JPS584943A - 低インピ−ダンスプロ−ブカ−ド - Google Patents

低インピ−ダンスプロ−ブカ−ド

Info

Publication number
JPS584943A
JPS584943A JP10291781A JP10291781A JPS584943A JP S584943 A JPS584943 A JP S584943A JP 10291781 A JP10291781 A JP 10291781A JP 10291781 A JP10291781 A JP 10291781A JP S584943 A JPS584943 A JP S584943A
Authority
JP
Japan
Prior art keywords
steel plate
thick steel
plate
low impedance
thick
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10291781A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0416943B2 (enrdf_load_stackoverflow
Inventor
Mitsuru Ito
充 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP10291781A priority Critical patent/JPS584943A/ja
Publication of JPS584943A publication Critical patent/JPS584943A/ja
Publication of JPH0416943B2 publication Critical patent/JPH0416943B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP10291781A 1981-06-30 1981-06-30 低インピ−ダンスプロ−ブカ−ド Granted JPS584943A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10291781A JPS584943A (ja) 1981-06-30 1981-06-30 低インピ−ダンスプロ−ブカ−ド

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10291781A JPS584943A (ja) 1981-06-30 1981-06-30 低インピ−ダンスプロ−ブカ−ド

Publications (2)

Publication Number Publication Date
JPS584943A true JPS584943A (ja) 1983-01-12
JPH0416943B2 JPH0416943B2 (enrdf_load_stackoverflow) 1992-03-25

Family

ID=14340203

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10291781A Granted JPS584943A (ja) 1981-06-30 1981-06-30 低インピ−ダンスプロ−ブカ−ド

Country Status (1)

Country Link
JP (1) JPS584943A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122403A (ja) * 2000-12-04 2008-05-29 Cascade Microtech Inc ウェハープローブの組み立て方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216177A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Probe card
JPS59762U (ja) * 1982-06-22 1984-01-06 佐藤製罐株式会社 密閉容器

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5216177A (en) * 1975-07-30 1977-02-07 Hitachi Ltd Probe card
JPS59762U (ja) * 1982-06-22 1984-01-06 佐藤製罐株式会社 密閉容器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008122403A (ja) * 2000-12-04 2008-05-29 Cascade Microtech Inc ウェハープローブの組み立て方法

Also Published As

Publication number Publication date
JPH0416943B2 (enrdf_load_stackoverflow) 1992-03-25

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