JPS5849609A - 炭素およびその作製方法 - Google Patents

炭素およびその作製方法

Info

Publication number
JPS5849609A
JPS5849609A JP56146929A JP14692981A JPS5849609A JP S5849609 A JPS5849609 A JP S5849609A JP 56146929 A JP56146929 A JP 56146929A JP 14692981 A JP14692981 A JP 14692981A JP S5849609 A JPS5849609 A JP S5849609A
Authority
JP
Japan
Prior art keywords
carbon
reactive gas
atmosphere
fibrous
band width
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56146929A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0445977B2 (enExample
Inventor
Shunpei Yamazaki
舜平 山崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP56146929A priority Critical patent/JPS5849609A/ja
Publication of JPS5849609A publication Critical patent/JPS5849609A/ja
Priority to JP13503789A priority patent/JPH03158468A/ja
Publication of JPH0445977B2 publication Critical patent/JPH0445977B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Chemical Vapour Deposition (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Or Physical Treatment Of Fibers (AREA)
JP56146929A 1981-09-17 1981-09-17 炭素およびその作製方法 Granted JPS5849609A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP56146929A JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法
JP13503789A JPH03158468A (ja) 1981-09-17 1989-05-29 炭素を主成分とする被膜

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56146929A JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP61285536A Division JPS62171910A (ja) 1986-11-29 1986-11-29 炭素

Publications (2)

Publication Number Publication Date
JPS5849609A true JPS5849609A (ja) 1983-03-23
JPH0445977B2 JPH0445977B2 (enExample) 1992-07-28

Family

ID=15418760

Family Applications (2)

Application Number Title Priority Date Filing Date
JP56146929A Granted JPS5849609A (ja) 1981-09-17 1981-09-17 炭素およびその作製方法
JP13503789A Pending JPH03158468A (ja) 1981-09-17 1989-05-29 炭素を主成分とする被膜

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP13503789A Pending JPH03158468A (ja) 1981-09-17 1989-05-29 炭素を主成分とする被膜

Country Status (1)

Country Link
JP (2) JPS5849609A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110820320A (zh) * 2019-11-06 2020-02-21 西安奕斯伟硅片技术有限公司 保温毡及其制备方法、拉晶炉

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5643343A (en) * 1993-11-23 1997-07-01 Selifanov; Oleg Vladimirovich Abrasive material for precision surface treatment and a method for the manufacturing thereof
US5711773A (en) * 1994-11-17 1998-01-27 Plasmoteg Engineering Center Abrasive material for precision surface treatment and a method for the manufacturing thereof
WO1997020982A1 (en) * 1995-12-01 1997-06-12 E.I. Du Pont De Nemours And Company Diamond-like-carbon coated aramid fibers having improved mechanical properties
EP0876528B1 (en) * 1995-12-01 2002-10-02 E.I. Du Pont De Nemours And Company Capacitively coupled rf diamond-like-carbon reactor
DE102004033090A1 (de) * 2004-07-08 2006-02-09 Klaus Dr. Rennebeck Element zur Wärmeableitung
JP5282203B2 (ja) * 2008-07-22 2013-09-04 帝人株式会社 機能性繊維及び機能性繊維製品

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
SOLID STATE COMMUN *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110820320A (zh) * 2019-11-06 2020-02-21 西安奕斯伟硅片技术有限公司 保温毡及其制备方法、拉晶炉

Also Published As

Publication number Publication date
JPH0445977B2 (enExample) 1992-07-28
JPH03158468A (ja) 1991-07-08

Similar Documents

Publication Publication Date Title
CN110016803B (zh) 一种耐高温电热纤维及其应用
JPS6232157B2 (enExample)
JPH047944B2 (enExample)
US3462340A (en) Fiber-containing pyrolytic composite material
JPS5849609A (ja) 炭素およびその作製方法
EP0064785B1 (en) Method and arrangement for internally coating a tube by reactive deposition from a gas mixture activated by a plasma
US3811940A (en) High frequency heating method for vapor deposition of coatings onto filaments
JP7042492B2 (ja) 基板上のグラフェン膜の直接成膜法及び走査型プローブ顕微鏡用カンチレバー
CN112723356B (zh) 一种层级结构SiOC透波材料、制备方法及其应用
US3811917A (en) Boron deposition on carbon monofilament
EP0772699A1 (en) Diamond-phase carbon tubes and cvd process for their production
JPH0366280B2 (enExample)
JPS62182180A (ja) 炭素
JPS59146947A (ja) 光波伝送体のプレフオ−ムの製法
US3386918A (en) High temperature dielectric reinforced composite
JPS62162366A (ja) 炭素被膜を有する複合体
Mog Advances of synthesis of hexagonal boron nitride for industrial applications: A review
CN1403625A (zh) 一种组合式微波等离子体激励装置
US3556834A (en) Low temperature method for producing amorphous boron-carbon deposits
JPS62171910A (ja) 炭素
JPS63265890A (ja) ダイヤモンド薄膜又はダイヤモンド状薄膜の製造方法
CN118146001B (zh) 一种4H-SiC及其超快速的制备方法和应用
JPH0427690B2 (enExample)
JPS62167883A (ja) 炭素被膜を有する複合体の作成方法
JPH0427691B2 (enExample)