JPS5836725B2 - 光学式変位測定装置 - Google Patents

光学式変位測定装置

Info

Publication number
JPS5836725B2
JPS5836725B2 JP53092261A JP9226178A JPS5836725B2 JP S5836725 B2 JPS5836725 B2 JP S5836725B2 JP 53092261 A JP53092261 A JP 53092261A JP 9226178 A JP9226178 A JP 9226178A JP S5836725 B2 JPS5836725 B2 JP S5836725B2
Authority
JP
Japan
Prior art keywords
scale
main scale
index
main
magnet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53092261A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5518969A (en
Inventor
信吾 仁科
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsutoyo Manufacturing Co Ltd
Original Assignee
Mitsutoyo Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsutoyo Manufacturing Co Ltd filed Critical Mitsutoyo Manufacturing Co Ltd
Priority to JP53092261A priority Critical patent/JPS5836725B2/ja
Priority to DE19792929488 priority patent/DE2929488C3/de
Publication of JPS5518969A publication Critical patent/JPS5518969A/ja
Publication of JPS5836725B2 publication Critical patent/JPS5836725B2/ja
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B3/00—Measuring instruments characterised by the use of mechanical techniques
    • G01B3/002—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/347—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells using displacement encoding scales
    • G01D5/34746—Linear encoders
    • G01D5/34753—Carriages; Driving or coupling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
JP53092261A 1978-07-27 1978-07-27 光学式変位測定装置 Expired JPS5836725B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP53092261A JPS5836725B2 (ja) 1978-07-27 1978-07-27 光学式変位測定装置
DE19792929488 DE2929488C3 (de) 1978-07-27 1979-07-20 Optischer Linearkodierer mit einer Linearskala

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP53092261A JPS5836725B2 (ja) 1978-07-27 1978-07-27 光学式変位測定装置

Publications (2)

Publication Number Publication Date
JPS5518969A JPS5518969A (en) 1980-02-09
JPS5836725B2 true JPS5836725B2 (ja) 1983-08-11

Family

ID=14049456

Family Applications (1)

Application Number Title Priority Date Filing Date
JP53092261A Expired JPS5836725B2 (ja) 1978-07-27 1978-07-27 光学式変位測定装置

Country Status (2)

Country Link
JP (1) JPS5836725B2 (de)
DE (1) DE2929488C3 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5726004U (de) * 1980-07-21 1982-02-10
DE3201887C2 (de) * 1982-01-22 1983-11-24 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Längenmeßeinrichtung
DE19803360C2 (de) * 1997-02-10 2002-01-10 Heidenhain Gmbh Dr Johannes Verfahren zur Montage einer Positionsmeßeinrichtung und Vorrichtung zur Durchführung des Verfahrens
DE102007033574A1 (de) * 2007-07-19 2009-01-22 Dr. Johannes Heidenhain Gmbh Längenmesseinrichtung
KR101105045B1 (ko) * 2009-07-28 2012-01-16 현대위아 주식회사 공작기계용 선형 엔코더 시스템

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246754U (de) * 1975-09-12 1977-04-02

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2029715C3 (de) * 1970-06-16 1980-07-10 7517 Waldbronn Verstelleinrichtung
DE2207374C3 (de) * 1972-02-17 1978-09-28 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Abdeckungseinrichtung für Meßsysteme
DE2213373C3 (de) * 1972-03-20 1974-09-05 Breitbach, Elmar, Dipl.-Ing., 3400 Goettingen Körperschallwandler
US3833303A (en) * 1972-10-06 1974-09-03 Bausch & Lomb Measuring apparatus using the moire fringe concept of measurement
JPS5713443Y2 (de) * 1976-12-21 1982-03-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5246754U (de) * 1975-09-12 1977-04-02

Also Published As

Publication number Publication date
DE2929488A1 (de) 1980-02-07
DE2929488C3 (de) 1987-07-30
DE2929488B2 (de) 1981-07-02
JPS5518969A (en) 1980-02-09

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