JPS58500456A - 薄膜ストレーンゲージおよびその製造法 - Google Patents
薄膜ストレーンゲージおよびその製造法Info
- Publication number
- JPS58500456A JPS58500456A JP50027382A JP50027382A JPS58500456A JP S58500456 A JPS58500456 A JP S58500456A JP 50027382 A JP50027382 A JP 50027382A JP 50027382 A JP50027382 A JP 50027382A JP S58500456 A JPS58500456 A JP S58500456A
- Authority
- JP
- Japan
- Prior art keywords
- resistance
- elongation
- thin film
- layer
- spring element
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010409 thin film Substances 0.000 title claims description 43
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 238000005259 measurement Methods 0.000 claims description 39
- 239000004020 conductor Substances 0.000 claims description 29
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 28
- 238000000034 method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 20
- 229910052757 nitrogen Inorganic materials 0.000 claims description 14
- 239000011521 glass Substances 0.000 claims description 10
- 229910052715 tantalum Inorganic materials 0.000 claims description 9
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 9
- 238000005530 etching Methods 0.000 claims description 8
- 239000007789 gas Substances 0.000 claims description 6
- 238000006243 chemical reaction Methods 0.000 claims description 5
- 238000009413 insulation Methods 0.000 claims description 5
- 238000000926 separation method Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 claims description 5
- 230000001133 acceleration Effects 0.000 claims description 4
- 238000010276 construction Methods 0.000 claims description 4
- 239000011148 porous material Substances 0.000 claims description 4
- 238000004080 punching Methods 0.000 claims description 4
- 229910004479 Ta2N Inorganic materials 0.000 claims description 3
- 238000007639 printing Methods 0.000 claims description 3
- 238000007650 screen-printing Methods 0.000 claims description 3
- 238000002207 thermal evaporation Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000005260 corrosion Methods 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 238000012545 processing Methods 0.000 claims description 2
- 241000209140 Triticum Species 0.000 claims 1
- 235000021307 Triticum Nutrition 0.000 claims 1
- 230000007797 corrosion Effects 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000003780 insertion Methods 0.000 claims 1
- 230000037431 insertion Effects 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 9
- 229910001006 Constantan Inorganic materials 0.000 description 6
- 238000001465 metallisation Methods 0.000 description 6
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 238000005245 sintering Methods 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 238000013519 translation Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE3113745.8 | 1981-04-04 | ||
| PCT/DE1981/000228 WO1982003458A1 (fr) | 1981-04-04 | 1981-12-18 | Jauge de contrainte a couche mince et procede pour sa fabrication |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58500456A true JPS58500456A (ja) | 1983-03-24 |
| JPH0141201B2 JPH0141201B2 (OSRAM) | 1989-09-04 |
Family
ID=6723550
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50027382A Granted JPS58500456A (ja) | 1981-04-04 | 1981-12-18 | 薄膜ストレーンゲージおよびその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58500456A (OSRAM) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015097288A (ja) * | 2008-11-06 | 2015-05-21 | ヴィシェイ インターテクノロジー インコーポレイテッド | ４つの抵抗器を備えた抵抗温度係数を調整可能な４端子型抵抗器 |
| JP2021051091A (ja) * | 2020-12-24 | 2021-04-01 | 株式会社ＮｅｊｉＬａｗ | センサ構造のパターニング方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55144502A (en) * | 1979-04-23 | 1980-11-11 | Siemens Ag | Strain gauge bridge circuit and manufacturing method thereof |
-
1981
- 1981-12-18 JP JP50027382A patent/JPS58500456A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55144502A (en) * | 1979-04-23 | 1980-11-11 | Siemens Ag | Strain gauge bridge circuit and manufacturing method thereof |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015097288A (ja) * | 2008-11-06 | 2015-05-21 | ヴィシェイ インターテクノロジー インコーポレイテッド | ４つの抵抗器を備えた抵抗温度係数を調整可能な４端子型抵抗器 |
| JP2021051091A (ja) * | 2020-12-24 | 2021-04-01 | 株式会社ＮｅｊｉＬａｗ | センサ構造のパターニング方法 |
| JP2022119964A (ja) * | 2020-12-24 | 2022-08-17 | 株式会社NejiLaw | センサ構造のパターニング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0141201B2 (OSRAM) | 1989-09-04 |
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