for various electronic devices to be smaller, lighter, faster, and more reliable.

これらの散水を7角足する一つの手法として、マルチチ
ッゾ・母ツケーソング技術が開発されている。これはヒ
リえばアルミナセラミック基板上に得体ペース1・全印
刷し、乾燥、焼成して、その上に絶縁体ペーストを印刷
し、乾燥、焼成するという工程を繰り返して導体パター
ンj−と絶縁体層とを交互に積層する、いわゆる厚膜印
刷法、あるいは、グリーンシート上に導体ペーストと絶
縁体ペーストを乾燥状態で繰り返し積層した後還元雰囲
気炉で同時焼成する印刷積層メタライズドセラミック基
板法等の技術による高警度多層配線基板上に、■Cチ、
!尋のチップ部品を複数個実装し全体を気密封止する技
術である7この様なマルチテッグノf、ケーノ用の尚布
置多層配線基板は、最上層の導体・譬ターン!−が、第
1図(−)に示す如く、ICテッグあるいはコンデンサ
ーチップ等のチ、7′部品%械用のグイビンディングパ
ッド12.13および全体を気密封止するためのキヤ、
グ等をM載する・・−メティ、クシール用ノ9ターン1
4叫の様に下層の導体ノ9ターン16の線幅に比べ比較
的大きな(8)槓を有する導体グリーンと、ICチッグ
のインナーリードゴンディングノ母、ドと電気的に接続
されるべきアウターリードノンディング・9ツド15等
の様に下層の導体パターン16の線幅とほぼ同程度ある
いはそれより多少大きめの比較的小さな面積を有する導
体ノ譬ターンとが混在して形成されている。一方、これ
らの表面導体・9ターン12〜15と電気的に接続され
るべき下ノーの導体ノ4ターン16は、第1図(b)に
示す如く通孔18を有する絶縁体層17を介して形成さ
7”する。ここで、絶縁体層17は、通常、導体パター
ン12〜15と下層の導体パターン16との絶縁耐圧の
確保および絶縁体層17のピンホールによるノー間7.
−)事故を防止すべく、2回印刷による2ノ一分の厚み
を有する絶縁体層17iJ)るいは3回印刷による3層
分の厚みを有する絶縁体l−を形成していた。
As a method of adding up these waterings, the multi-chidzo/mother-tsuke-song technique has been developed. If this happens, the conductive pattern J- and the insulating layer are printed by printing the entire paste 1 on the alumina ceramic substrate, drying and firing, printing the insulating paste on top of it, drying and firing, and repeating the process. The so-called thick film printing method, in which conductive paste and insulating paste are alternately laminated on a green sheet, or the printed laminated metallized ceramic substrate method, in which conductive paste and insulating paste are repeatedly laminated in a dry state on a green sheet, and then simultaneously fired in a reducing atmosphere furnace. On the high-security multilayer wiring board,
! This is a technology that mounts multiple chip components and hermetically seals the whole thing.7 This type of multi-layer wiring board for multi-layer wiring boards is made by mounting multiple chip components and sealing the whole thing hermetically. - As shown in FIG. 1 (-), 7' parts such as IC tags or capacitor chips, binding pads 12 and 13 for the machine, and a carrier for hermetically sealing the whole.
M-mounting etc. - Methi, Kushiel No. 9 turn 1
4. A conductor green having relatively large (8) holes compared to the line width of the lower layer conductor 9 turns 16 as shown in the figure 4, and an outer conductor that should be electrically connected to the inner lead gonding node of the IC chip. It is formed in a mixture of conductor patterns having a relatively small area, which is approximately the same as or slightly larger than the line width of the underlying conductor pattern 16, such as lead non-dings and nine leads 15. On the other hand, the fourth turn 16 of the lower conductor to be electrically connected to these nine turns 12 to 15 of the surface conductor is connected through an insulator layer 17 having a through hole 18 as shown in FIG. 1(b). The insulator layer 17 is usually formed to ensure dielectric strength between the conductor patterns 12 to 15 and the lower conductor pattern 16, and to ensure no gaps 7" due to pinholes in the insulator layer 17.
-) In order to prevent accidents, an insulator layer 17iJ) having a thickness of 2 times was formed by printing twice, or an insulator l- having a thickness of 3 layers by printing three times.

(3)従来技術の問題点 第1図の構造では、比較的小さい面積を有する導体・量
ターン15の場合はさほど問題はないが、比較的大きい
面積を有する表面導体ノ母ターン12,13.14にお
いては、下層の導体ノ9ターンノロとの層間ショート挙
故を発生する確率が非常に高く、この様な多層配線基板
の歩賞シを着しく低下させる要因となっている。また多
層配線基板製造時には、層間ショートにまでは至らなく
とも、絶縁体層17にピンホールが存在しておシ、チッ
プ部品アセンブリ、工程での熱ストレスのため、あるい
はシステムに組み込んだ後の経時変化によ1シ、そのピ
ンホール部分で層間ショート事故が発生する寺、信頼性
の(3)でも問題がある。
(3) Problems with the Prior Art In the structure shown in FIG. 1, there are no major problems in the case of the conductor/volume turns 15 having a relatively small area, but the surface conductor main turns 12, 13, . . . having a relatively large area. In No. 14, there is a very high probability that an interlayer short circuit will occur between the conductor in the lower layer and the 9th turn, which is a factor that seriously reduces the performance of such a multilayer wiring board. In addition, during the manufacturing of multilayer wiring boards, pinholes may exist in the insulator layer 17 even if they do not result in interlayer short circuits. Due to the change, an interlayer short circuit occurs at the pinhole part, and there is also a problem with reliability (3).

この様な層間ショート挙故を防ぐには、表面導体ツタタ
ーン12〜15の層と下層の導体・9ターフ16の層と
の間に存在する絶縁体層17の厚みをさらに増すべく、
従来の2回あるいは3回印刷により形成されるものを3
回あるいri4回印刷に変更することが考えられる。し
かし、その場合には印刷時の位置ずれあるいは、杷一体
ペーストのダレ込みにより、通孔J8がつぶれてしまい
、導体ノ譬ターフ12〜15と下層の導体ノ譬ターン1
6との電気的接続がなされなくなり、別の面で多層配線
基板の歩留シを低下させる結果となる。
In order to prevent such interlayer short-circuit behavior, the thickness of the insulating layer 17 existing between the surface conductor vine turns 12 to 15 and the lower conductor/9 turf 16 layer should be further increased.
What is formed by conventional two- or three-time printing is
It is conceivable to change to printing once or four times. However, in that case, the through hole J8 is crushed due to misalignment during printing or sagging of the loquat paste, and the conductor turfs 12 to 15 and the lower conductor turf 1 are crushed.
6 will no longer be electrically connected, which will result in a decrease in the yield of the multilayer wiring board in another respect.

(4)  発明の目的 本発明の目的は、面積の種々異なる最上層の導体ノやタ
ーンと下11i1の導体・量ターンとの)* l&’l
シ、−ト事故や電気的従続不良事故が少なく、歩留りの
向上と高信頼性を得ることができる多層配線基板を提供
することである。
(4) Purpose of the Invention The purpose of the present invention is to improve the connection between the conductors and turns of the uppermost layer having various areas and the conductors and turns of the lower layer 11i1)*l&'l
It is an object of the present invention to provide a multilayer wiring board that has fewer seat accidents and electrical failure accidents, and can improve yield and achieve high reliability.

(5)発明の蒙約 本発明は、導体ノ母ターフ1−と絶縁体層と力;交qK
積層され、かつ最上層の導体ノfターン層75ヨ比幀的
大きな面積を有する第1棟の導体ノ母ターンと、比較的
小さな第2Piの導体・9ターンとを言んで構成される
多層配線基板において、丙訂記最上1−の導体パターン
層と下層の導体/4’ターン+@との間の絶縁体1−の
うち、紬記第1棟の導体・!ターン直下の部分に、少な
くとも一層の付カロ絶縁体j−を設けたことを%徴とし
ている。
(5) Contract of the invention The present invention provides a conductor mother turf 1-, an insulating layer and a force;
A multi-layer wiring consisting of a first conductor mother turn which is laminated and has a comparatively large area over the top layer conductor f-turn layer 75, and a relatively small second conductor 9 turns. On the board, among the insulators 1- between the conductor pattern layer of the uppermost 1- layer of the No. 6 revision and the lower layer conductor/4' turn +@, the conductor of the first ridge of Tsumugi ! The % characteristic is that at least one layer of galvanic insulator j- is provided directly below the turn.

(6J  発明の効果 本発明によれば、最上層の導体/量ターン1−を構成す
る第1糧、第2伽の導体/量ターンのうち、下層の導体
パターンj−との層間ショートが確率的により発生し易
い第1a[の導体・リーンの直下にのみ付加絶縁体j@
を設けたことにより、多層配線基板全体としての1−間
ショート事故を減少させゐと同時に、必賛な部分での導
体・豐ターン間の電気的接続の不良事故も極力減らすこ
とができるという相反する要求を満たすことがり能とな
る。
(6J Effects of the Invention According to the present invention, there is a probability that there will be an interlayer short circuit with the conductor pattern j- in the lower layer among the first and second conductor patterns constituting the conductor pattern 1- in the uppermost layer. Additional insulators are added only directly under the conductor/lean of 1a [which tends to occur depending on the situation]
By providing this, it is possible to reduce the number of short-circuit accidents between 1 and 2 on the entire multilayer wiring board, and at the same time, it is possible to reduce as much as possible the number of electrical connection failures between the conductor and the toe turns in critical areas. It becomes possible to meet the requirements of

(7)発明の実施例 第2図は本発明の一実施例を示すものであり、21はア
ルミナセラミック基板、26は下層の導体ノfターン、
27は最上層の絶縁体層をそれぞれ示している。最上層
の導体パターン層を構成する導体ノぐターン22〜26
のうち、22はICチ、f搭載用のダイデンディングパ
ッド、23はコンデンサー等のチ、!部品搭載用のグイ
〆ンディングパ、ド、24は全体を気督到止するための
キヤ、fを搭載するハーメティ、クシール用ノ苛ターン
、25はICテ、グのインナーリードブンディング・#
、Pと電気的に接続されるべきアウターリードゴンディ
ングノ々ツドを示している。ここで、導体ノ母ターン2
2〜24は下層の導体・リーン26に比べ比較的大きな
面積を有する第1檜の導体パターン、25はこれに比べ
比較的小さな面積を有する第2mの導体ノダターンであ
る。
(7) Embodiment of the invention FIG. 2 shows an embodiment of the invention, in which 21 is an alumina ceramic substrate, 26 is a lower conductor no.
Reference numeral 27 indicates the uppermost insulator layer. Conductor turns 22 to 26 forming the uppermost conductor pattern layer
Of these, 22 are IC chips, die-dending pads for mounting f, 23 are capacitor chips, etc.! 24 is the gear for mounting the whole body, the harness for mounting the f, the inner lead bunding for the kushir, 25 is the inner lead bunding for the IC te, g.
, P shows an outer lead gonding node to be electrically connected to P. Here, conductor mother turn 2
Reference numerals 2 to 24 denote first conductor patterns having a relatively larger area than the lower layer conductor lean 26, and 25 denotes a 2m-th conductor pattern having a relatively small area compared to this.

そして、絶縁体層27の第1mの導体・母ターン22〜
24の直下の部分上に位置して、付加絶縁体層29が設
けられている。すなわちこの絶縁体層29は、第2種の
導体パターン25の存在する部分を除いた、つまり第1
種の導体ノfターン22〜24の下部にのみ選択的に絶
縁体ペーストを1回わるいはそれ以上印刷することによ
り形成されるものである。
Then, the first m-th conductor/mother turn 22 of the insulating layer 27
An additional insulator layer 29 is provided over the portion immediately below 24 . That is, this insulating layer 29 is formed except for the part where the second type conductor pattern 25 is present, that is, the first type conductor pattern 25 is
It is formed by selectively printing an insulating paste one or more times only on the lower part of the seed conductor f-turns 22-24.

なお、この付加絶縁体層2gは、第1種の導体・リーン
22〜24よりもひとまわり大きく形成され、印刷時の
位置ずれによって、第1種の導体ノ臂ターン22〜24
が付加絶縁体層29からはみ出さないようにすることが
望ましい。
Note that this additional insulator layer 2g is formed one size larger than the first type conductor turns 22 to 24, and due to positional deviation during printing, the first type conductor turns 22 to 24
It is desirable that the insulator layer 29 not protrude from the additional insulator layer 29.

また、第1橿の導体・9ターン22〜24と下層の導体
・リーン26とが下層の絶縁体fWIz7に形成され九
通孔28を通して電気的に接続される場合は、付加絶縁
体層2gに形成すべき通孔30の径は、下層の絶縁体層
27の通孔28の径よシも犬きくして、絶縁体層29を
付加したことによる印刷時の絶縁体ペーストのダレ込み
および印刷位置ずれによる電気的接続不良事故を発生し
ないように形成することが4ましい1゜このように、本
発明によれば層間ショート事故や層間の電気的接続不良
事故を減少させることが可能となシ、多層配線基板の製
造歩留り向上と、これを用いたマルチチッグ・9.ター
ンの信頼性向上に貢献することかで睡る。
In addition, when the conductor 9 turns 22 to 24 of the first rod and the conductor 26 of the lower layer are formed on the lower layer insulator fWIz7 and are electrically connected through the 9 through holes 28, the additional insulator layer 2g The diameter of the through hole 30 to be formed is set to be larger than the diameter of the through hole 28 in the lower insulating layer 27, so as to avoid sagging of the insulating paste during printing and the printing position due to the addition of the insulating layer 29. It is desirable to form the structure in such a way that electrical connection failures due to misalignment do not occur.1 As described above, according to the present invention, it is possible to reduce interlayer short circuit accidents and interlayer electrical connection failure accidents. 9. Improvement of manufacturing yield of multilayer wiring board and multi-chig using this. Contribute to improved reliability of turns or sleep.

なお、実施例では第2撞の導体・9ターンの例として、
アウターリードボンディング・譬ツドを例示したが、こ
れに限らず単なる配線用導体でもよい。
In addition, in the example, as an example of the second conductor and 9 turns,
Although outer lead bonding is used as an example, the present invention is not limited to this and may be a simple wiring conductor.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図(a) 、 (b)は従来の多l−配線基板の平
面図およびA −A’断面図、第2図体) 、 (b)
は不発明の一実施例に係る多層配線基板の平面図および
A −A’l!;j’r面図でおる。 11 、21−アルきナセラミック等の絶縁性基板、1
6.26・・・下J−の導体/リーン、17゜27・・
・下1−の絶縁体1−118.21j・・・下j@の絶
縁体層の通孔、12〜14.22〜24・・・比較的大
急な面槙t−有する第1′lIiの導体/?ターン、1
5.25・・・比較的小さな面積を有する第2糧の導体
パターン、29・・・付加絶縁体rd、go・・・付加
絶縁体1−の通孔。
Figures 1 (a) and (b) are a plan view and A-A' cross-sectional view of a conventional multi-layer wiring board;
are a plan view of a multilayer wiring board according to an embodiment of the invention, and A-A'l! ;j'r view. 11, 21-Insulating substrate such as alumina ceramic, 1
6.26...lower J- conductor/lean, 17°27...
・Lower 1- insulator 1-118.21j...Through hole in the lower j@ insulator layer, 12-14.22-24...1'lIi with relatively steep surface t- conductor/? turn, 1
5.25... Second conductor pattern having a relatively small area, 29... Additional insulator rd, go... Through hole of additional insulator 1-.

Claims (5)

【特許請求の範囲】[Claims] (1)  導体ノ4ターン層と絶縁体層とが交互に積層
され、かつ最上層の導体ノ4ターンノーが比教的大きな
面積を有する第1mの導体ノ臂ターンと、比較的小さな
面積を有する@ 2 棟の導体・9ターンとを含んで構
成される多層配線基板において、前記最上層の導体ノ4
ターン層と下ノーの傳俸・!ターン層との間の絶縁体層
のうち、前記第1槍の導体ノ母ターン直下の部分に、少
なくとも−J−の付加絶縁体層を設けたことを特徴とす
る多1−配線基板。
(1) The 4-turn conductor layer and the insulator layer are alternately laminated, and the 4-turn conductor layer on the top layer has a comparatively large area, and the 1m conductor arm turn has a relatively small area. @ In a multilayer wiring board that includes 2 conductors and 9 turns, the top layer conductor 4
The turn layer and the lower salary! A multi-wiring board characterized in that an additional insulating layer of at least -J- is provided in a portion of the insulating layer between the turn layer and the conductor mother turn of the first lance immediately below the conductor mother turn.
(2)第1種の導体/4’ターンがチッグ部品恰載用の
グイデンディングパッドであることを特徴とする特許請
求の範囲第1gX記畝の多l−配置基板。
(2) The first type of conductor/4' turn is a guiding pad for mounting a chip component, as claimed in claim 1.
(3)  第1梱の導体ノ9ターンがノ・−メチイック
シール用のパターンであることを特徴とする特許請求の
範囲第1項記載の多層配線基板。
(3) The multilayer wiring board according to claim 1, wherein the nine turns of the conductor in the first package are patterns for a methic seal.
(4)付加絶縁体j−の大きさを第1檀の導体・9ター
ンの大きさよシも大きくしたことを特徴とする請求
(4) A claim characterized in that the size of the additional insulator j- is larger than the size of the first conductor, 9 turns.
(5)付加fiI!3縁体層は下層の絶縁体層に形成さ
れた通孔よりも大きな径の通孔を有する鷺のであること
を%徴とする特#!F請求の範囲第1項記載の多層配線
基板。
(5) Additional fiI! A characteristic feature of the three-layer insulator layer is that it has holes with a larger diameter than the holes formed in the underlying insulator layer. F. A multilayer wiring board according to claim 1.
JP17178381A 1981-10-27 1981-10-27 Multilayer circuit board Granted JPS5873196A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP17178381A JPS5873196A (en) 1981-10-27 1981-10-27 Multilayer circuit board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP17178381A JPS5873196A (en) 1981-10-27 1981-10-27 Multilayer circuit board

Publications (2)

Publication Number Publication Date
JPS5873196A true JPS5873196A (en) 1983-05-02
JPH0221156B2 JPH0221156B2 (en) 1990-05-11

Family

ID=15929596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP17178381A Granted JPS5873196A (en) 1981-10-27 1981-10-27 Multilayer circuit board

Country Status (1)

Country Link
JP (1) JPS5873196A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59215796A (en) * 1983-05-24 1984-12-05 日本電気株式会社 Thick film multilayer circuit board
JPH0319395A (en) * 1989-06-16 1991-01-28 Hitachi Ltd Pattern forming method and device for thick film thin film hybrid multilayer wiring board

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59215796A (en) * 1983-05-24 1984-12-05 日本電気株式会社 Thick film multilayer circuit board
JPH025023B2 (en) * 1983-05-24 1990-01-31 Nippon Electric Co
JPH0319395A (en) * 1989-06-16 1991-01-28 Hitachi Ltd Pattern forming method and device for thick film thin film hybrid multilayer wiring board

Also Published As

Publication number Publication date
JPH0221156B2 (en) 1990-05-11

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