DE69624139T2 - Kapazitativ gekuppelter rf-reaktor für die beschichtung mit diamantartigem kohlenstoff - Google Patents
Kapazitativ gekuppelter rf-reaktor für die beschichtung mit diamantartigem kohlenstoffInfo
- Publication number
- DE69624139T2 DE69624139T2 DE69624139T DE69624139T DE69624139T2 DE 69624139 T2 DE69624139 T2 DE 69624139T2 DE 69624139 T DE69624139 T DE 69624139T DE 69624139 T DE69624139 T DE 69624139T DE 69624139 T2 DE69624139 T2 DE 69624139T2
- Authority
- DE
- Germany
- Prior art keywords
- capacitative
- diamond
- reactor
- coating
- carbon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M11/00—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising
- D06M11/73—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof
- D06M11/74—Treating fibres, threads, yarns, fabrics or fibrous goods made from such materials, with inorganic substances or complexes thereof; Such treatment combined with mechanical treatment, e.g. mercerising with carbon or compounds thereof with carbon or graphite; with carbides; with graphitic acids or their salts
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
- D06M10/025—Corona discharge or low temperature plasma
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
- D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
- D06M10/06—Inorganic compounds or elements
-
- D—TEXTILES; PAPER
- D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
- D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
- D06M2101/00—Chemical constitution of the fibres, threads, yarns, fabrics or fibrous goods made from such materials, to be treated
- D06M2101/16—Synthetic fibres, other than mineral fibres
- D06M2101/30—Synthetic polymers consisting of macromolecular compounds obtained otherwise than by reactions only involving carbon-to-carbon unsaturated bonds
- D06M2101/34—Polyamides
- D06M2101/36—Aromatic polyamides
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S427/00—Coating processes
- Y10S427/103—Diamond-like carbon coating, i.e. DLC
- Y10S427/104—Utilizing low energy electromagnetic radiation, e.g. microwave, radio wave, IR, UV, visible, actinic laser
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Metallurgy (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Inorganic Chemistry (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Or Physical Treatment Of Fibers (AREA)
- Chemical Vapour Deposition (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Fibers (AREA)
- Carbon And Carbon Compounds (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US784895P | 1995-12-01 | 1995-12-01 | |
PCT/US1996/018438 WO1997020981A1 (en) | 1995-12-01 | 1996-11-18 | Capacitively coupled rf diamond-like-carbon reactor |
Publications (2)
Publication Number | Publication Date |
---|---|
DE69624139D1 DE69624139D1 (de) | 2002-11-07 |
DE69624139T2 true DE69624139T2 (de) | 2003-06-12 |
Family
ID=21728428
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
DE69624139T Expired - Lifetime DE69624139T2 (de) | 1995-12-01 | 1996-11-18 | Kapazitativ gekuppelter rf-reaktor für die beschichtung mit diamantartigem kohlenstoff |
Country Status (11)
Country | Link |
---|---|
US (1) | US6037016A (de) |
EP (1) | EP0876528B1 (de) |
JP (1) | JP2000501781A (de) |
KR (1) | KR100465266B1 (de) |
CN (1) | CN1203640A (de) |
AU (1) | AU712118B2 (de) |
BR (1) | BR9611841A (de) |
CA (1) | CA2239014C (de) |
DE (1) | DE69624139T2 (de) |
UA (1) | UA47445C2 (de) |
WO (1) | WO1997020981A1 (de) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000501782A (ja) * | 1995-12-01 | 2000-02-15 | イー・アイ・デユポン・ドウ・ヌムール・アンド・カンパニー | ダイヤモンド状炭素で被覆された改善された機械的性質をもつアラミド繊維 |
US5858477A (en) * | 1996-12-10 | 1999-01-12 | Akashic Memories Corporation | Method for producing recording media having protective overcoats of highly tetrahedral amorphous carbon |
FR2775488B1 (fr) * | 1998-02-27 | 2000-05-19 | Nylstar Sa | Procede de traitement par plasma d'un article en fibres ou fils |
US20040225213A1 (en) * | 2002-01-22 | 2004-11-11 | Xingwu Wang | Magnetic resonance imaging coated assembly |
US6846985B2 (en) | 2002-01-22 | 2005-01-25 | Nanoset, Llc | Magnetically shielded assembly |
US7162302B2 (en) * | 2002-03-04 | 2007-01-09 | Nanoset Llc | Magnetically shielded assembly |
US20050260331A1 (en) * | 2002-01-22 | 2005-11-24 | Xingwu Wang | Process for coating a substrate |
GB2385864A (en) * | 2002-02-28 | 2003-09-03 | Qinetiq Ltd | Production of nanocarbons |
US20050155779A1 (en) * | 2003-04-08 | 2005-07-21 | Xingwu Wang | Coated substrate assembly |
JP2005128771A (ja) * | 2003-10-23 | 2005-05-19 | Fujitsu Ltd | データファイルシステム、データアクセスサーバ、およびデータアクセスプログラム |
WO2006081622A1 (en) * | 2005-02-03 | 2006-08-10 | Australian Wool Innovation Limited | Fibre coating composition |
FR3044023B1 (fr) * | 2015-11-19 | 2017-12-22 | Herakles | Dispositif pour le revetement d'un ou plusieurs fils par un procede de depot en phase vapeur |
FR3044024B1 (fr) * | 2015-11-19 | 2017-12-22 | Herakles | Dispositif pour le revetement d'un ou plusieurs fils par un procede de depot en phase vapeur |
EP4289519A1 (de) * | 2022-06-10 | 2023-12-13 | Basf Se | Plasmaerzeugte barrieren für verpackungen |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4048953A (en) * | 1974-06-19 | 1977-09-20 | Pfizer Inc. | Apparatus for vapor depositing pyrolytic carbon on porous sheets of carbon material |
JPS5849609A (ja) * | 1981-09-17 | 1983-03-23 | Semiconductor Energy Lab Co Ltd | 炭素およびその作製方法 |
US5041201A (en) * | 1988-09-16 | 1991-08-20 | Semiconductor Energy Laboratory Co., Ltd. | Plasma processing method and apparatus |
US5431968A (en) * | 1993-12-07 | 1995-07-11 | Miller; Paul A. | Method for simultaneously coating a plurality of filaments |
GB9405029D0 (en) * | 1994-03-15 | 1994-04-27 | Franks Joseph Dr | Improved catheters and other tubular inserts |
EP0755327A4 (de) * | 1994-04-01 | 1998-04-08 | Mobil Oil Corp | Sperrfilme mit kohlenstoffbeschichteter oberfläche |
-
1996
- 1996-11-18 KR KR10-1998-0704094A patent/KR100465266B1/ko not_active IP Right Cessation
- 1996-11-18 DE DE69624139T patent/DE69624139T2/de not_active Expired - Lifetime
- 1996-11-18 UA UA98052748A patent/UA47445C2/uk unknown
- 1996-11-18 JP JP9521287A patent/JP2000501781A/ja not_active Ceased
- 1996-11-18 CA CA002239014A patent/CA2239014C/en not_active Expired - Fee Related
- 1996-11-18 WO PCT/US1996/018438 patent/WO1997020981A1/en active IP Right Grant
- 1996-11-18 AU AU11203/97A patent/AU712118B2/en not_active Ceased
- 1996-11-18 BR BR9611841A patent/BR9611841A/pt not_active IP Right Cessation
- 1996-11-18 EP EP96942014A patent/EP0876528B1/de not_active Expired - Lifetime
- 1996-11-18 CN CN96198677A patent/CN1203640A/zh active Pending
- 1996-11-18 US US09/077,513 patent/US6037016A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
UA47445C2 (uk) | 2002-07-15 |
KR100465266B1 (ko) | 2005-04-06 |
AU712118B2 (en) | 1999-10-28 |
KR19990071814A (ko) | 1999-09-27 |
JP2000501781A (ja) | 2000-02-15 |
BR9611841A (pt) | 1999-03-09 |
CA2239014C (en) | 2007-07-10 |
WO1997020981A1 (en) | 1997-06-12 |
EP0876528A1 (de) | 1998-11-11 |
US6037016A (en) | 2000-03-14 |
CA2239014A1 (en) | 1997-06-12 |
CN1203640A (zh) | 1998-12-30 |
DE69624139D1 (de) | 2002-11-07 |
AU1120397A (en) | 1997-06-27 |
EP0876528B1 (de) | 2002-10-02 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
8364 | No opposition during term of opposition |