JPS5649933A - Semiconductor pressure detector - Google Patents

Semiconductor pressure detector

Info

Publication number
JPS5649933A
JPS5649933A JP12655279A JP12655279A JPS5649933A JP S5649933 A JPS5649933 A JP S5649933A JP 12655279 A JP12655279 A JP 12655279A JP 12655279 A JP12655279 A JP 12655279A JP S5649933 A JPS5649933 A JP S5649933A
Authority
JP
Japan
Prior art keywords
bridge
pressure
partial
point
temperature
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12655279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6311612B2 (enrdf_load_stackoverflow
Inventor
Shunji Shiromizu
Ryuzo Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP12655279A priority Critical patent/JPS5649933A/ja
Priority to US06/087,938 priority patent/US4300395A/en
Priority to DE2945185A priority patent/DE2945185C2/de
Publication of JPS5649933A publication Critical patent/JPS5649933A/ja
Publication of JPS6311612B2 publication Critical patent/JPS6311612B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/02—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning
    • G01L9/06—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices
    • G01L9/065—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means by making use of variations in ohmic resistance, e.g. of potentiometers, electric circuits therefor, e.g. bridges, amplifiers or signal conditioning of piezo-resistive devices with temperature compensating means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP12655279A 1978-11-08 1979-10-01 Semiconductor pressure detector Granted JPS5649933A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP12655279A JPS5649933A (en) 1979-10-01 1979-10-01 Semiconductor pressure detector
US06/087,938 US4300395A (en) 1978-11-08 1979-10-25 Semiconductor pressure detection device
DE2945185A DE2945185C2 (de) 1978-11-08 1979-11-08 Halbleiter-Druckmeßvorrichtung

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12655279A JPS5649933A (en) 1979-10-01 1979-10-01 Semiconductor pressure detector

Publications (2)

Publication Number Publication Date
JPS5649933A true JPS5649933A (en) 1981-05-06
JPS6311612B2 JPS6311612B2 (enrdf_load_stackoverflow) 1988-03-15

Family

ID=14937989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12655279A Granted JPS5649933A (en) 1978-11-08 1979-10-01 Semiconductor pressure detector

Country Status (1)

Country Link
JP (1) JPS5649933A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186135A (en) * 1981-05-13 1982-11-16 Toshiba Corp Semiconductor pressure transducer
JPS6097230A (ja) * 1983-11-01 1985-05-31 Nec Corp 圧力変換器

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57186135A (en) * 1981-05-13 1982-11-16 Toshiba Corp Semiconductor pressure transducer
JPS6097230A (ja) * 1983-11-01 1985-05-31 Nec Corp 圧力変換器

Also Published As

Publication number Publication date
JPS6311612B2 (enrdf_load_stackoverflow) 1988-03-15

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