JPS5841722Y2 - イオン打込用のバックプレ−ト装置 - Google Patents

イオン打込用のバックプレ−ト装置

Info

Publication number
JPS5841722Y2
JPS5841722Y2 JP1977162156U JP16215677U JPS5841722Y2 JP S5841722 Y2 JPS5841722 Y2 JP S5841722Y2 JP 1977162156 U JP1977162156 U JP 1977162156U JP 16215677 U JP16215677 U JP 16215677U JP S5841722 Y2 JPS5841722 Y2 JP S5841722Y2
Authority
JP
Japan
Prior art keywords
back plate
wafer
ion implantation
connecting rod
front surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1977162156U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5488270U (enrdf_load_stackoverflow
Inventor
信博 吉岡
Original Assignee
日本真空技術株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本真空技術株式会社 filed Critical 日本真空技術株式会社
Priority to JP1977162156U priority Critical patent/JPS5841722Y2/ja
Publication of JPS5488270U publication Critical patent/JPS5488270U/ja
Application granted granted Critical
Publication of JPS5841722Y2 publication Critical patent/JPS5841722Y2/ja
Expired legal-status Critical Current

Links

JP1977162156U 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置 Expired JPS5841722Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977162156U JPS5841722Y2 (ja) 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977162156U JPS5841722Y2 (ja) 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置

Publications (2)

Publication Number Publication Date
JPS5488270U JPS5488270U (enrdf_load_stackoverflow) 1979-06-22
JPS5841722Y2 true JPS5841722Y2 (ja) 1983-09-20

Family

ID=29157593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977162156U Expired JPS5841722Y2 (ja) 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置

Country Status (1)

Country Link
JP (1) JPS5841722Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4261762A (en) * 1979-09-14 1981-04-14 Eaton Corporation Method for conducting heat to or from an article being treated under vacuum
JPS6231972Y2 (enrdf_load_stackoverflow) * 1979-12-21 1987-08-15

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142277A (en) * 1975-06-03 1976-12-07 Fujitsu Ltd Device for electron-beam exposure

Also Published As

Publication number Publication date
JPS5488270U (enrdf_load_stackoverflow) 1979-06-22

Similar Documents

Publication Publication Date Title
JPS5841722Y2 (ja) イオン打込用のバックプレ−ト装置
JPS62152136A (ja) 半導体ウエハのスピンチヤツク
JPH035009Y2 (enrdf_load_stackoverflow)
JPS6031081Y2 (ja) バツクプレ−ト装置
JPH1078624A (ja) レントゲン装置またはこれに類似のもののためのカタパルト形位置決め引出し
JPS6131420Y2 (enrdf_load_stackoverflow)
JP2548041Y2 (ja) 基板保持装置
JPH0734317Y2 (ja) 炉開口部シール装置
JPS5914945Y2 (ja) ト−ンア−ムのア−ムレスト機構
JPS6367244U (enrdf_load_stackoverflow)
JPH01100446U (enrdf_load_stackoverflow)
JPS62105347A (ja) 半導体製造装置
JPH01173940U (enrdf_load_stackoverflow)
JPH0320060U (enrdf_load_stackoverflow)
JPH0316283Y2 (enrdf_load_stackoverflow)
JP2589760B2 (ja) テープ剥離装置
JPS5923732U (ja) 回転式イオン注入装置に於けるウエハ取付装置
JPH0611253U (ja) 回転ディスク
JPS6260339U (enrdf_load_stackoverflow)
JPS5917163U (ja) 研磨装置
JPS6219740U (enrdf_load_stackoverflow)
JPS62168644U (enrdf_load_stackoverflow)
JPH0485731U (enrdf_load_stackoverflow)
JPS58131157U (ja) 電動機の制動装置に於けるストツプ緩衝レバ−
JPH01143064U (enrdf_load_stackoverflow)