JPS5832347A - 透過型電子顕微鏡 - Google Patents

透過型電子顕微鏡

Info

Publication number
JPS5832347A
JPS5832347A JP56130617A JP13061781A JPS5832347A JP S5832347 A JPS5832347 A JP S5832347A JP 56130617 A JP56130617 A JP 56130617A JP 13061781 A JP13061781 A JP 13061781A JP S5832347 A JPS5832347 A JP S5832347A
Authority
JP
Japan
Prior art keywords
analyzer
electron beam
lens
electron
switch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56130617A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6340019B2 (enExample
Inventor
Tetsuo Oikawa
哲夫 及川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56130617A priority Critical patent/JPS5832347A/ja
Publication of JPS5832347A publication Critical patent/JPS5832347A/ja
Publication of JPS6340019B2 publication Critical patent/JPS6340019B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56130617A 1981-08-20 1981-08-20 透過型電子顕微鏡 Granted JPS5832347A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56130617A JPS5832347A (ja) 1981-08-20 1981-08-20 透過型電子顕微鏡

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56130617A JPS5832347A (ja) 1981-08-20 1981-08-20 透過型電子顕微鏡

Publications (2)

Publication Number Publication Date
JPS5832347A true JPS5832347A (ja) 1983-02-25
JPS6340019B2 JPS6340019B2 (enExample) 1988-08-09

Family

ID=15038501

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56130617A Granted JPS5832347A (ja) 1981-08-20 1981-08-20 透過型電子顕微鏡

Country Status (1)

Country Link
JP (1) JPS5832347A (enExample)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62170142A (ja) * 1986-01-23 1987-07-27 Jeol Ltd オメガ型エネルギ−アナライザモ−ドにおける残留磁場打ち消し装置
JPH05266844A (ja) * 1992-03-19 1993-10-15 Hitachi Ltd 電子顕微鏡及びその使用方法
DE19526999A1 (de) * 1994-07-25 1996-02-01 Hitachi Ltd Elektronenenergiefilter und Transmissionselektronenmikroskop mit einem solchen
JPH10302711A (ja) * 1997-02-27 1998-11-13 Jeol Ltd オメガ型エネルギーフィルタ
JPH11135062A (ja) * 1997-09-01 1999-05-21 Leo Elektronenmikroskopie Gmbh エネルギフィルタ及び電子顕微鏡
US6933500B2 (en) 2002-11-18 2005-08-23 Hitachi, Ltd. Electron microscope

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62170142A (ja) * 1986-01-23 1987-07-27 Jeol Ltd オメガ型エネルギ−アナライザモ−ドにおける残留磁場打ち消し装置
JPH05266844A (ja) * 1992-03-19 1993-10-15 Hitachi Ltd 電子顕微鏡及びその使用方法
DE19526999A1 (de) * 1994-07-25 1996-02-01 Hitachi Ltd Elektronenenergiefilter und Transmissionselektronenmikroskop mit einem solchen
US5585630A (en) * 1994-07-25 1996-12-17 Hitachi, Ltd. Electron energy filter and transmission electron microscope provided with the same
DE19526999C2 (de) * 1994-07-25 1998-01-29 Hitachi Ltd Elektronenenergiefilter und Transmissionselektronenmikroskop mit einem solchen
JPH10302711A (ja) * 1997-02-27 1998-11-13 Jeol Ltd オメガ型エネルギーフィルタ
JPH11135062A (ja) * 1997-09-01 1999-05-21 Leo Elektronenmikroskopie Gmbh エネルギフィルタ及び電子顕微鏡
US6933500B2 (en) 2002-11-18 2005-08-23 Hitachi, Ltd. Electron microscope

Also Published As

Publication number Publication date
JPS6340019B2 (enExample) 1988-08-09

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