JPS5856477A - 半導体圧力変換器 - Google Patents

半導体圧力変換器

Info

Publication number
JPS5856477A
JPS5856477A JP56155166A JP15516681A JPS5856477A JP S5856477 A JPS5856477 A JP S5856477A JP 56155166 A JP56155166 A JP 56155166A JP 15516681 A JP15516681 A JP 15516681A JP S5856477 A JPS5856477 A JP S5856477A
Authority
JP
Japan
Prior art keywords
resistor
pressure
gauge
resistance
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56155166A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6356933B2 (enrdf_load_stackoverflow
Inventor
Shunji Shiromizu
白水 俊次
Ryuzo Noda
龍三 野田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP56155166A priority Critical patent/JPS5856477A/ja
Publication of JPS5856477A publication Critical patent/JPS5856477A/ja
Publication of JPS6356933B2 publication Critical patent/JPS6356933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D48/00Individual devices not covered by groups H10D1/00 - H10D44/00
    • H10D48/50Devices controlled by mechanical forces, e.g. pressure

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP56155166A 1981-09-30 1981-09-30 半導体圧力変換器 Granted JPS5856477A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56155166A JPS5856477A (ja) 1981-09-30 1981-09-30 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56155166A JPS5856477A (ja) 1981-09-30 1981-09-30 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS5856477A true JPS5856477A (ja) 1983-04-04
JPS6356933B2 JPS6356933B2 (enrdf_load_stackoverflow) 1988-11-09

Family

ID=15599948

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56155166A Granted JPS5856477A (ja) 1981-09-30 1981-09-30 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPS5856477A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8593068B2 (en) 2010-02-23 2013-11-26 Panasonic Corporation Two-wire AC switch

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4496095B2 (ja) * 2005-01-18 2010-07-07 日本原子力発電株式会社 弁開閉検出用センサ

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140984A (enrdf_load_stackoverflow) * 1974-08-01 1976-04-06 Instrumentation Labor Inc
JPS55163880A (en) * 1979-06-07 1980-12-20 Hitachi Ltd Semiconductor strain gauge bridge circuit

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140984A (enrdf_load_stackoverflow) * 1974-08-01 1976-04-06 Instrumentation Labor Inc
JPS55163880A (en) * 1979-06-07 1980-12-20 Hitachi Ltd Semiconductor strain gauge bridge circuit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8593068B2 (en) 2010-02-23 2013-11-26 Panasonic Corporation Two-wire AC switch

Also Published As

Publication number Publication date
JPS6356933B2 (enrdf_load_stackoverflow) 1988-11-09

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