JPS5356201U - - Google Patents
Info
- Publication number
- JPS5356201U JPS5356201U JP1976137181U JP13718176U JPS5356201U JP S5356201 U JPS5356201 U JP S5356201U JP 1976137181 U JP1976137181 U JP 1976137181U JP 13718176 U JP13718176 U JP 13718176U JP S5356201 U JPS5356201 U JP S5356201U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976137181U JPS5841535Y2 (ja) | 1976-10-13 | 1976-10-13 | 露光用フォトマスク |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1976137181U JPS5841535Y2 (ja) | 1976-10-13 | 1976-10-13 | 露光用フォトマスク |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5356201U true JPS5356201U (enExample) | 1978-05-13 |
| JPS5841535Y2 JPS5841535Y2 (ja) | 1983-09-20 |
Family
ID=28746031
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1976137181U Expired JPS5841535Y2 (ja) | 1976-10-13 | 1976-10-13 | 露光用フォトマスク |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5841535Y2 (enExample) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51107164U (enExample) * | 1975-02-20 | 1976-08-27 |
-
1976
- 1976-10-13 JP JP1976137181U patent/JPS5841535Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51107164U (enExample) * | 1975-02-20 | 1976-08-27 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5841535Y2 (ja) | 1983-09-20 |