JPS5829615B2 - コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ - Google Patents

コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Info

Publication number
JPS5829615B2
JPS5829615B2 JP49105523A JP10552374A JPS5829615B2 JP S5829615 B2 JPS5829615 B2 JP S5829615B2 JP 49105523 A JP49105523 A JP 49105523A JP 10552374 A JP10552374 A JP 10552374A JP S5829615 B2 JPS5829615 B2 JP S5829615B2
Authority
JP
Japan
Prior art keywords
chloride
reaction vessel
gallium
gas
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP49105523A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5133561A (en
Inventor
昭洋 柴富
正幸 地福
建弥 中井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP49105523A priority Critical patent/JPS5829615B2/ja
Publication of JPS5133561A publication Critical patent/JPS5133561A/ja
Publication of JPS5829615B2 publication Critical patent/JPS5829615B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP49105523A 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ Expired JPS5829615B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP49105523A JPS5829615B2 (ja) 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP49105523A JPS5829615B2 (ja) 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Publications (2)

Publication Number Publication Date
JPS5133561A JPS5133561A (en) 1976-03-22
JPS5829615B2 true JPS5829615B2 (ja) 1983-06-23

Family

ID=14409943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49105523A Expired JPS5829615B2 (ja) 1974-09-14 1974-09-14 コウヒテイコウカゴウブツハンドウタイ ノ キソウセイチヨウホウ

Country Status (1)

Country Link
JP (1) JPS5829615B2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006024597A (ja) * 2004-07-06 2006-01-26 Furukawa Co Ltd 気相成長装置およびｉｉｉ族窒化物半導体膜の形成方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62219590A (ja) * 1986-03-19 1987-09-26 Nec Corp 光半導体集積素子及びその製造方法
JPH0818901B2 (ja) * 1989-01-13 1996-02-28 日本電気株式会社 気相成長方法及び埋め込み構造半導体レーザの製造方法

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOURNAL OF THE ELECTROCHEMICAL SOCIETY=1966 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006024597A (ja) * 2004-07-06 2006-01-26 Furukawa Co Ltd 気相成長装置およびｉｉｉ族窒化物半導体膜の形成方法

Also Published As

Publication number Publication date
JPS5133561A (en) 1976-03-22

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