CH641004GA3 - - Google Patents
Download PDFInfo
- Publication number
- CH641004GA3 CH641004GA3 CH33378A CH33378A CH641004GA3 CH 641004G A3 CH641004G A3 CH 641004GA3 CH 33378 A CH33378 A CH 33378A CH 33378 A CH33378 A CH 33378A CH 641004G A3 CH641004G A3 CH 641004GA3
- Authority
- CH
- Switzerland
- Prior art keywords
- vibrator
- plate
- quartz crystal
- metallic films
- portions
- Prior art date
Links
- 239000013078 crystal Substances 0.000 abstract 2
- 239000010453 quartz Substances 0.000 abstract 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000000151 deposition Methods 0.000 abstract 1
- 238000005530 etching Methods 0.000 abstract 1
- 238000004519 manufacturing process Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0504—Holders or supports for bulk acoustic wave devices
- H03H9/0533—Holders or supports for bulk acoustic wave devices consisting of wire
-
- G—PHYSICS
- G04—HOROLOGY
- G04F—TIME-INTERVAL MEASURING
- G04F5/00—Apparatus for producing preselected time intervals for use as timing standards
- G04F5/04—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses
- G04F5/06—Apparatus for producing preselected time intervals for use as timing standards using oscillators with electromechanical resonators producing electric oscillations or timing pulses using piezoelectric resonators
- G04F5/063—Constructional details
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
- H03H9/02—Details
- H03H9/05—Holders or supports
- H03H9/0595—Holders or supports the holder support and resonator being formed in one body
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- General Physics & Mathematics (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP202677A JPS6028406B2 (ja) | 1977-01-12 | 1977-01-12 | 小型輪郭すべり水晶振動子の製造方法 |
JP472977A JPS5390790A (en) | 1977-01-19 | 1977-01-19 | Miniature contour slide crystal vibrator |
JP803877A JPS5393793A (en) | 1977-01-27 | 1977-01-27 | Minature contour slide crystal vibrator |
JP12840977A JPS5461890A (en) | 1977-10-26 | 1977-10-26 | Contour vibrator |
Publications (2)
Publication Number | Publication Date |
---|---|
CH641004B CH641004B (fr) | |
CH641004GA3 true CH641004GA3 (enrdf_load_stackoverflow) | 1984-02-15 |
Family
ID=27453533
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH33378A CH641004B (fr) | 1977-01-12 | 1978-01-12 | Procede de fabrication d'un vibreur en cristal de quartz et vibreur obtenu par ce procede. |
Country Status (3)
Country | Link |
---|---|
US (1) | US4418299A (enrdf_load_stackoverflow) |
CH (1) | CH641004B (enrdf_load_stackoverflow) |
GB (1) | GB1592010A (enrdf_load_stackoverflow) |
Families Citing this family (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2117968B (en) * | 1982-03-16 | 1986-04-23 | Seiko Instr & Electronics | Gt-cut piezo-electric resonator |
DE3379566D1 (en) * | 1982-04-20 | 1989-05-11 | Fujitsu Ltd | Piezoelectric resonator chip and a method for adjusting its resonant frequency |
US4642505A (en) * | 1984-03-05 | 1987-02-10 | Motorola, Inc. | Laser trimming monolithic crystal filters to frequency |
US5168191A (en) * | 1987-10-02 | 1992-12-01 | Quartztronics, Inc. | Crystal resonator with low acceleration sensitivity and method of manufacture thereof |
US4935658A (en) * | 1987-10-02 | 1990-06-19 | Quartztronics, Inc. | Crystal resonator with low acceleration sensitivity and method of manufacture thereof |
US5022130A (en) * | 1987-10-02 | 1991-06-11 | Quartztronics, Inc. | Method of manufacturing crystal resonators having low acceleration sensitivity |
WO1990010953A1 (en) * | 1989-03-08 | 1990-09-20 | Motorola, Inc. | Quartz resonator with mounting pedestals |
JPH02312310A (ja) * | 1989-05-27 | 1990-12-27 | Murata Mfg Co Ltd | 圧電部品及びその製造方法 |
US5030875A (en) * | 1990-01-26 | 1991-07-09 | Motorola, Inc. | Sacrificial quartz crystal mount |
JP2673993B2 (ja) * | 1990-07-02 | 1997-11-05 | 日本無線株式会社 | 表面弾性波装置 |
US5221873A (en) * | 1992-01-21 | 1993-06-22 | Halliburton Services | Pressure transducer with quartz crystal of singly rotated cut for increased pressure and temperature operating range |
KR100204457B1 (ko) * | 1993-05-28 | 1999-06-15 | 모리시타 요이찌 | 압전진동자구체 및 그 제조방법 |
US6111338A (en) * | 1993-05-28 | 2000-08-29 | Matsushita Electric Industrial Co., Ltd. | Acceleration sensor and method for producing the same |
US6051907A (en) * | 1996-10-10 | 2000-04-18 | Nokia Mobile Phones Limited | Method for performing on-wafer tuning of thin film bulk acoustic wave resonators (FBARS) |
DE69739289D1 (de) * | 1996-10-17 | 2009-04-16 | Avago Technologies Wireless Ip | Chtoberflächenwellenresonatoren |
US5873154A (en) * | 1996-10-17 | 1999-02-23 | Nokia Mobile Phones Limited | Method for fabricating a resonator having an acoustic mirror |
US5872493A (en) * | 1997-03-13 | 1999-02-16 | Nokia Mobile Phones, Ltd. | Bulk acoustic wave (BAW) filter having a top portion that includes a protective acoustic mirror |
JP4223565B2 (ja) * | 1997-04-14 | 2009-02-12 | エプソントヨコム株式会社 | Atカット水晶振動子 |
US5910756A (en) * | 1997-05-21 | 1999-06-08 | Nokia Mobile Phones Limited | Filters and duplexers utilizing thin film stacked crystal filter structures and thin film bulk acoustic wave resonators |
US6081171A (en) * | 1998-04-08 | 2000-06-27 | Nokia Mobile Phones Limited | Monolithic filters utilizing thin film bulk acoustic wave devices and minimum passive components for controlling the shape and width of a passband response |
US6603241B1 (en) * | 2000-05-23 | 2003-08-05 | Agere Systems, Inc. | Acoustic mirror materials for acoustic devices |
AT410737B (de) * | 2001-05-31 | 2003-07-25 | Avl List Gmbh | Piezoelektrisches resonatorelement der kristallographischen punktgruppe 32 |
US7243549B2 (en) * | 2005-05-19 | 2007-07-17 | Honeywell International Inc. | Acoustic wave lubricity sensor |
US8291559B2 (en) * | 2009-02-24 | 2012-10-23 | Epcos Ag | Process for adapting resonance frequency of a BAW resonator |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BE424774A (enrdf_load_stackoverflow) * | 1936-11-25 | |||
US2743144A (en) * | 1951-04-07 | 1956-04-24 | Motorola Inc | Zero temperature coefficient piezoelectric crystal |
USRE25413E (en) * | 1961-07-05 | 1963-07-09 | Temperature xc | |
JPS583602B2 (ja) * | 1974-11-09 | 1983-01-22 | セイコーエプソン株式会社 | スイシヨウシンドウシ |
JPS6051283B2 (ja) * | 1975-09-10 | 1985-11-13 | 株式会社精工舎 | Gtカツト水晶振動子の周波数温度特性調整法 |
US4071797A (en) * | 1976-01-20 | 1978-01-31 | Societe Suisse Pour L'industrie Horlogere Management Services S.A. | Quartz piezo-electric element vibrating in a coupled mode |
JPS5323589A (en) * | 1976-08-18 | 1978-03-04 | Seiko Epson Corp | Crystal vibrator |
-
1978
- 1978-01-11 GB GB1070/78A patent/GB1592010A/en not_active Expired
- 1978-01-12 CH CH33378A patent/CH641004B/fr unknown
-
1982
- 1982-09-29 US US06/427,047 patent/US4418299A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB1592010A (en) | 1981-07-01 |
US4418299A (en) | 1983-11-29 |
CH641004B (fr) |
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