JPS5841535Y2 - 露光用フォトマスク - Google Patents

露光用フォトマスク

Info

Publication number
JPS5841535Y2
JPS5841535Y2 JP1976137181U JP13718176U JPS5841535Y2 JP S5841535 Y2 JPS5841535 Y2 JP S5841535Y2 JP 1976137181 U JP1976137181 U JP 1976137181U JP 13718176 U JP13718176 U JP 13718176U JP S5841535 Y2 JPS5841535 Y2 JP S5841535Y2
Authority
JP
Japan
Prior art keywords
photomask
exposure
photomasks
pin
spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1976137181U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5356201U (enExample
Inventor
功 三崎
行雄 松本
Original Assignee
セイコーインスツルメンツ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by セイコーインスツルメンツ株式会社 filed Critical セイコーインスツルメンツ株式会社
Priority to JP1976137181U priority Critical patent/JPS5841535Y2/ja
Publication of JPS5356201U publication Critical patent/JPS5356201U/ja
Application granted granted Critical
Publication of JPS5841535Y2 publication Critical patent/JPS5841535Y2/ja
Expired legal-status Critical Current

Links

JP1976137181U 1976-10-13 1976-10-13 露光用フォトマスク Expired JPS5841535Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1976137181U JPS5841535Y2 (ja) 1976-10-13 1976-10-13 露光用フォトマスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1976137181U JPS5841535Y2 (ja) 1976-10-13 1976-10-13 露光用フォトマスク

Publications (2)

Publication Number Publication Date
JPS5356201U JPS5356201U (enExample) 1978-05-13
JPS5841535Y2 true JPS5841535Y2 (ja) 1983-09-20

Family

ID=28746031

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1976137181U Expired JPS5841535Y2 (ja) 1976-10-13 1976-10-13 露光用フォトマスク

Country Status (1)

Country Link
JP (1) JPS5841535Y2 (enExample)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51107164U (enExample) * 1975-02-20 1976-08-27

Also Published As

Publication number Publication date
JPS5356201U (enExample) 1978-05-13

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