JPS5488270U - - Google Patents

Info

Publication number
JPS5488270U
JPS5488270U JP16215677U JP16215677U JPS5488270U JP S5488270 U JPS5488270 U JP S5488270U JP 16215677 U JP16215677 U JP 16215677U JP 16215677 U JP16215677 U JP 16215677U JP S5488270 U JPS5488270 U JP S5488270U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16215677U
Other languages
Japanese (ja)
Other versions
JPS5841722Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977162156U priority Critical patent/JPS5841722Y2/ja
Publication of JPS5488270U publication Critical patent/JPS5488270U/ja
Application granted granted Critical
Publication of JPS5841722Y2 publication Critical patent/JPS5841722Y2/ja
Expired legal-status Critical Current

Links

JP1977162156U 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置 Expired JPS5841722Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977162156U JPS5841722Y2 (ja) 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977162156U JPS5841722Y2 (ja) 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置

Publications (2)

Publication Number Publication Date
JPS5488270U true JPS5488270U (enrdf_load_stackoverflow) 1979-06-22
JPS5841722Y2 JPS5841722Y2 (ja) 1983-09-20

Family

ID=29157593

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977162156U Expired JPS5841722Y2 (ja) 1977-12-05 1977-12-05 イオン打込用のバックプレ−ト装置

Country Status (1)

Country Link
JP (1) JPS5841722Y2 (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648132A (en) * 1979-09-14 1981-05-01 Eaton Corp Method and device for thermally conducting vacuum coated article to be treated
JPS5694038U (enrdf_load_stackoverflow) * 1979-12-21 1981-07-25

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142277A (en) * 1975-06-03 1976-12-07 Fujitsu Ltd Device for electron-beam exposure

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51142277A (en) * 1975-06-03 1976-12-07 Fujitsu Ltd Device for electron-beam exposure

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5648132A (en) * 1979-09-14 1981-05-01 Eaton Corp Method and device for thermally conducting vacuum coated article to be treated
JPS5694038U (enrdf_load_stackoverflow) * 1979-12-21 1981-07-25

Also Published As

Publication number Publication date
JPS5841722Y2 (ja) 1983-09-20

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