JPS5864021A - 連続製膜装置 - Google Patents

連続製膜装置

Info

Publication number
JPS5864021A
JPS5864021A JP16271281A JP16271281A JPS5864021A JP S5864021 A JPS5864021 A JP S5864021A JP 16271281 A JP16271281 A JP 16271281A JP 16271281 A JP16271281 A JP 16271281A JP S5864021 A JPS5864021 A JP S5864021A
Authority
JP
Japan
Prior art keywords
film forming
film
control signal
processing chamber
shutter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16271281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS629213B2 (enrdf_load_stackoverflow
Inventor
Hideki Tateishi
秀樹 立石
Tamotsu Shimizu
保 清水
Susumu Aiuchi
進 相内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16271281A priority Critical patent/JPS5864021A/ja
Publication of JPS5864021A publication Critical patent/JPS5864021A/ja
Publication of JPS629213B2 publication Critical patent/JPS629213B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/52—Controlling or regulating the coating process

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP16271281A 1981-10-14 1981-10-14 連続製膜装置 Granted JPS5864021A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16271281A JPS5864021A (ja) 1981-10-14 1981-10-14 連続製膜装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16271281A JPS5864021A (ja) 1981-10-14 1981-10-14 連続製膜装置

Publications (2)

Publication Number Publication Date
JPS5864021A true JPS5864021A (ja) 1983-04-16
JPS629213B2 JPS629213B2 (enrdf_load_stackoverflow) 1987-02-27

Family

ID=15759852

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16271281A Granted JPS5864021A (ja) 1981-10-14 1981-10-14 連続製膜装置

Country Status (1)

Country Link
JP (1) JPS5864021A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0428601U (enrdf_load_stackoverflow) * 1990-07-04 1992-03-06

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125451U (enrdf_load_stackoverflow) * 1974-03-29 1975-10-15
JPS5120356A (en) * 1974-08-08 1976-02-18 Mitsubishi Heavy Ind Ltd Fuookurifutono tentoboshisochi
JPS5314439A (en) * 1976-06-30 1978-02-09 Hitachi Heating Appliance Co Ltd Power supply of microwave oven
JPS53153039U (enrdf_load_stackoverflow) * 1977-05-09 1978-12-01

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50125451U (enrdf_load_stackoverflow) * 1974-03-29 1975-10-15
JPS5120356A (en) * 1974-08-08 1976-02-18 Mitsubishi Heavy Ind Ltd Fuookurifutono tentoboshisochi
JPS5314439A (en) * 1976-06-30 1978-02-09 Hitachi Heating Appliance Co Ltd Power supply of microwave oven
JPS53153039U (enrdf_load_stackoverflow) * 1977-05-09 1978-12-01

Also Published As

Publication number Publication date
JPS629213B2 (enrdf_load_stackoverflow) 1987-02-27

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