JPS5834254B2 - ケンマソウチ - Google Patents

ケンマソウチ

Info

Publication number
JPS5834254B2
JPS5834254B2 JP49111475A JP11147574A JPS5834254B2 JP S5834254 B2 JPS5834254 B2 JP S5834254B2 JP 49111475 A JP49111475 A JP 49111475A JP 11147574 A JP11147574 A JP 11147574A JP S5834254 B2 JPS5834254 B2 JP S5834254B2
Authority
JP
Japan
Prior art keywords
polishing
cover
workpiece
wafer
holding plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49111475A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5139497A (enrdf_load_stackoverflow
Inventor
悦郎 江頭
信一郎 三好
敏博 小林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP49111475A priority Critical patent/JPS5834254B2/ja
Publication of JPS5139497A publication Critical patent/JPS5139497A/ja
Publication of JPS5834254B2 publication Critical patent/JPS5834254B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP49111475A 1974-09-30 1974-09-30 ケンマソウチ Expired JPS5834254B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49111475A JPS5834254B2 (ja) 1974-09-30 1974-09-30 ケンマソウチ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49111475A JPS5834254B2 (ja) 1974-09-30 1974-09-30 ケンマソウチ

Publications (2)

Publication Number Publication Date
JPS5139497A JPS5139497A (enrdf_load_stackoverflow) 1976-04-02
JPS5834254B2 true JPS5834254B2 (ja) 1983-07-26

Family

ID=14562183

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49111475A Expired JPS5834254B2 (ja) 1974-09-30 1974-09-30 ケンマソウチ

Country Status (1)

Country Link
JP (1) JPS5834254B2 (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5320194A (en) * 1976-08-06 1978-02-24 Nec Corp Method for polishing both surfaces undistortedly
JPH0811355B2 (ja) * 1992-08-03 1996-02-07 株式会社日立製作所 研磨装置
DE69317838T2 (de) * 1992-09-24 1998-11-12 Ebara Corp Poliergerät

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5123997Y2 (enrdf_load_stackoverflow) * 1971-06-25 1976-06-19

Also Published As

Publication number Publication date
JPS5139497A (enrdf_load_stackoverflow) 1976-04-02

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