JPS5835829A - 金属イオン源 - Google Patents

金属イオン源

Info

Publication number
JPS5835829A
JPS5835829A JP56135092A JP13509281A JPS5835829A JP S5835829 A JPS5835829 A JP S5835829A JP 56135092 A JP56135092 A JP 56135092A JP 13509281 A JP13509281 A JP 13509281A JP S5835829 A JPS5835829 A JP S5835829A
Authority
JP
Japan
Prior art keywords
needle
reservoir
gallium
graphite
ion source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56135092A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6329373B2 (enrdf_load_stackoverflow
Inventor
Ryuzo Aihara
相原　龍三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Nippon Telegraph and Telephone Corp
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56135092A priority Critical patent/JPS5835829A/ja
Publication of JPS5835829A publication Critical patent/JPS5835829A/ja
Publication of JPS6329373B2 publication Critical patent/JPS6329373B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/26—Ion sources; Ion guns using surface ionisation, e.g. field effect ion sources, thermionic ion sources

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Electron Sources, Ion Sources (AREA)
JP56135092A 1981-08-28 1981-08-28 金属イオン源 Granted JPS5835829A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56135092A JPS5835829A (ja) 1981-08-28 1981-08-28 金属イオン源

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56135092A JPS5835829A (ja) 1981-08-28 1981-08-28 金属イオン源

Publications (2)

Publication Number Publication Date
JPS5835829A true JPS5835829A (ja) 1983-03-02
JPS6329373B2 JPS6329373B2 (enrdf_load_stackoverflow) 1988-06-13

Family

ID=15143644

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56135092A Granted JPS5835829A (ja) 1981-08-28 1981-08-28 金属イオン源

Country Status (1)

Country Link
JP (1) JPS5835829A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6266547A (ja) * 1985-09-17 1987-03-26 Mitsubishi Electric Corp 液体金属イオン源
US4721878A (en) * 1985-06-04 1988-01-26 Denki Kagaku Kogyo Kabushiki Kaisha Charged particle emission source structure
US6509570B1 (en) 1999-01-07 2003-01-21 Denki Kagaku Kogyo Kabushiki Kaisha Gallium ion source

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514646A (en) * 1978-07-17 1980-02-01 Toshiba Corp Electron gun
JPS5633468A (en) * 1979-08-23 1981-04-03 Atomic Energy Authority Uk Spray generating source of fine droplet and ion of liquid material

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514646A (en) * 1978-07-17 1980-02-01 Toshiba Corp Electron gun
JPS5633468A (en) * 1979-08-23 1981-04-03 Atomic Energy Authority Uk Spray generating source of fine droplet and ion of liquid material

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4721878A (en) * 1985-06-04 1988-01-26 Denki Kagaku Kogyo Kabushiki Kaisha Charged particle emission source structure
JPS6266547A (ja) * 1985-09-17 1987-03-26 Mitsubishi Electric Corp 液体金属イオン源
US6509570B1 (en) 1999-01-07 2003-01-21 Denki Kagaku Kogyo Kabushiki Kaisha Gallium ion source

Also Published As

Publication number Publication date
JPS6329373B2 (enrdf_load_stackoverflow) 1988-06-13

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