JPS6311612B2 - - Google Patents
Info
- Publication number
- JPS6311612B2 JPS6311612B2 JP12655279A JP12655279A JPS6311612B2 JP S6311612 B2 JPS6311612 B2 JP S6311612B2 JP 12655279 A JP12655279 A JP 12655279A JP 12655279 A JP12655279 A JP 12655279A JP S6311612 B2 JPS6311612 B2 JP S6311612B2
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- temperature
- bridge
- voltage dividing
- point
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004065 semiconductor Substances 0.000 claims description 20
- 230000035945 sensitivity Effects 0.000 claims description 14
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
- G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
- G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12655279A JPS5649933A (en) | 1979-10-01 | 1979-10-01 | Semiconductor pressure detector |
| US06/087,938 US4300395A (en) | 1978-11-08 | 1979-10-25 | Semiconductor pressure detection device |
| DE2945185A DE2945185C2 (de) | 1978-11-08 | 1979-11-08 | Halbleiter-Druckmeßvorrichtung |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12655279A JPS5649933A (en) | 1979-10-01 | 1979-10-01 | Semiconductor pressure detector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5649933A JPS5649933A (en) | 1981-05-06 |
| JPS6311612B2 true JPS6311612B2 (enrdf_load_stackoverflow) | 1988-03-15 |
Family
ID=14937989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12655279A Granted JPS5649933A (en) | 1978-11-08 | 1979-10-01 | Semiconductor pressure detector |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5649933A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57186135A (en) * | 1981-05-13 | 1982-11-16 | Toshiba Corp | Semiconductor pressure transducer |
| JPS6097230A (ja) * | 1983-11-01 | 1985-05-31 | Nec Corp | 圧力変換器 |
-
1979
- 1979-10-01 JP JP12655279A patent/JPS5649933A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5649933A (en) | 1981-05-06 |
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