JPS5836738U - 露光用マスク装置 - Google Patents

露光用マスク装置

Info

Publication number
JPS5836738U
JPS5836738U JP1981129797U JP12979781U JPS5836738U JP S5836738 U JPS5836738 U JP S5836738U JP 1981129797 U JP1981129797 U JP 1981129797U JP 12979781 U JP12979781 U JP 12979781U JP S5836738 U JPS5836738 U JP S5836738U
Authority
JP
Japan
Prior art keywords
exposure mask
mask device
suction port
inert gas
outlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1981129797U
Other languages
English (en)
Japanese (ja)
Other versions
JPS623804Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
志柿　邦彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP1981129797U priority Critical patent/JPS5836738U/ja
Publication of JPS5836738U publication Critical patent/JPS5836738U/ja
Application granted granted Critical
Publication of JPS623804Y2 publication Critical patent/JPS623804Y2/ja
Granted legal-status Critical Current

Links

JP1981129797U 1981-08-31 1981-08-31 露光用マスク装置 Granted JPS5836738U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1981129797U JPS5836738U (ja) 1981-08-31 1981-08-31 露光用マスク装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1981129797U JPS5836738U (ja) 1981-08-31 1981-08-31 露光用マスク装置

Publications (2)

Publication Number Publication Date
JPS5836738U true JPS5836738U (ja) 1983-03-10
JPS623804Y2 JPS623804Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-28

Family

ID=29923459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1981129797U Granted JPS5836738U (ja) 1981-08-31 1981-08-31 露光用マスク装置

Country Status (1)

Country Link
JP (1) JPS5836738U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011237718A (ja) * 2010-05-13 2011-11-24 Toppan Printing Co Ltd 露光装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5290063B2 (ja) * 2009-06-17 2013-09-18 株式会社日立ハイテクノロジーズ プロキシミティ露光装置、プロキシミティ露光装置の基板温度制御方法、及び表示用パネル基板の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5368981A (en) * 1976-12-02 1978-06-19 Mitsubishi Electric Corp Vacuum contact printing apparatus

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5368981A (en) * 1976-12-02 1978-06-19 Mitsubishi Electric Corp Vacuum contact printing apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011237718A (ja) * 2010-05-13 2011-11-24 Toppan Printing Co Ltd 露光装置

Also Published As

Publication number Publication date
JPS623804Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1987-01-28

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