JPS5842231A - パターン形成方法 - Google Patents

パターン形成方法

Info

Publication number
JPS5842231A
JPS5842231A JP56140246A JP14024681A JPS5842231A JP S5842231 A JPS5842231 A JP S5842231A JP 56140246 A JP56140246 A JP 56140246A JP 14024681 A JP14024681 A JP 14024681A JP S5842231 A JPS5842231 A JP S5842231A
Authority
JP
Japan
Prior art keywords
resist
layer
etched
pattern
polysilicon layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56140246A
Other languages
English (en)
Japanese (ja)
Other versions
JPH03770B2 (show.php
Inventor
Toshihiko Yoshida
俊彦 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP56140246A priority Critical patent/JPS5842231A/ja
Publication of JPS5842231A publication Critical patent/JPS5842231A/ja
Publication of JPH03770B2 publication Critical patent/JPH03770B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10P95/00—

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Drying Of Semiconductors (AREA)
JP56140246A 1981-09-08 1981-09-08 パターン形成方法 Granted JPS5842231A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56140246A JPS5842231A (ja) 1981-09-08 1981-09-08 パターン形成方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56140246A JPS5842231A (ja) 1981-09-08 1981-09-08 パターン形成方法

Publications (2)

Publication Number Publication Date
JPS5842231A true JPS5842231A (ja) 1983-03-11
JPH03770B2 JPH03770B2 (show.php) 1991-01-08

Family

ID=15264308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56140246A Granted JPS5842231A (ja) 1981-09-08 1981-09-08 パターン形成方法

Country Status (1)

Country Link
JP (1) JPS5842231A (show.php)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4790209A (en) * 1985-08-29 1988-12-13 Toyoda Gosei Co., Ltd. Impact energy absorbing steering wheel
US4829848A (en) * 1985-01-22 1989-05-16 Kabushiki Kaisha Tokai-Rika-Denki-Seisakusho Energy absorbing apparatus for steering wheel
US4920821A (en) * 1985-01-22 1990-05-01 Kabushiki Kaishma Tokai-Rika-Denki-Seisakusho Steering wheel for vehicle
JPH0430799U (show.php) * 1990-07-05 1992-03-12

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911577A (show.php) * 1972-06-01 1974-02-01
JPS50154066A (show.php) * 1974-05-31 1975-12-11
JPS54146966A (en) * 1978-05-10 1979-11-16 Nec Corp Pattern forming method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911577A (show.php) * 1972-06-01 1974-02-01
JPS50154066A (show.php) * 1974-05-31 1975-12-11
JPS54146966A (en) * 1978-05-10 1979-11-16 Nec Corp Pattern forming method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4829848A (en) * 1985-01-22 1989-05-16 Kabushiki Kaisha Tokai-Rika-Denki-Seisakusho Energy absorbing apparatus for steering wheel
US4920821A (en) * 1985-01-22 1990-05-01 Kabushiki Kaishma Tokai-Rika-Denki-Seisakusho Steering wheel for vehicle
US4790209A (en) * 1985-08-29 1988-12-13 Toyoda Gosei Co., Ltd. Impact energy absorbing steering wheel
JPH0430799U (show.php) * 1990-07-05 1992-03-12

Also Published As

Publication number Publication date
JPH03770B2 (show.php) 1991-01-08

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