JPS5842444Y2 - ウエハの支承装置 - Google Patents

ウエハの支承装置

Info

Publication number
JPS5842444Y2
JPS5842444Y2 JP9063780U JP9063780U JPS5842444Y2 JP S5842444 Y2 JPS5842444 Y2 JP S5842444Y2 JP 9063780 U JP9063780 U JP 9063780U JP 9063780 U JP9063780 U JP 9063780U JP S5842444 Y2 JPS5842444 Y2 JP S5842444Y2
Authority
JP
Japan
Prior art keywords
wafer
rail
front surface
support device
wafer support
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9063780U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5713668U (Direct
Inventor
俊昭 藤岡
Original Assignee
日本真空技術 株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術 株式会社 filed Critical 日本真空技術 株式会社
Priority to JP9063780U priority Critical patent/JPS5842444Y2/ja
Publication of JPS5713668U publication Critical patent/JPS5713668U/ja
Application granted granted Critical
Publication of JPS5842444Y2 publication Critical patent/JPS5842444Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Physical Vapour Deposition (AREA)
JP9063780U 1980-06-30 1980-06-30 ウエハの支承装置 Expired JPS5842444Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9063780U JPS5842444Y2 (ja) 1980-06-30 1980-06-30 ウエハの支承装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9063780U JPS5842444Y2 (ja) 1980-06-30 1980-06-30 ウエハの支承装置

Publications (2)

Publication Number Publication Date
JPS5713668U JPS5713668U (Direct) 1982-01-23
JPS5842444Y2 true JPS5842444Y2 (ja) 1983-09-26

Family

ID=29452636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9063780U Expired JPS5842444Y2 (ja) 1980-06-30 1980-06-30 ウエハの支承装置

Country Status (1)

Country Link
JP (1) JPS5842444Y2 (Direct)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0313577A (ja) * 1989-06-08 1991-01-22 Agency Of Ind Science & Technol スパッタ装置の基板ホルダ

Also Published As

Publication number Publication date
JPS5713668U (Direct) 1982-01-23

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