JPS583144A - Reproducing stylus for detecting change in static capacitance - Google Patents

Abstract

PURPOSE:To extend the life, by providing an electrode which is not easily exfoliated, excellent in wear resistance and not easily damaged, on an electrode fitting plane provided at a part of highly hard and wear-resistant material for a reproducing stylus main body. CONSTITUTION:A metallic thin film B is attached to an electrode fitting plane 4 provided on a diamond A and a metallic nitride or metallic carbide thin layer C is attached on the film B. As a metal for the film B, an element which can form a metallized layer with carbon constituting the diamond such as titanium or hafnium is used. The thin layer C of nitride or carbide consists of a chemical compound between the metal constituting the layer B and nitrogen and a chemical compound with carbond, and when the thin layer B is made of titanium or hafnium, the layer C is constituted with titanium nitride, hafnium nitride, titanium carbide or hafnium carbide.

Description

DETAILED DESCRIPTION OF THE INVENTION An information recording medium circle it (disk ) vC
4 contacts on the cod ridge in the disk, the information signal gold gauze 1 of the disk
Electricity #Ii that can be indulged in as a change in valley m value
The information port d@ playback method, which detects changes in the capacitance value and uses the tllHg number of the disc, uses the optical Because it has more unique features than many other types of t'# information recording and reproducing methods, research into its practical application has been promoted, and it has now reached the stage of practical application. .

By the way, in the type of information recording method that detects changes in the violet value, there is a type in which the disc has a recording medium (Fig. 1 (a)) in which the information signal is output from the detection disc.
(Fig. 1(b)), or the form without a guide (Fig. 1(b)), or the form in which it falls down, the state in which it is in sliding contact with the disk surface. A regeneration stylus is required, but since the regeneration stylus is in contact with the disk surface during the regeneration operation, a regeneration stylus that can be used for a long period of time (a long-life regeneration stylus) is required. In order to obtain a regenerated needle), a hard material having wear resistance (high hardness and wear resistance) must be used as the material for the regenerated needle to dissipate heat.

, 1-1 (a) and 1-1 (b) are perspective views of an example of a regeneration needle that detects a change in the capacitance value, and FIG. 1 (a).

(1)) In the figure, there is a regenerated needle body made of a hardness material with 1 #i wear resistance, a sliding contact surface of 2 companies, and 6 electrodes attached on the surface where the electrode layer is formed. The reproducing needle that detects changes in the electromagnetic violet value detects the information in the recorded trace by the shoulder of the electrode F4 which is removed from the disk surface with the 1Q[&I2 in sliding contact with the surface of the disk D. Since the regeneration operation is to recover the signal as a change in the response tm, the regeneration needle should be able to perform a good regeneration operation using the IIC and other electrodes attached to the attachment surface of the regeneration needle body 1. The end of 3 must always be exposed on the sliding contact surface 2, and therefore K has a large adhesion force I& against the surface where the L pole is attached to improve the wear resistance. It is required that the electrodes have been deposited.

In addition to the high hardness of the regenerated needle body, it is necessary to have an electrode layered thereon with a large layer strength and corrosion resistance. However, I! Diamond, which is known as a high hardness material with abrasion resistance, has abrasion resistance. When making a regeneration needle that detects changes in I# tolerance by using the material for the needle body, a conductive material that exhibits relatively high bonding strength with diamond is used as the electrode material. Selectively use the conductive film 1* to destroy it, or implant a conductive substance into the diamond by ion implantation method 4
Measures have been taken to form + and -.

However, conductive materials such as hafnium and titanium, which have been selected as conductive materials with a relatively large bond strength between them and diamond, are used in the ring method or ion blating method. Even if a four-layer thin film is formed by so-called dry plating,
It is difficult to obtain an electrode with sufficiently satisfactory abrasion resistance, and even if a conductive layer is formed by depositing a conductive substance into the diamond by ion implantation, , it is a secret that the conductivity I- alone constitutes an electrode having a low electric resistance value, and it has a low electric resistance value due to the implantation of ions! When trying to configure the poles,
This causes lattice defects in the diamond crystal, making the diamond brittle, and problems such as chipping as shown in Figure 2G) occur in the diamond during use of the regenerated needle.

In addition, in a regenerated needle in which the electrode is formed by layering a metal such as titanium or hafnium on diamond using the dry plating method described above, the electrode 3 should be made of soft metal.

When using a regenerated needle, the Kt pole shoulder end is worn out.'A-2 Fig. 0))
9, or because the metal of the electrode is made of m- at a relatively low temperature, the radiation generated between the pole 11 and the disk D during use of the playback needle. The voltage could damage the electrode 3 as shown in FIG. 2(c), making it difficult to obtain a regenerated needle with a long life.

The present invention has been made for the entire purpose of providing a regeneration needle that detects changes in the static fi value and does not cause the various spots that occur in the conventional regeneration needles described above. Changes in the Hiiragi value The detailed content of the structured regeneration needle is shown in 1.
A detailed explanation will be given below.

FIG. 26 is a perspective view of an embodiment of the regeneration vt of the variable structure type regeneration t fil of the present invention, and the structure of the electrode part of the regeneration needle shown in FIGS. 4 and 3. It is a side view of the sentry 4a.

In Figs. 3 and 4, A is a high M degree correction #1 repellent *= where the regenerated needle body is provided with a flash attachment forming surface.
In the following examples, it is assumed that the above part A contains all of the diamond.

In Figures 1 and 6 and Figure 4, Bke diamond AIC
0 is a thin layer of metal electrified material or metal carbide deposited on the above-mentioned metal layer B. It is.

The metal used to form the metal thin layer B mentioned above is, for example, titanium or hafnium, which can form an alloy layer with the carbon that constitutes diamond. .

In addition, the thin layer of metal electrification or metal carbide deposited on the metal 41B is as follows:
The thin layer Bt of the metal described above is composed of a compound of metal and nitrogen, or a compound of carbon and a metal constituting the thin layer Bt of the metal described above, and the four layers B of the metal described above are made of, for example, titanium. or hafnium, the thin layer 0 is composed of titanium nitride or electrified hafnium, or hafnium carbide over titanium carbide.

The regenerating needle having such a configuration can be manufactured by applying titanium or hafnium to the diamond A [VL and other adhesion forming surface 4], using a pure distillation method, an ion sputtering method, an ion blating method. Suppose that a thin layer B is formed by applying the so-called dry A deposition method such as It can be easily fabricated by depositing a thin layer of carbide or a metal casing.

FIG. 4 shows that after a thin metal layer B is deposited on the electrode adhesion forming surface 4 of the diamond by a so-called dry metal method, OVD is applied onto the thin metal layer B described above.
Diamond A and metal 4 when a thin layer C of metal electrification or metal carbide is formed by the method
The mode of adhesion with J*B, and the thin metal layer B and metal nitrogen,
4 is a diagram showing the mode of adhesion of a thin layer 0 of a carbide or a carbide, and in this FIG.
In addition, Ob in FIG. 4 indicates an alloy layer 1 of a metal and a metal nitride or carbide (a region shared by the metal and the metal nitride or carbide).

In this way, in the regenerated needle of the present invention, the electrode 6 adhered and formed on the electrode-attached layer forming surface 4 of the diamond dome is in a good layered state with respect to the diamond dome through the alloy layer Ba. It is constructed as a laminated structure of the metal layer M4B shown in FIG. In addition, the state of the adhesion between the electrode-attached layer forming surface 4 of the diamond and the electrode 6 is made into a good condition, and peeling of the electrode during use of the regenerated needle can be effectively prevented.

In addition, electrified or carbide of titanium, or carbide of hafnium, etc., all have good conductivity and high melting point, and exhibit a high I11 degree, so they can be used in the present invention. The electrode of the regenerated needle is J111 corrosion resistant VC.
To easily provide a long-life regenerated needle without causing hot water loss to the electrode even if the electrode is damaged or discharged.

Figure 25 shows M@ of another example of the regeneration needle of the present invention.
gJIrln diagram, this regenerated needle not shown in Figure 5,
1 alloy layer B on the electrode layer formation surface in the diamond
a thin layer of metal BIi with a coating layer, then a thin layer 01 of a metal electrified material or a metal verticalization layer is deposited on said thin layer B1 of metal via alloy/1110b+, and further, Alloy layer Ob! depositing a thin layer of metal B2 through the
Further, a thin layer 02 of metal nitride or carbide is deposited via the alloy layer 0bsf, thereby forming the pole 6.

In carrying out the present invention, the electrode 6 is constructed by laminating a thin layer B of metal and a thin layer 0 of metal nitride or metal carbide by sequentially and alternately reheating and laminating them many times. It is also possible to do so. Further, the thickness of the electrode 6 is set to a predetermined value, for example, 20, regardless of the number of laminated layers constituting the 11E electrode 6.
00 to 60 strokes should be made of dust.

Next, an example of a manufacturing method for the regenerated needle and electrode 60S of the present invention described above will be explained.

First, diamond A, which is the raw material, is completely cleaned, and the metal in the target and electron gun is gradually vented. Next, the scraps in one bell gear are removed using an optical partial pressure button.Next, bombardment or reverse sputtering is performed on the surface of diamond A on which the electrode layer is formed, and that surface is cleaned using optical partial pressure.

After a while, argon gas with a purity of 99.9 or higher is introduced into the bell jar, and a thin layer of titanium or haphazard ram is formed on the diamond A by ion sputtering or ion blasting.

The film thickness of the metal layered by the above process is 1 straight (J4 depending on the number of seed layers, but 50~
When the film thickness reaches a predetermined value (within the range of 500 angstroms), a layer is formed by the OVD method using a gas or acetylene gas, and when the film thickness reaches a predetermined value of 1c, a layer is formed. When the operation is stopped, an electrode 6 made by Osamu Senzo as shown in the fourth figure is obtained.

In addition, by sequentially and alternately repeating the above-mentioned layer film operation in an argon gas atmosphere and N film excitation in an i1 accumulation gas or acetylene gas atmosphere a plurality of times, p
1 gold wood JIB and gold electrification gtJ or a thin layer of carbide is copper! It is clear that 100,000,000,000,000,000,000,000,000,000,000, are stacked in L.

It is clear that an electrode 6 seeded with successive alternating thin layers of gold nitride or carbide is provided.

Since metal nitride or carbide crystals become columnar Mj crystals, a thin layer of metal nitride or carbide may be strong against label tags but may cause problems with peeling.
By making #6 a multi-layered structure, JjTT
issue can be solved successfully.

As can be seen from the detailed explanation above, the capacitance weight change supply type regeneration needle of the present invention has a high capacitance value of 11iI in the regeneration needle body! An electrode with an electrode layer formed on a part of the abrasion-resistant material can be formed into an electrode that can be peeled off, has abrasion resistance, is dredged with 1C, and has a horizontal structure that can be easily applied by electric discharge. Therefore, according to the present invention, it is possible to easily provide a regenerated needle that satisfactorily eliminates all the drawbacks of the conventional regenerated needles described above.

[Brief explanation of the drawing]

Fig. 1 Ca), (+)) is a perspective view of a regenerated needle with a slight wrinkle, and Fig. 2 (ω~(0) is a problem with the conventional regenerated needle?I-Explanation) Perspective view of the Ao needle for use, No. 6
The figure is a perspective view of an actual aaatt-bore of the regenerated needle of the present invention, and FIGS. 4 and 5 are the configurations of the ll1c wedge portions of different embodiments of the regenerated needle of the present invention. r: It is a 11411 side view of a vertical cross-section of a cutting needle for boring. Mu...Diamond, B, Bl, Ba...Kanasu's 4
No, 0, 01.02...Thin layer of metal nitride or carbide, Ba, Bat, Ob, Obt
~ Obs ・- Alloy layer, Patent applicant: Victor Company of Japan Co., Ltd. Procedural amendment (voluntary) December 7, 1980 Mr. Haruki Shimada, Commissioner of the Japan Patent Office, Change-detecting regeneration needle of capacitance value 3, Case of person who makes amendments Relationship with Patent Applicant 4, Agent 6, Subject of amendment Detailed explanation of the invention in the specification Column I
Contents of amendment: Specification O, page 8, line 18 “Vacue 4”
is corrected to "Benoya-".

Claims (1)

[Scope of Claims] 1. By slidingly contacting a recording trace on an information recording medium disk having a recording trace formed by an arrangement of bits corresponding to an information signal, and changing the capacitance value of the information signal in the recording trace. 11 It is a capacitance value change detection type regeneration needle equipped with an electrode part that can be taken out as a change in Qi according to the change in spirit, and the regeneration needle body is provided with a partial pressure of 4-layer hardness and abrasion resistant material. A thin layer of a metal that is alloyed with the Sakaki material of the /IaJ hardness control light material is formed on the electro-ground adhesion formation surface via an alloy layer. A capacitance value change detecting regeneration needle 2 with an electric insulating part formed by Sakaki, and four metal layers on an electrode layer forming surface provided on a part of the regeneration needle main body made of a high hardness and wear-resistant material. The metal electrified proboscis is a change-detecting type of capacitance (1) according to claim 1, in which several thin layers of carbide are sequentially provided one after the other to constitute the other part. High ii1 in recycled needle & recycled needle body! Claim 17111, item 1, in which diamond is used as the wear-resistant material
# Tolerance tg change detection type regeneration needle 4, the change detection type regeneration needle of Seiden answer jll value as set forth in claim 1, wherein the metal used for the electric power is titanium or ha7nium.