JPS5834254B2 - ケンマソウチ - Google Patents
ケンマソウチInfo
- Publication number
- JPS5834254B2 JPS5834254B2 JP49111475A JP11147574A JPS5834254B2 JP S5834254 B2 JPS5834254 B2 JP S5834254B2 JP 49111475 A JP49111475 A JP 49111475A JP 11147574 A JP11147574 A JP 11147574A JP S5834254 B2 JPS5834254 B2 JP S5834254B2
- Authority
- JP
- Japan
- Prior art keywords
- polishing
- cover
- workpiece
- wafer
- holding plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49111475A JPS5834254B2 (ja) | 1974-09-30 | 1974-09-30 | ケンマソウチ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP49111475A JPS5834254B2 (ja) | 1974-09-30 | 1974-09-30 | ケンマソウチ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5139497A JPS5139497A (enrdf_load_stackoverflow) | 1976-04-02 |
| JPS5834254B2 true JPS5834254B2 (ja) | 1983-07-26 |
Family
ID=14562183
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49111475A Expired JPS5834254B2 (ja) | 1974-09-30 | 1974-09-30 | ケンマソウチ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5834254B2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5320194A (en) * | 1976-08-06 | 1978-02-24 | Nec Corp | Method for polishing both surfaces undistortedly |
| JPH0811355B2 (ja) * | 1992-08-03 | 1996-02-07 | 株式会社日立製作所 | 研磨装置 |
| EP0812656A3 (en) * | 1992-09-24 | 1998-07-15 | Ebara Corporation | Dressing device for dressing a polishing pad in a polishing machine |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5123997Y2 (enrdf_load_stackoverflow) * | 1971-06-25 | 1976-06-19 |
-
1974
- 1974-09-30 JP JP49111475A patent/JPS5834254B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5139497A (enrdf_load_stackoverflow) | 1976-04-02 |
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