JPS58500827A - フイラメント補給型カソ−ド - Google Patents

フイラメント補給型カソ−ド

Info

Publication number
JPS58500827A
JPS58500827A JP57501871A JP50187182A JPS58500827A JP S58500827 A JPS58500827 A JP S58500827A JP 57501871 A JP57501871 A JP 57501871A JP 50187182 A JP50187182 A JP 50187182A JP S58500827 A JPS58500827 A JP S58500827A
Authority
JP
Japan
Prior art keywords
strip
ion source
discharge chamber
ion
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57501871A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0418662B2 (enExample
Inventor
ロビンソン・ウイリアム・ピ−
マクヌルテイ・フ−・ジユニア
セリジヤ−・ロバ−ト・エル
ウイリアムソン・ウエルドン・エス
Original Assignee
ヒユ−ズ・エアクラフト・カンパニ−
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ヒユ−ズ・エアクラフト・カンパニ− filed Critical ヒユ−ズ・エアクラフト・カンパニ−
Publication of JPS58500827A publication Critical patent/JPS58500827A/ja
Publication of JPH0418662B2 publication Critical patent/JPH0418662B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/20Ion sources; Ion guns using particle beam bombardment, e.g. ionisers
    • H01J27/205Ion sources; Ion guns using particle beam bombardment, e.g. ionisers with electrons, e.g. electron impact ionisation, electron attachment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00Ion beam tubes
    • H01J27/02Ion sources; Ion guns
    • H01J27/022Details
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/08Ion sources; Ion guns

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Tubes For Measurement (AREA)
JP57501871A 1981-05-26 1982-05-03 フイラメント補給型カソ−ド Granted JPS58500827A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US266772 1981-05-26
US06/266,772 US4388560A (en) 1981-05-26 1981-05-26 Filament dispenser cathode

Publications (2)

Publication Number Publication Date
JPS58500827A true JPS58500827A (ja) 1983-05-19
JPH0418662B2 JPH0418662B2 (enExample) 1992-03-27

Family

ID=23015945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57501871A Granted JPS58500827A (ja) 1981-05-26 1982-05-03 フイラメント補給型カソ−ド

Country Status (5)

Country Link
US (1) US4388560A (enExample)
EP (1) EP0079932B1 (enExample)
JP (1) JPS58500827A (enExample)
DE (1) DE3277662D1 (enExample)
WO (1) WO1982004350A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020196450A1 (ja) * 2019-03-25 2020-10-01 アトナープ株式会社 加熱されたワイヤーによる処理を提供する装置

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4496881A (en) * 1982-09-29 1985-01-29 Tetra Pak Developpement Sa Method of cold cathode replenishment in electron beam apparatus and replenishable cold cathode assembly
US4587430A (en) * 1983-02-10 1986-05-06 Mission Research Corporation Ion implantation source and device
NL8302275A (nl) * 1983-06-28 1985-01-16 Philips Nv Electronenstraalapparaat met metaaldraadbron.
US4684848A (en) * 1983-09-26 1987-08-04 Kaufman & Robinson, Inc. Broad-beam electron source
DE3688860T2 (de) * 1985-05-28 1993-11-25 Rikagaku Kenkyusho Mittels Elektronenstrahl angeregte Ionenstrahlquelle.
US4734586A (en) * 1986-03-06 1988-03-29 The United States Of America As Represented By The United States Department Of Energy Foil changing apparatus
US7957507B2 (en) * 2005-02-28 2011-06-07 Cadman Patrick F Method and apparatus for modulating a radiation beam
US8232535B2 (en) * 2005-05-10 2012-07-31 Tomotherapy Incorporated System and method of treating a patient with radiation therapy
KR20080044249A (ko) * 2005-07-22 2008-05-20 토모테라피 인코포레이티드 방사선량 전달을 예측하는 방법 및 시스템
CA2616304A1 (en) * 2005-07-22 2007-02-01 Tomotherapy Incorporated System and method of delivering radiation therapy to a moving region of interest
KR20080039920A (ko) 2005-07-22 2008-05-07 토모테라피 인코포레이티드 방사선 치료 시스템에 의해 부여되는 선량을 평가하는시스템 및 방법
CN101268467B (zh) 2005-07-22 2012-07-18 断层放疗公司 用于评估治疗计划的实施中的质量保证标准的方法和系统
EP1906826A4 (en) 2005-07-22 2009-10-21 Tomotherapy Inc SYSTEM AND METHOD FOR DETECTING A RESPIRATORY CYCLE IN A PATIENT RECEIVING RADIOTHERAPY TREATMENT
CN101500648B (zh) 2005-07-22 2012-07-04 断层放疗公司 利用剂量体积直方图生成轮廓结构的系统和方法
WO2007014092A2 (en) 2005-07-22 2007-02-01 Tomotherapy Incorporated Method of placing constraints on a deformation map and system for implementing same
KR20080039925A (ko) 2005-07-22 2008-05-07 토모테라피 인코포레이티드 생물학적 모델에 기초하여 방사선 요법 치료 계획을적합화시키는 방법 및 시스템
EP1907056A2 (en) * 2005-07-22 2008-04-09 Tomotherapy, Inc. System and method of remotely analyzing operation of a radiation therapy system
EP1907984A4 (en) 2005-07-22 2009-10-21 Tomotherapy Inc METHOD AND SYSTEM FOR DATA PROCESSING IN THE CONTEXT OF A RADIATION THERAPY TREATMENT PLAN
EP1906828A4 (en) * 2005-07-22 2009-10-21 Tomotherapy Inc SYSTEM AND METHOD FOR MONITORING THE OPERATION OF A MEDICAL DEVICE
CA2616301A1 (en) 2005-07-22 2007-02-01 Tomotherapy Incorporated Method and system for evaluating delivered dose
US8442287B2 (en) * 2005-07-22 2013-05-14 Tomotherapy Incorporated Method and system for evaluating quality assurance criteria in delivery of a treatment plan
US20090041200A1 (en) * 2005-07-23 2009-02-12 Tomotherapy Incorporated Radiation therapy imaging and delivery utilizing coordinated motion of jaws, gantry, and couch
EP1907057B1 (en) 2005-07-23 2017-01-25 TomoTherapy, Inc. Radiation therapy delivery device utilizing coordinated motion of gantry and couch
US20080043910A1 (en) * 2006-08-15 2008-02-21 Tomotherapy Incorporated Method and apparatus for stabilizing an energy source in a radiation delivery device
US20110048488A1 (en) * 2009-09-01 2011-03-03 Gabriel Karim M Combined thermoelectric/photovoltaic device and method of making the same
US9159542B2 (en) * 2010-12-14 2015-10-13 Thermo Finnigan Llc Apparatus and method for inhibiting ionization source filament failure
CN107469240B (zh) 2013-02-26 2020-04-21 安科锐公司 多叶准直器和用于准直治疗放射束的系统
US9184019B2 (en) * 2013-03-14 2015-11-10 Schlumberger Technology Corporation Ion source having negatively biased extractor

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54105699A (en) * 1978-02-03 1979-08-18 Toshiba Corp Ion source device

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290540A (en) * 1964-04-16 1966-12-06 Westinghouse Electric Corp Electron discharge tube having a movable cathode tape
NL7018701A (enExample) * 1970-12-23 1972-06-27
US4163151A (en) * 1977-12-28 1979-07-31 Hughes Aircraft Company Separated ion source

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54105699A (en) * 1978-02-03 1979-08-18 Toshiba Corp Ion source device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020196450A1 (ja) * 2019-03-25 2020-10-01 アトナープ株式会社 加熱されたワイヤーによる処理を提供する装置

Also Published As

Publication number Publication date
EP0079932A4 (en) 1984-09-13
US4388560A (en) 1983-06-14
DE3277662D1 (en) 1987-12-17
EP0079932B1 (en) 1987-11-11
WO1982004350A1 (en) 1982-12-09
JPH0418662B2 (enExample) 1992-03-27
EP0079932A1 (en) 1983-06-01

Similar Documents

Publication Publication Date Title
JPS58500827A (ja) フイラメント補給型カソ−ド
JPH08227688A (ja) イオン注入機に使用するイオン発生装置とその方法
JPS63276858A (ja) イオンビーム発生装置
JP2001236897A (ja) イオン源およびその運転方法
US3315125A (en) High-power ion and electron sources in cascade arrangement
US4886969A (en) Cluster beam apparatus utilizing cold cathode cluster ionizer
JP2859479B2 (ja) ボロンイオンを生成するためのイオン源
JP2724464B2 (ja) イオン源装置
Belchenko et al. Negative ion surface-plasma source development for fusion in Novosibirsk
US4288716A (en) Ion source having improved cathode
US2848620A (en) Ion producing mechanism
JP2003270400A (ja) 中性子発生管用pig型負イオン源
JP4029495B2 (ja) イオン源
KR100687419B1 (ko) 이온주입장치의 이온소스부
CN114540783A (zh) 一种高效离化的离子注入方法
JPH06310297A (ja) 低エネルギー中性粒子線発生方法及び装置
JPS5857880B2 (ja) イオン源装置
JPS6357104B2 (enExample)
US3305696A (en) Negative ion source having gas nozzle integral with the cathode
JPH0160890B2 (enExample)
JP2627420B2 (ja) 高速原子線源
US4159421A (en) Method and apparatus for suppressing electron generation in a vapor source for isotope separation
JPH08236030A (ja) 負イオン源
JPH04126340A (ja) イオン源
JPH1064437A (ja) イオンビーム発生装置