JPS53153039U - - Google Patents

Info

Publication number
JPS53153039U
JPS53153039U JP5755077U JP5755077U JPS53153039U JP S53153039 U JPS53153039 U JP S53153039U JP 5755077 U JP5755077 U JP 5755077U JP 5755077 U JP5755077 U JP 5755077U JP S53153039 U JPS53153039 U JP S53153039U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5755077U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5755077U priority Critical patent/JPS53153039U/ja
Publication of JPS53153039U publication Critical patent/JPS53153039U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5755077U 1977-05-09 1977-05-09 Pending JPS53153039U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5755077U JPS53153039U (enrdf_load_stackoverflow) 1977-05-09 1977-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5755077U JPS53153039U (enrdf_load_stackoverflow) 1977-05-09 1977-05-09

Publications (1)

Publication Number Publication Date
JPS53153039U true JPS53153039U (enrdf_load_stackoverflow) 1978-12-01

Family

ID=28955532

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5755077U Pending JPS53153039U (enrdf_load_stackoverflow) 1977-05-09 1977-05-09

Country Status (1)

Country Link
JP (1) JPS53153039U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864021A (ja) * 1981-10-14 1983-04-16 Hitachi Ltd 連続製膜装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5864021A (ja) * 1981-10-14 1983-04-16 Hitachi Ltd 連続製膜装置

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