JPS584460B2 - ハンドウタイキオクソウチ - Google Patents
ハンドウタイキオクソウチInfo
- Publication number
- JPS584460B2 JPS584460B2 JP49087854A JP8785474A JPS584460B2 JP S584460 B2 JPS584460 B2 JP S584460B2 JP 49087854 A JP49087854 A JP 49087854A JP 8785474 A JP8785474 A JP 8785474A JP S584460 B2 JPS584460 B2 JP S584460B2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- region
- transistor
- substrate
- source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000010354 integration Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000969 carrier Substances 0.000 description 2
- 229910052681 coesite Inorganic materials 0.000 description 2
- 229910052906 cristobalite Inorganic materials 0.000 description 2
- 230000005264 electron capture Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910052698 phosphorus Inorganic materials 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 229910052682 stishovite Inorganic materials 0.000 description 2
- 229910052905 tridymite Inorganic materials 0.000 description 2
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000009825 accumulation Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- -1 phosphorus ions Chemical class 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Landscapes
- Non-Volatile Memory (AREA)
- Read Only Memory (AREA)
- Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49087854A JPS584460B2 (ja) | 1974-07-31 | 1974-07-31 | ハンドウタイキオクソウチ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP49087854A JPS584460B2 (ja) | 1974-07-31 | 1974-07-31 | ハンドウタイキオクソウチ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5115938A JPS5115938A (enrdf_load_stackoverflow) | 1976-02-07 |
JPS584460B2 true JPS584460B2 (ja) | 1983-01-26 |
Family
ID=13926460
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP49087854A Expired JPS584460B2 (ja) | 1974-07-31 | 1974-07-31 | ハンドウタイキオクソウチ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS584460B2 (enrdf_load_stackoverflow) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS50159613A (enrdf_load_stackoverflow) * | 1974-06-12 | 1975-12-24 | ||
JPS5356722U (enrdf_load_stackoverflow) * | 1976-10-15 | 1978-05-15 | ||
JPS57113282A (en) * | 1980-12-30 | 1982-07-14 | Fujitsu Ltd | Semiconductor memory device |
JPS61267362A (ja) * | 1985-05-22 | 1986-11-26 | Nec Corp | 半導体記憶装置 |
-
1974
- 1974-07-31 JP JP49087854A patent/JPS584460B2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS5115938A (enrdf_load_stackoverflow) | 1976-02-07 |
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